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Showing papers on "Indium tin oxide published in 1999"


Journal ArticleDOI
TL;DR: In this paper, high-quality indium-tin-oxide (ITO) thin films were grown by pulsed laser deposition (PLD) on glass substrates without a postdeposition annealing treatment.
Abstract: High-quality indium–tin–oxide (ITO) thin films (200–850 nm) have been grown by pulsed laser deposition (PLD) on glass substrates without a postdeposition annealing treatment. The structural, electrical, and optical properties of these films have been investigated as a function of target composition, substrate deposition temperature, background gas pressure, and film thickness. Films were deposited from various target compositions ranging from 0 to 15 wt % of SnO2 content. The optimum target composition for high conductivity was 5 wt % SnO2+95 wt % In2O3. Films were deposited at substrate temperatures ranging from room temperature to 300 °C in O2 partial pressures ranging from 1 to 100 mTorr. Films were deposited using a KrF excimer laser (248 nm, 30 ns full width at half maximum) at a fluence of 2 J/cm2. For a 150-nm-thick ITO film grown at room temperature in an oxygen pressure of 10 mTorr, the resistivity was 4×10−4 Ω cm and the average transmission in the visible range (400–700 nm) was 85%. For a 170-n...

1,202 citations


Journal ArticleDOI
TL;DR: In this paper, the authors report electroabsorption measurements of polymer light-emitting diodes, (LEDs), fabricated with poly(4-4′-diphenylene dioxythiophene), PDPV, as the emissive layer, Ca-Al cathodes, and indium tin oxide (ITO) anodes, with and without a doped conducting polymer hole injection/transport layer.
Abstract: We report electroabsorption measurements of polymer light-emitting diodes, (LEDs), fabricated with poly(4-4′-diphenylene diphenylvinylene), PDPV, as the emissive layer, Ca–Al cathodes, and indium tin oxide (ITO) anodes, with and without a doped conducting polymer hole injection/transport layer, namely poly(3,4-ethylene dioxythiophene), PEDOT, doped with poly(styrene sulfonate), PSS−. In these structures, the bias at which the electroabsorption signal is null corresponds to the difference between the electrodes’ work functions. We find that such a built-in voltage increases by 0.5 V when a PEDOT:PSS film is incorporated between the ITO electrode and the emissive layer. This leads to a marked reduction of the anode barrier height at the hole-injecting interface, and accounts for a variety of improvements brought about by the PEDOT insertion, namely: (a) the increase of luminescence efficiency, (b) the reduction of the turn-on voltage, and (c) the increase of the device lifetime.

529 citations


Journal ArticleDOI
TL;DR: In this article, high-quality indium tin oxide (ITO) thin films (150-200 nm) were grown on glass substrates by pulsed laser deposition (PLD) without postdeposition annealing.
Abstract: High-quality indium tin oxide (ITO) thin films (150–200 nm) were grown on glass substrates by pulsed laser deposition (PLD) without postdeposition annealing. The electrical, optical, and structural properties of these films were investigated as a function of substrate temperature, oxygen pressure, and film thickness. PLD provides very uniform ITO films with high transparency (⩾85% in 400–700 nm spectrum) and low electrical resistivity (2–4×10−4 Ω cm). The Hall mobility and carrier density for a 170-nm-thick film deposited at 300 °C are 29 cm2/V s and 1.45×1021 cm−3, respectively. Atomic force microscopy measurements of the ITO films indicated that their root-mean-square surface roughness (∼5 A) is superior to that (∼40 A) of commercially available ITO films deposited by sputtering. ITO films grown at room temperature by PLD were used to study the electroluminescence (EL) performance of organic light-emitting devices. The EL performance was comparable to that measured with commercial ITO anodes.

377 citations


Journal ArticleDOI
TL;DR: In this paper, the influence of oxidative and reductive treatments of indium-tin-oxide (ITO) on the performance of electroluminescent devices is presented.
Abstract: The influence of oxidative and reductive treatments of indium–tin–oxide (ITO) on the performance of electroluminescent devices is presented. The improvement in device performance is correlated with the surface chemical composition and work function. The work function is shown to be largely determined by the surface oxygen concentration. Oxygen-glow discharge or ultraviolet–ozone treatments increase the surface oxygen concentration and work function in a strongly correlated manner. High temperature, vacuum annealing reduces both the surface oxygen and work function. With oxidation the occupied, density of states (DOS) at the Fermi level is also greatly reduced. This process is reversible by vacuum annealing and it appears that the oxygen concentration, work function, and DOS can be cycled by repeated oxygen treatments and annealing. These observations are interpreted in terms of the well-known, bulk properties of ITO.

345 citations


Journal ArticleDOI
TL;DR: In this paper, an EA dopant system for obtaining organic light-emitting diodes (OLEDs) with pure red emission was proposed, which did not itself emit but assisted the energy transfer from the host (Alq3) to the red emitting dopant (DCM2).
Abstract: We propose an emitting assist (EA) dopant system for obtaining organic light-emitting diodes (OLEDs) with pure red emission. The EA dopant (rubrene) did not itself emit but assisted the energy transfer from the host (Alq3) to the red emitting dopant (DCM2). The cell structure used was {indium tin oxide/hole injection layer [(20 nm), CuPc/hole transport layer (50 nm), NPB/emitting layer (40 nm), Alq3+DCM2 (2%)+rubrene (5 wt %)]/MgIn}. (CuPc: Copper (II) phthalocyanine, NPB: N, N′-Di(naphthalen-1-yl)-N, N′-diphenyl-benzidine, DCM2: 4-Dicyanomethylene- 2-methyl-6-[2-(2,3,6,7-tetrahydro-1H,5H-benzo[ij]quinolizin-8-yl)vinyl]-4H-pyran). A stable red emission (chromaticity coordinates: x=0.64, y=0.36) was obtained in this cell within the luminance range of 100–4000 cd/m2. When the cell was not doped with rubrene, the emission color changed from red to orange as the luminance increased. The EA dopant system is a promising method for obtaining red OLEDs.

322 citations


Journal ArticleDOI
TL;DR: The amorphous-to-crystalline transformation was studied in this system using in situ resistivity, time resolved reflectivity, glancing incidence angle x-ray diffraction, and transmission electron microscopy.
Abstract: Deposition of tin-doped–indium-oxide (ITO) on unheated substrates via low energy processes such as electron-beam deposition can result in the formation of amorphous films The amorphous-to-crystalline transformation was studied in this system using in situ resistivity, time resolved reflectivity, glancing incidence angle x-ray diffraction, and transmission electron microscopy The resistivity of 180 nm thick In2O3(99 wt %SnO2) was monitored during isothermal anneals at 125, 135, 145, and 165 °C The dependence of the resistance on the volume fraction of crystalline phase was established using glancing incidence angle x-ray diffraction and a general two phase resistivity model for this system was developed These studies show that, upon annealing, as-deposited amorphous ITO undergoes both a structural relaxation and crystallization Structural relaxation of the amorphous material includes local ordering that increases the ionized vacancy concentration which, in turn, increases the carrier density in the

269 citations


Journal ArticleDOI
TL;DR: In this article, a GaN-based light-emitting diodes using transparent indium tin oxide (ITO) p contacts was proposed. But the ITO-contacted devices required an additional 2 V to drive 10 mA, as compared to similar devices with metal contacts.
Abstract: We have fabricated GaN-based light-emitting diodes using transparent indium tin oxide (ITO) p contacts. ITO-contacted devices required an additional 2 V to drive 10 mA, as compared to similar devices with metal contacts. However, ITO has lower optical absorption at 420 nm (α=664 cm−1) than commonly used thin metal films (α=3×105 cm−1). Uniform luminescence was observed in ITO-contacted devices, indicating effective hole injection and current spreading.

258 citations


Journal ArticleDOI
TL;DR: In this paper, an X-ray diffractometer (XRD) and a transmission electron microscope (TEM) were used to determine the microstructure of ITO thin films.

239 citations


Journal ArticleDOI
TL;DR: In this paper, the chemical adsorption of acids and bases on indium tin oxide (ITO) was investigated using x-ray photoelectron spectroscopy and showed that the acid treatments yield work-function shifts as high as 0.7 eV compared to the nontreated ITO.
Abstract: We report on the chemical adsorption of acids and bases on indium tin oxide (ITO). Ultraviolet photoelectron spectroscopy was used to measure the work function of the treated ITO and atomic surface concentrations were determined by x-ray photoelectron spectroscopy. The acid treatments yield work-function shifts as high as 0.7 eV compared to the nontreated ITO. Huge shifts in the work function are also obtained for the treatments with bases and are opposite to those obtained with the acids. These dramatic shifts are indicative of a double ionic surface layer. The importance of an appropriate plasma treatment prior to the chemical adsorption of acids or bases is discussed in terms of surface acido-basicity.

229 citations


Journal ArticleDOI
TL;DR: In this article, a multilayer structure consisting of three layers, tin-doped indium oxide (ITO)/Ag/ITO, was prepared by using magnetron sputtering.

229 citations


Journal ArticleDOI
TL;DR: In this article, the authors report the influence of various surface treatments of indium-tin-oxide (ITO) anodes on the operational stability of high-efficiency (up to 8.2 lm/W) green-emitting poly(3,4-ethylene dioxythiophene), hole transport layer, a polyfluorene based emissive layer, and Ca-Al cathodes.
Abstract: We report the influence of various surface treatments of indium–tin–oxide (ITO) anodes on the operational stability of high-efficiency (up to 8.2 lm/W) green-emitting polymer light-emitting diodes (PLEDs), employing a doped poly(3,4-ethylene dioxythiophene), hole transport layer, a polyfluorene based emissive layer, and Ca–Al cathodes. The anodes were modified by physical (oxygen-plasma), chemical (aquaregia), and combined treatments. Oxygen plasma improves the stability under constant current with respect to all other anodes, with half-brightness (100 cd/m2) lifetimes two to five times longer than for untreated samples, and 1000 times longer than for aquaregia samples. We derive two major indications for optimization of PLEDs. First, thermal management of the diode is of the uppermost importance and there is significant scope for improvement. Second, the ITO anode and in general the electrical properties of the hole-injecting contact are crucial to device operation, even in the presence of a hole transpo...

Journal ArticleDOI
TL;DR: In this article, an alternative process for the deposition of such coatings at room temperature by spin, dip and spray coating techniques using solutions prepared with crystalline nanoparticles fully redispersed in water (for ATO, ITO) or alcohol (for ITO), with solid contents up to 10−15 Vol%, respectively.


Journal ArticleDOI
TL;DR: In this article, the cleanliness of indium tin oxide (ITO) sub-strates used in organic light-emitting diodes (OLEDs) is in- vestigated by contact angle measurement and by X-ray pho- toemission spectroscopy (XPS).
Abstract: The cleanliness of indium tin oxide (ITO) sub- strates used in organic light-emitting diodes (OLEDs) is in- vestigated by contact angle measurement and by X-ray pho- toemission spectroscopy (XPS). It was found that ultraviolet (UV) ozone treatment is quite effective in removing organic contamination on the ITO surface. The degree of surface con- tamination was checked by changes in contact angles and by XPS. Strong correlation can be established between these two techniques. OLEDs fabricated from UV-irradiated ITO sub- strates exhibit low turn-on voltage and superior brightness. There are now widespread interests in using organic or poly- meric fluorescent thin films for fabricating electroluminescent (EL) devices (1, 2). The basic structure of an organic EL de- vice consists of one or more layers of organic fluorescent materials sandwiched between an anode and a metal cathode. In most cases, a thin film of indium tin oxide (ITO), with a thickness in the order of 0:1 mm, is used as the anode ma- terial. The ITO layer can be prepared by standard sputtering techniques onto a glass plate or a plastic substrate. Since ITO is a transparent conductor, it also functions as the viewing side for the EL device. Although there are now numerous re- ports on EL devices fabricated by many different materials, few reports have been devoted to the preparation of ITO for EL devices. Since organic EL devices are thin film devices, a small amount of contamination on the surface of the an- ode can severely alter the work function, or the interfacial barrier height between the organic layer and the anode. Un- less the anode is thoroughly cleaned, the electrical and optical characteristics can be highly unstable and unpredictable. It is, therefore, of utmost importance that the ITO substrate is carefully cleaned before deposition of the organic layers. A variety of methods (3-8) have been developed in the preparation of ITO surfaces for organic light-emitting diodes (OLEDs). A summary of these methods is shown in Table 1.

Journal ArticleDOI
TL;DR: In this paper, contact-angle hysteresis and surface energy of differently treated indium-tin-oxide (ITO) thin films obtained from contact angles for liquids with different polar character were investigated.
Abstract: We present contact-angle hysteresis and surface energy of differently treated indium–tin–oxide (ITO) thin films obtained from contact angles for liquids with different polar character We find that the hysteresis and the polar and dispersion component of the surface energy depend strongly on the surface treatments Oxygen-plasma treatments induce the highest polarity and the highest total surface energy, and we suggest that this improves the interface formation with polymers, and therefore, the performance of light-emitting diodes We discuss the results in relation to the ITO surface roughness and chemical heterogeneity modified by the different treatments

Journal ArticleDOI
TL;DR: In this article, the results indicate the presence of different chemical forms of oxygen atoms (two types of O2-, OH-, organic oxygens and H2O) which evolve with surface treatment.

Journal ArticleDOI
TL;DR: In this paper, a spray pyrolysis technique was used to synthesize transparent conductive FTO, ATO and ITO films on flat 12×12 cm borosilicate glass substrates at 500-550°C and investigated with respect to their electrical and optical properties.

Journal ArticleDOI
TL;DR: In this article, the influence of the ITO work function on the band alignment in semiconducting polymer over-layers was studied using UPS, and it was shown that the barrier to hole injection is determined by the work function of the conducting polymer instead of ITO.

Journal ArticleDOI
TL;DR: In this article, the authors used ultraviolet photoemission spectroscopy (UPS) to study the indium tin oxide/copper phthalocyanine (CuPc) interfaces, which are commonly used as an anode/hole injection layer/hole transport layer combination in organic light emitting devices.
Abstract: Ultraviolet photoemission spectroscopy (UPS) was used to study the indium tin oxide/copper phthalocyanine (CuPc) and CuPc/N,N′-diphenyl-N,N′-bis(l-naphthyl)-1,1′biphenyl-1-4,4″diamine interfaces, which are commonly used as an anode/hole injection layer/hole transport layer combination in organic light emitting devices. In order to assess the validity of the transport barriers measured using UPS, in vacuo I–V measurements have been performed on simple devices grown and measured in the same system as the samples studied using UPS. I–V characteristics were modeled using numerical simulations. The parameters used in the simulated curves which best fit the measured I–V characteristics agree quantitatively with the UPS measured barriers.

Journal ArticleDOI
TL;DR: In this paper, the influence of hole-transporting layer (HTL) on the performance of bilayer vapor-deposited organic light-emitting diodes was investigated.
Abstract: We investigate the influence of the hole-transporting layer (HTL) on the performance of bilayer vapor-deposited organic light-emitting diodes. Three different HTL materials were used: m-MTDATA, triphenyl-diamine, and naphthyl-phenyl-diamine. In all cases, Alq3 was the electron-transporting layer (ETL). We measure and compare the current density-voltage (J–V) and luminance–voltage (L–V) characteristics of these devices and we conclude that the operating voltage is controlled by the type of HTL used and the nature of the hole-injecting indium tin oxide/HTL interface. We found that the device quantum efficiency depends not only on the electron transport characteristics of the ETL but also on the energetics of the HTL/ETL interface. Analysis of the J–V characteristics suggests that current flow in bilayer devices cannot be described sufficiently by a single carrier theory; both hole and electron currents should be considered.

Journal ArticleDOI
TL;DR: In this paper, a series of soluble arylamine-based hole-transporting polymers with glass transition temperatures in the range of 130−150 °C have been synthesized, which allows facile substitution of the aryl groups on the amine with electron-withdrawing and electron-donating moieties, which permits tuning of the redox potential of the polymer.
Abstract: A series of soluble arylamine-based hole-transporting polymers with glass transition temperatures in the range of 130−150 °C have been synthesized. The synthetic methodology allows facile substitution of the aryl groups on the amine with electron-withdrawing and electron-donating moieties, which permits tuning of the redox potential of the polymer. These polymers have been used as hole-transport layers (HTLs) in two-layer light-emitting diodes ITO/HTL/Alq/Mg [ITO = indium tin oxide, Alq = tris(8-quinolinato)aluminum]. The maximum external quantum efficiency of the device increases if the redox potential of the HTL is increased to facilitate reduction of the positive charge carriers at the HTL/Alq interface. A fluorinated hole-transport polymer with a relatively large redox potential (390 mV vs ferrocenium/ferrocene) yielded the device with the highest external quantum efficiency of 1.25% photons/e-. The device stability, however, follows the opposite trend. The device with the most electron-rich HTL exhibited the best performance after prolonged usage.

Journal ArticleDOI
TL;DR: In this paper, the electron drift mobility in films of tris(8-hydroxyquinolinolato) aluminum (Alq) deposited at different rates (0.2, 0.4, and 0.7 nm/s) on silicon has been determined by the time-of-flight technique.
Abstract: The electron drift mobility in films of tris(8-hydroxyquinolinolato) aluminum (Alq) deposited at different rates (0.2, 0.4, and 0.7 nm/s) on silicon has been determined by the time-of-flight technique. It has been found that the drift mobility of electrons in Alq increased by about two orders of magnitude as the deposition rate decreased from 0.7 to 0.2 nm/s. Further, the electron drift mobility in all Alq samples increased linearly with the square root of the applied electric field. Electroluminescent devices with a structure of indium tin oxide/α-naphthylphenylbiphenyl amine (NPB, 90 nm)/Alq (90 nm)/Mg:Ag were fabricated at different Alq deposition rates. The device efficiency was found to increase with increasing electron mobility in Alq. As the electron is the minority carrier in the present device, an increase in electron mobility in Alq would thus lead to an increase in device efficiency.

Patent
21 Dec 1999
TL;DR: In this paper, a process sequence for fabricating arrays of Thin Film Transistors by printing metallic conductors for the gate and data lines and possibly the Indium Tin Oxide Pixel electrode as well is disclosed.
Abstract: A process sequence is disclosed for fabricating arrays of Thin Film Transistors by printing metallic conductors for the gate and data lines and possibly the Indium Tin Oxide Pixel electrode as well. The process eliminates conventional step-and-repeat photolithographic patterning, and provides high conductivity metallization for large arrays. These arrays may be used in displays, detectors and scanners.

Journal ArticleDOI
13 Jan 1999-Langmuir
TL;DR: In this article, a self-assembled multilayer thin films of nanometer-sized gold particles linked with organic dithiols have been prepared on glass, indium tin oxide, and gold substrates.
Abstract: Self-assembled multilayer thin films of nanometer-sized gold particles linked with organic dithiols have been prepared on glass, indium tin oxide, and gold substrates. The gold particles within these structures retain their integrity and no sintering occurs as demonstrated by their optical absorbance, ellipsometry, and potential modulated transmission and reflectance spectroscopy. The optical response to electrochemical charge injection into the outermost layer of gold particles is completely different from that of bulk gold electrodes, and it is concluded that the particles have to be regarded as discrete, immobilized quantum-dots.

Journal ArticleDOI
TL;DR: In this article, a low-cost colloidal route to nanocrystalline ZnO/CIS bilayers on indium tin oxide (ITO) glass is presented.
Abstract: Thin semiconductor CuInSe2 and CuInS2 films (CIS) with bandgap values (Eg) of around 1.04 eV (for selenide) and 1.5 eV (for sulfide) represent an important class of the currently developed light absorbers for solar energy harvesting. Conversion efficiencies of 12±13 % were achieved on large area modules, whereas close to 18 % was achieved with laboratory cells, indicating a large potential for CIS-derived photovoltaic materials. For their preparation, a broad range of physical and electrochemical deposition routes are available. Typically, CIS films are created via a rapid thermal sintering of elemental Cu, In and Se layers evaporated on Mo-coated glass substrates. The photovoltaic cell is then completed by overcoating the CIS-macrograins with a thin CdS buffer layer and a metal± organic chemical vapor deposition derived, transparent Al/ ZnO window electrode. In this contribution, we address a low cost colloidal route to nanocrystalline ZnO/CIS bilayers on indium tin oxide (ITO) glass. For the film deposition, concentrated coating colloids, with size-quantized CuInS2 particles were developed. It is well-established that size quantization in semiconductors (i.e. increasing bandgap energy with decreasing semiconductor dimension) takes place at particle dimensions smaller than the Wannier±Mott (WM) exciton of the corresponding macroscopic bulk phase. By knowledge of the high frequency dielectric constant, e¥, and the reduced effective exciton mass, m = 1/(m e + m ±1 h ), one can calculate the WM-exciton Bohr radius according to RB = (e¥/m) aB, with aB being the Bohr radius of the hydrogen atom. Taking the CIS bulk values of e¥ = 11, me = 0.16 and mh = 1.3, we calculated the WM-exciton size to be 8.1 nm, which predicts a blue shift in the optical absorption threshold (below 826 nm = 1240/1.5 eV) for CIS-particle sizes below 8 nm. Figure 1 shows changes in the optical absorption spectrum during the CIS condensation. Condensation was induced on addition of bis(trimethylsilyl)sulfide to a mixture of Cu(I)±P(OPh)3 and In(III)±P(OPh)3 complexes (Cu/ In = 1) in Ar saturated acetonitrile (for details see Experimental). At sulfide concentrations ~25 % (with respect to the present metals), the absorption spectrum exhibits a shoulder located at 370 nm that is strongly blue-shifted with respect to the bulk crystals (a gap energy difference of more than 2 eV). On further addition of the sulfide source (50 %), the absorption shoulder shifts from 370 nm to 400 nm, and the optical density rises due to increasing particle concentration. Under stoichiometric conditions (100 % S corresponds to the Cu:In:S stoichiometry of 1:1:2), a steep tail is observed with the absorption onset located near 580 nm. A remarkable dynamic color change accompanies this condensation process which can be seen with the naked eye. On each dropwise addition of the sulfide source, the color of the reacting solution rapidly changes from colorless to yellow to orange to red and becomes colorless or yellow again later on (build-up and decay of size-quantized cluster±cluster aggregates). There is a crossover concentration value around 50 % S, above which the sol does not self-bleach anymore, retaining a constant orange color. On the further allat-once addition of 50 % S, it takes at least 10 hours for the stoichiometric orange colloid to become deep red. Solvent removal from the above 0.05 M solutions on a rotary evaporator yields 0.5 M stable lacquers which can be used to produce single step coated, 1 mm thick compact CIS-layers with good adhesion to glass or nanocrystalline ZnO films. The preparation of nanocrystalline ZnO films from particulate colloids follows a recently published procedure (see also Experimental). Figure 2 shows the UV± Vis optical spectrum of a 2 mm thick (single step dip-coated, and at 400 C pre-sintered) ZnO film displaying the characteristic absorption edge at around 380 nm. After dip-withdrawing the ZnO film in CIS-colloid, and subsequent sintering in vacuum at 400 C for 20 minutes, a dark brown colored ZnO/CIS bilayer is formed. Its optical absorption exhibits a shoulder at 750 nm indicating that coalescence of small CIS particles to larger nanocrystals took

Journal ArticleDOI
TL;DR: In this article, particle loaded polyaniline film as the light-emitting layer was used to improve the quantum efficiency in comparison with the polymer-free device with closely packed CdTe nanocrystals.
Abstract: CdTe nanocrystal/polyaniline composite films as well as films of closely packed CdTe nanocrystals were used to fabricate light-emitting devices with low turn-on voltages [∽2.5 V for a device with a Mg cathode and an indium tin oxide (ITO) anode]. In principle, the emitted colour is tunable from green to red, depending on the size of the nanocrystals. The use of the particle loaded polyaniline film as the light-emitting layer results in a considerable enhancement of the quantum efficiency in comparison with the polymer-free device with closely packed CdTe nanocrystals. The light-emitting devices are found to work more efficiently in a pulsed mode than under continuous operation.

Journal ArticleDOI
TL;DR: In this article, the authors investigated the electronic transport properties of indium-tin-oxide thin films on glass after a variety of surface treatments and found that oxygen-plasma treatments induce a significant increase in the carrier concentration, and a less significant decrease of mobilities with respect to "as-received" or aquaregia treated substrates.
Abstract: We report investigations of the electronic transport properties carried out by means of the Hall technique for indium–tin–oxide thin films on glass after a variety of surface treatments. We find that oxygen-plasma treatments induce a significant increase in the carrier concentration, and a less significant decrease of mobilities with respect to “as-received” or aquaregia treated substrates. We consider that this is indicative of an increased concentration of defects, as a result of the plasma exposure.

Journal ArticleDOI
TL;DR: In this article, indium tin oxide (ITO) films were made from an oxidized target with In2O3 and SnO2 in a weight proportion of 9:1 using the radio frequency magnetron sputtering method.
Abstract: In this study, indium tin oxide (ITO) films were made from an oxidized target with In2O3 and SnO2 in a weight proportion of 9:1 using the radio frequency magnetron sputtering method. Hydrogen was added to the gas mixture during the preparation of the ITO films. In order to study the effect of hydrogen partial pressure on the structural and optoelectronic properties of the ITO films, we have varied the hydrogen partial pressure in the gas mixture over the range 0–1.6×10−5 Torr and kept the substrate temperature constant at 300 °C during film growth. The x-ray diffraction patterns of ITO films prepared at different hydrogen partial pressures show that the films have (111) and (100) preferred orientations. Hall effect measurements reveal that the addition of hydrogen in the sputtering gas mixture shows an increase in the number of charged carriers in the ITO films. However the carrier mobility did not increase considerably. At optimal conditions, ITO films with resistivity of 2.7×10−4 Ω cm and transparency of over 89% in the visible wavelength region were achieved.

Journal ArticleDOI
TL;DR: In this article, maskless laser patterning of indium tin oxide thin films for flat panel display applications was studied as a function of wavelength using different harmonics of a diode-pumped Q-switched Nd:YLF laser.
Abstract: Maskless laser patterning of indium tin oxide thin films for flat panel display applications was studied as a function of wavelength using different harmonics of a diode-pumped Q-switched Nd:YLF laser. Electrically isolating lines could be written at all wavelengths used. However, while lines written at the infrared and the visible wavelengths exhibited a ripplelike morphology due to incomplete material removal, ultraviolet laser irradiation produced residue-free etch lines with superior smoothness even at higher scan speeds. The threshold fluences for material removal at different wavelengths were found to correlate with the optical properties of the indium tin oxide film. In addition, numerical simulations of laser-induced temperature rise yielded peak surface temperatures well above the vaporization temperature of the indium tin oxide film, indicating that, at all wavelengths studied, material removal occurs via thermal vaporization. The calculations also revealed that the absorption of the ultraviolet...

Journal ArticleDOI
TL;DR: In this paper, the main electro-optical characteristics exhibited by large area indium tin oxide films (300×400 mm) produced by r.f. magnetron sputtering under different oxygen concentrations and deposition pressures were analyzed.