Topic
Inductive sensor
About: Inductive sensor is a research topic. Over the lifetime, 2282 publications have been published within this topic receiving 21984 citations.
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Patent•
10 Jan 1974TL;DR: In this article, a liquid level inductance sensor incorporating means for compensating for temperature and non-linearity effects is presented, instead of using auxiliary temperature sensing devices for compensation, the inductance is made to act as its own temperature sensor.
Abstract: A liquid level inductance sensor incorporating means for compensating for temperature and non-linearity effects. Instead of using auxiliary temperature sensing devices for compensation, the inductance is made to act as its own temperature sensor. Two signals are derived from the sensor, one for temperature and the other for liquid level. These signals are processed in either digital or analog signal processing techniques to correct for non-linearity and temperature effects.
12 citations
Patent•
29 Feb 1988
TL;DR: In this paper, an inductive sensor held in the housing wall and a ferromagnetic member mounted on the terminal shaft portion for rotation in unison therewith were used to measure the rpm of the rotor.
Abstract: A vacuum pump has a housing, a pump shaft having a terminal shaft portion, a bearing member mounted in the housing and supporting the pump shaft and a rotor affixed to the pump shaft. The housing has a housing wall forming a side chamber with the bearing member. The terminal shaft portion projects through the bearing member into the side chamber. There is further provided a device for measuring the rpm of the rotor. The device comprises an inductive sensor held in the housing wall and a ferromagnetic member mounted on the terminal shaft portion for rotation in unison therewith. The ferromagnetic member induces electric pulses in the inductive sensor at a rate proprotionate to the rpm of the rotor. A non-magnetic partition separates the inductive sensor from the side chamber.
12 citations
CERN1
TL;DR: A novel reading algorithm for an ironless inductive position sensor which exhibits immunity to single-frequency interference (both for high and low frequency signals) based on the three-parameter sine fitting, whose performances have been enhanced with proper windowing function design.
Abstract: This paper presents a novel reading algorithm for an ironless inductive position sensor which exhibits immunity to single-frequency interference (both for high and low frequency signals). This algorithm is based on the three-parameter sine fitting, whose performances have been enhanced with proper windowing function design. The proposed algorithm exhibits high precision and suitability for real-time implementation. The performances of the new algorithm are tested on simulated and measured signals and the results are discussed in detail. The algorithm has been finally tested and validated on a real-time target.
12 citations
Patent•
12 Mar 2003TL;DR: In this paper, the position of a reflective optical element such as a mirror in an illumination or projection system is first measured using an absolute position sensor mounted on a reference frame and thereafter measured by a relative position sensor also mounted on said reference frame.
Abstract: In a lithographic projection apparatus the positions and/or orientations of reflective optical elements is dynamically controlled. The position of a reflective optical element such as a mirror in an illumination or projection system is first measured using an absolute position sensor mounted on a reference frame and thereafter measured by a relative position sensor also mounted on said reference frame. The position of the element is controlled in accordance with the measured position, e.g. to maintain it stationary in spite of vibrations that might otherwise disturb it. The absolute sensor may be a capacitive or inductive sensor and the relative sensor may be an interferometer.
12 citations
23 Oct 2006
TL;DR: In this article, the authors proposed a displacement measurement instrument consisting of four elements: a movable coil with short length supplied with DC voltage, an iron rod acting as a core, its shape is designed carefully and the cross-section is varying along the axis.
Abstract: To enlarge the measuring range of inductive displacement sensor, the proposed displacement measurement instrument consists of four elements: the first is a movable coil with short length supplied with DC voltage. The second is a fixed iron rod acting as a core, its shape is designed carefully and the cross-section is varying along the axis. The third is an iron cover. It works as the external path of magnetic flux. When the coil moves on the rod, the current induced in the coil is proportional to the axis-direction displacement of the iron rod. The last one is a measurement circuit used to transform the current signal to the voltage signal and then processed by a microprocessor. This sensor offers excellent features of smart structure, low cost, large sensing length (1400mm), high accuracy (0.5%) and good linearity. An application of this instrument has been put on use in the underwater displacement measurement of a water station lift-gate control system.
12 citations