Showing papers on "Islanding published in 1960"
TL;DR: In this paper, a method of bulk dicing and bulk islanding by the use of laminated tools is described along with the tools and the additions made to the equipment to achieve the degree of accuracy required.
Abstract: The production of islands of less than 0.002 in. in diameter with an ultrasonic drill is described along with the tools and the additions made to the equipment to achieve the degree of accuracy required. A novel feature is a frictionless gauge to indicate depth and rate of cutting. Also described is a method of bulk dicing and bulk islanding by the use of laminated tools. Each of these tools has a protruding pilot-blade to locate the work so that dicing can be correctly related to islanding and/or to any strip plating, markings, etc., put on the slice in earlier operations. A novel self-aligning work table, essential to the bulk islanding process, ensures that the exposed face of the semi-conductor slice is in intimate contact with the tool face.
2 citations