Showing papers on "Laser Doppler vibrometer published in 2020"

Analysis of barely visible impact damage severity with ultrasonic guided Lamb waves

Abstract: Barely visible impact damage is one of the most common types of damage in carbon-fibre-reinforced polymer composite structures. This article investigates the potential of using ultrasonic guided La...

Detection of Internal Holes in Additive Manufactured Ti-6Al-4V Part Using Laser Ultrasonic Testing

Abstract: For a non-contact, non-destructive quality evaluation, laser ultrasonic testing (LUT) has received increasing attention in complex manufacturing processes, such as additive manufacturing (AM). This work assessed the LUT method for the inspection of internal hole defects in additive manufactured Ti-6Al-4V part. A Q-switched pulsed laser was utilized to generate ultrasound waves on the top surface of a Ti-6Al-4V alloy part, and a laser Doppler vibrometer (LDV) was utilized to detect the ultrasound waves. Sub-millimeter (0.8 mm diameter) internal hole defect was successfully detected by using the established LUT system in pulse-echo mode. The method achieved a relatively high resolution, suggesting significant application prospects in the non-destructive evaluation of AM part. The relationship between the diameter of the hole defects and the amplitude of the laser-generated Rayleigh waves was studied. X-ray computed tomography (XCT) was conducted to validate the results obtained from the LUT system.

Effect of scanning speed on texture-elicited vibrations

Abstract: To sense the texture of a surface, we run our fingers across it, which leads to the elicitation of skin vibrations that depend both on the surface and on exploratory parameters, particularly scanning speed. The transduction and processing of these vibrations mediate the ability to discern fine surface features. The objective of the present study is to characterize the effect of changes in scanning speed on texture-elicited vibrations to better understand how the exploratory movements shape the neuronal representation of texture. To this end, we scanned a variety of textures across the fingertip of human participants at a variety of speeds (10-160 mm s-1) while measuring the resulting vibrations using a laser Doppler vibrometer. First, we found that the intensity of the vibrations-as indexed by root-mean-square velocity-increases with speed but that the skin displacement remains constant. Second, we found that the frequency composition of the vibrations shifts systematically to higher frequencies with increases in scanning speed. Finally, we show that the speed-dependent shift in frequency composition accounts for the speed-dependent change in intensity.

Doppler Lidar (DL) Handbook

Abstract: The Doppler lidar (DL) is an active remote sensing instrument that provides range- and time-resolved measurements of radial velocity and attenuated backscatter. The principle of operation is similar to radar in that pulses of energy are transmitted into the atmosphere; the energy scattered back to the transceiver is collected and measured as a time-resolved signal. From the time delay between each outgoing transmitted pulse and the backscattered signal, the distance to the scatterer is inferred. The radial or line-of-sight velocity of the scatterers is determined from the Doppler frequency shift of the backscattered radiation. The DL uses a heterodyne detection technique in which the return signal is mixed with a reference laser beam (i.e., local oscillator) of known frequency. An onboard signal processing computer then determines the Doppler frequency shift from the spectra of the heterodyne signal. The energy content of the Doppler spectra can also be used to determine attenuated backscatter.

Measuring Transverse Displacements Using Unmanned Aerial Systems Laser Doppler Vibrometer (UAS-LDV): Development and Field Validation.

Abstract: Measurement of bridge displacements is important for ensuring the safe operation of railway bridges. Traditionally, contact sensors such as Linear Variable Displacement Transducers (LVDT) and accelerometers have been used to measure the displacement of the railway bridges. However, these sensors need significant effort in installation and maintenance. Therefore, railroad management agencies are interested in new means to measure bridge displacements. This research focuses on mounting Laser Doppler Vibrometer (LDV) on an Unmanned Aerial System (UAS) to enable contact-free transverse dynamic displacement of railroad bridges. Researchers conducted three field tests by flying the Unmanned Aerial Systems Laser Doppler Vibrometer (UAS-LDV) 1.5 m away from the ground and measured the displacement of a moving target at various distances. The accuracy of the UAS-LDV measurements was compared to the Linear Variable Differential Transducer (LVDT) measurements. The results of the three field tests showed that the proposed system could measure non-contact, reference-free dynamic displacement with an average peak and root mean square (RMS) error for the three experiments of 10% and 8% compared to LVDT, respectively. Such errors are acceptable for field measurements in railroads, as the interest prior to bridge monitoring implementation of a new approach is to demonstrate similar success for different flights, as reported in the three results. This study also identified barriers for industrial adoption of this technology and proposed operational development practices for both technical and cost-effective implementation.

Numerical and Experimental Investigation of the Design of a Piezoelectric De-Icing System for Small Rotorcraft Part 1/3: Development of a Flat Plate Numerical Model with Experimental Validation

Abstract: The objective of this research project is divided in four parts: (1) to design a piezoelectric actuator-based de-icing system integrated to a flat plate experimental setup and develop a numerical model of the system with experimental validation, (2) use the experimental setup to investigate actuator activation with frequency sweeps and transient vibration analysis, (3) add ice layer to the numerical model and predict numerically stresses for different ice breaking with experimental validation, and (4) bring the concept to a blade structure for wind tunnel testing. This paper presents the first objective of this study. First, preliminary numerical analysis was performed to gain basic guidelines for the integration of piezoelectric actuators in a simple flat plate experimental setup for vibration-based de-icing investigation. The results of these simulations allowed to optimize the positioning of the actuators on the structure and the optimal phasing of the actuators for mode activation. A numerical model of the final setup was elaborated with the piezoelectric actuators optimally positioned on the plate and meshed with piezoelectric elements. A frequency analysis was performed to predict resonant frequencies and mode shapes, and multiple direct steady-state dynamic analyses were performed to predict displacements of the flat plate when excited with the actuators. In those steady-state dynamic analysis, electrical boundary conditions were applied to the actuators to excite the vibration of the plate. The setup was fabricated faithful to the numerical model at the laboratory with piezoelectric actuator patches bonded to a steel flat plate and large solid blocks used to mimic perfect clamped boundary condition. The experimental setup was brought at the National Research Council Canada (NRC) for testing with a laser vibrometer to validate the numerical results. The experimental results validated the model when the plate is optimally excited with an average of error of 20% and a maximal error obtained of 43%. However, when the plate was not efficiently excited for a mode, the prediction of the numerical data was less accurate. This was not a concern since the numerical model was developed to design and predict optimal excitation of structures for de-icing purpose. This study allowed to develop a numerical model of a simple flat plate and understand optimal phasing of the actuators. The experimental setup designed is used in the next phase of the project to study transient vibration and frequency sweeps. The numerical model is used in the third phase of the project by adding ice layers for investigation of vibration-based de-icing, with the final objective of developing and integrating a piezoelectric actuator de-icing system to a rotorcraft blade structure.

Development and optimization of RF MEMS switch

Abstract: Isolation and actuation voltages are important parameters in micro-electro-mechanical switches. These parameters can be destroyed by the effect of creating bulge and erosion in the surface of the beam. In this paper, a fabrication method is proposed to create a smooth and flat beam. Additionally, using two short high impedance transmission lines, the destructive effects on the input/output matching have been reduced. S-parameters and mechanical parameters of the proposed switch are calculated by the network analyzer and laser Doppler vibrometer. According to the results obtained from the proposed switch in the C–K band, the return loss, which is less than − 20 dB, and the highest isolation value, which is equal to − 20 dB, occur at the frequency of 21 GHz. Furthermore, the insertion loss is better than − 1 dB in the full frequency band, which is very desirable. The actuation voltage and resonance frequency were obtained at 18 V and 164 kHz, respectively. Finally, four steps are proposed to optimize the actuation voltage, isolation, stress and switching time, which results in reducing the actuation voltage by 37% and the isolation will increase by 46%. Maximum stress in the initial state is 25 MPa, and decreases to 10 MPa after optimization, which increases the lifetime of the switch.

Active Health Monitoring of Thick Composite Structures by Embedded and Surface-Mounted Piezo Diagnostic Layer.

Abstract: An effective approach for an embedded piezo diagnostic layer into thick composite material is presented The effectiveness of the approach is assessed in comparison to the surface-mounted layer The proposed manufacturing alleviates difficulties associated with trimming edges of composites when embedding wires The Electro-Mechanical Impedance technique is used to access the integrity of the piezoelectric sensors bonding process Comparisons of ultrasonic guided waves are made between embedded and surface-mounted diagnostic layers and their penetration through and across the thickness of the composites Temperature influences with the range from -40 °C up to 80 °C on embedded and surface-mounted guided waves are investigated An investigation is carried out into the relationship between amplitude and time-of-flight with temperature at different excitation frequencies The temperature has significant but different effects on amplitude and phase-shift of guided waves for the embedded layer compared to the surface-mounted layer A Laser Doppler Vibrometer is used to identify the blue tack and impact damage Both embedded and surface-mounted layers are shown to be an effective means of generating detectable wave scatter from damage

A modified piezoelectric ultrasonic composite oscillator technique for simultaneous measurement of elastic moduli and internal frictions at varied temperature.

Abstract: In this work, a modified piezoelectric ultrasonic composite oscillator technique (M-PUCOT) is developed for measuring a material’s elastic moduli and internal frictions, as a function of temperature. Different from the traditional PUCOT that employs two quartz bars as the drive and gauge, here, a single small piezoelectric transducer (PZT) ring is used to drive and sense longitudinal or torsional vibration in a cylinder specimen. Because of the strong piezoelectric effect and relatively large bandwidth of the PZTs compared to their quartz counterpart, the frequency match condition between the transducer and the specimen is not required in this M-PUCOT. For high temperature measurement, a fused quartz spacer, whose resonance frequency matches the specimen’s, is bonded between the transducer and the specimen to provide thermal insulation. First, the united equivalent circuit of the transducer- (spacer) -specimen composite system was derived. Then, Young’s modulus, longitudinal friction, shear modulus, and torsional friction were explicitly obtained by measuring the resonance frequency and antiresonance frequency of the 2- or 3-component system’s electrical susceptance curve using an impedance analyzer. The accuracy of this method was validated both by measuring the system’s amplitude-frequency curves using a laser vibrometer and through finite element simulations. The repeatability error of the M-PUCOT is only ∼0.2% for moduli measurement and ∼2.5% for internal friction measurement, which is very promising for studying the moduli and internal friction variations during damage, fatigue, and phase transitions. Finally, the M-PUCOT was employed to measure the variations in moduli and internal frictions of an Fe64Ni36 Invar alloy from room temperature to 500 °C. Results show that above the ferromagnetic phase transition temperature Tc, both moduli reach their maxima, and both internal frictions reach their minima. The proposed M-PUCOT is expected to be widely used in the near future for its quick measurement, high repeatability, and low cost.

Inspection of the Integrity of a Multi-Bolt Robotic Arm Using a Scanning Laser Vibrometer and Implementing the Surface Response to Excitation Method (SuRE)

Abstract: The integrity of a robotic arm was examined remotely via a scanning laser vibrometer (SLV) in order to detect loose bolts. A piezoelectric element (PZT) was bonded on the robot arm for excitation of surface guided waves. A spectrum analyzer generated surface waves within the 20-100 kHz range. The propagation of the waves was monitored with the SLV at the programmed grid points on the robot arm.The surface response to excitation (SuRE) method was used to calculate the spectrums of the signals, and compare the reference scan with the altered scan. Comparisons of before and after the scan showed that after loosening the bolt on the robot arm, spectrums of all the grid points changed to some extent, however, the largest changes occurred in the vicinity of the loosened bolts.The study shows that the SuRE method was capable of detecting the presence and location of loosening bolts using only one PZT element on a complex structure. There are two most important advantages of the SuRE method over the widely used impedance-based technique. The first advantage is the elimination of an expensive impedance analyzer; the second advantage is remotely monitoring capability as long as the surface is excited properly.

An integrated analytical and experimental study of contact acoustic nonlinearity at rough interfaces of fatigue cracks

Abstract: This paper presents an analytical model that describes the relationship between interface stiffness and separation of rough interfaces such as fatigue cracks. The contact acoustic nonlinearity at the interface is simulated by a quasi-static model based on Hertzian contact theory. The model is validated using the results of dynamic acoustoelastic testing (DAET) with a Rayleigh wave probe on fatigue cracks in two aluminum alloy samples. One novel aspect of this work is that all the required geometrical parameters for the model are acquired directly from the aperture profile of real cracks extracted from their scanning electron microscopy (SEM) images. Also, the separation of the crack faces during dynamic perturbation is independently measured using a 3D laser Doppler vibrometer (LDV). In addition, using DAET allows for an unprecedented direct comparison between experimental and analytical results. This is because unlike conventional nonlinear ultrasonic tests that are based on measuring the amplitude of higher harmonics, DAET outputs directly the strain-dependency of transmission and time delay of ultrasonic waves propagating across the interface. The model is found in good qualitative agreement with the experimental results, although the predictions tend to underestimate the variation of transmission coefficient and time delay. We conduct a sensitivity analysis to investigate the influence of different assumptions and simplifications on model predictions.

Flexible nano-vibration energy harvester using three-phase polymer composites

Abstract: In this article, we present the new three-phase piezo-polymer composite energy harvester, scavenging the electrical energy form ambient vibration. Nano magnesium oxide (MgO) and piezoelectric nano zinc oxide (ZnO) fillers in piezoelectric PolyVinyliDene fluoride-TriFluoroEthylene P(VDF-TrFE) polymer chain to form the hybrid composite material. P(VDF-TrFE)/ZnO with 2 wt%, 4 wt%, 6 wt% of MgO composite and pure P(VDF-TrFE) thin film nanoparticle allocation, crystalline structure, dielectric behavior and frequency analysis results, electrical output are characterized scanning electron microscopy (SEM), X-Ray diffraction (XRD, Impedance analyzer, Laser Doppler vibrometer and vibration shaker setup, respectively. The dielectric constant and crystalline structures improved by increasing the weight percentage of MgO nanofillers. The cantilever model Flexible Vibration Energy Harvester (FVEH) under the resonance frequency (56 Hz), it produces the maximum harvester output AC voltage (1.89 V) in size of 10 mm × 10 mm active piezoelectric layer. The resonance frequency generated through base excitation at a newly designed vibration shaker. The generated voltage used for microelectronics devices, medical application MEMS sensors.

Field Testing of Wind Turbine Towers with Contact and Noncontact Vibration Measurement Methods

Abstract: Wind turbine tower vibration parameters are critical for design and maintenance of wind farms. In this paper, measurement campaigns of two in-service 65-m tall wind turbine towers are inves...

A Mode-Switchable Guided Elastic Wave Transducer

Abstract: Increasing the safety demands of various progressively complex structures (e.g., in aerospace, automotive engineering, and wind power technology) and the parallel goal of reducing inspection costs set new objectives in the field of ultrasonics and guided elastic wave measurements. The focus is to deliver applicable sensors attached permanently to a particular structure for on-demand inspections. Piezoelectric fiber patches (PFPs) are known as lightweight and structure-conforming transducers for guided elastic wave generation and detection. We propose a new PFP concept combining advantages of different previous designs. With the new approach, a user can switch between a Lamb wave and a shear horizontal wave excitation by partially changing the polarity of the transducer electrodes. After summarizing the existing PFP variants, the new concept is introduced and experimentally verified by a three-dimensional laser Doppler vibrometer visualization of excited waves. Moreover, the first prototype of the new PFP transducer is presented.

Toward an ultra-high resolution phased-array system for 3D ultrasonic imaging of solids

Abstract: Ultrasonic phased-array (PA) systems have been widely adopted in the field of nondestructive evaluation for material characterization and imaging of internal defects. Whereas many defects exhibit complex three-dimensional structures, most PA systems provide only two-dimensional images. In this Letter, we demonstrate the ability to create high-resolution 3D images of internal defects using a PA system based on a piezoelectric and laser ultrasonic system (PLUS). The PLUS combines a piezoelectric transmitter to insonify the structure to be inspected with a laser Doppler vibrometer to create a matrix array of receiver points without contact. The small size of the laser beam results in an ultra-multiple number of elements on the order of thousands, which is impossible to achieve with a conventional piezoelectric matrix array transducer. An emission from a piezoelectric transmitter compensates for the intrinsically low sensitivity of a laser Doppler vibrometer. After formulating the 3D imaging algorithm of the PLUS, we demonstrate that the PLUS with 4096 receiving points (i.e., 64 × 64 points) achieves high-resolution 3D imaging in a specimen with a flat bottom hole. We also visualize the complex structure of stress corrosion cracking. We believe that the 3D imaging capability of the PLUS may open up new avenues to the accurate evaluation of material strength, the identification of the types of defects, and the elucidation of the mechanisms of defect initiation.

Design, fabrication and characterization of piezoelectric cantilever MEMS for underwater application

Abstract: This work shows a preliminary microfabrication route for a novel directional hydrophone based on a cross-shaped design of piezoelectric cantilevers. A thin layer of aluminum nitride (AlN) using Molybdenum (Mo) thin film as electrodes will be exploited as piezoelectric functional layer for the microfabrication of a cantilever-based ultrasonic micro electro mechanical system (MEMS) hydrophone. A parameterized simulation based on length of these cantilevers between 100 and 1000 μm allowed to set the first resonant mode between 20 kHz and 200 kHz, the desired underwater ultrasonic acoustic range. The microsystem was designed with cantilevers facing each other in a cross configuration in order to have novel MEMS hydrophone with an omnidirectional response. In order to investigate the first resonance frequency mode and displacement measurements, a Laser Doppler Vibrometer was used and good agreement between simulations and experimental results was achieved. Responsivity and directionality measurements of the piezoelectric MEMS cantilevers were performed in water. Maximum sensitivity up to −153 dB with omnidirectional directivity pattern was achieved by fabricated MEMS sensor.

Modeling and Measurement of the Nonlinear Force on Nanoparticles in Magnetomotive Techniques

Abstract: Magnetomotive (MM) ultrasound (US) imaging is the identification of tissue in which magnetic nanoparticle tracers are present by detecting a magnetically induced motion. Although the nanoparticles have a magnetization that depends nonlinearly on the external magnetic field, this has often been neglected, and the presence of resulting higher harmonics in the detected motion has not been reported yet. Here, the magnetization of nanoparticles in gelatin was modeled according to the Langevin theory of superparamagnetism. This nonlinear relationship has a fundamental effect on the resulting force and motion. However, the magnetic field must contain regions with a strong magnetic gradient and a low absolute magnetic field to allow the significant generation of higher harmonics in the force. To validate the model, an MM setup that has a constant magnetic gradient on one axis superimposed by a homogeneous time-varying magnetic field was used. After the magnetic characterization of the nanoparticles and calculations of the expected displacement in the setup, experiments were conducted. A laser Doppler vibrometer was used to quantify the small displacements at higher harmonics. The experimental results followed theoretical predictions. Deviations between model and experiment were attributed to a simplified mechanical modeling and temperature rise during measurements. It is concluded that in MM techniques, the nonlinear magnetization of nanoparticles must generally be considered to reconstruct quantitative parameters, to achieve optimum matching of fields and particles, or to exploit nanoparticle magnetization for tissue characterization. In addition, with the presented experimental setup, the magnetization properties of nanoparticles can be determined by MM techniques alone.

Design, fabrication, and characterization of SU-8/carbon black nanocomposite based polymer MEMS acceleration sensor

Abstract: Design, fabrication, and characterization of SU-8/carbon black (CB) nanocomposite based single axis acceleration sensor is presented. The entire sensor made of SU-8 photosensitive polymer is fabricated using the process spin pattern anchor release device. Thanks to the low young’s modulus of SU-8 polymer, the cantilever beams used to support the proof mass are very flexible, which resulted in increased sensitivity. A composite layer of CB nanoparticles mixed with the SU-8 polymer is sandwiched between two SU-8 2002 layers in the cantilever beam. This nanocomposite layer acts as a piezoresistive layer and is used to measure the induced stress and strain. The piezoresistors are patterned in a full bridge Wheatstone arrangement to cancel the effect on temperature variation. Maximum stress locations are identified through Finite Element -Modeling based simulations under accelerations up to 100 g. The natural frequency, stiffness, and sensitivity of the acceleration sensor are characterized using the techniques of nanoindenter and Laser Doppler Vibrometer. The measured natural frequency is 1.884 kHz. The relative change in resistance per unit strain of the prototype is measured using I–V measurements, which gives a gauge factor of 13.05.

Performance Evaluation of Vibrational Measurements through mmWave Automotive Radars

Abstract: Thanks to the availability of a significant amount of inexpensive commercial Frequency Modulated Continuous Wave Radar sensors, designed primarily for the automotive domain, it is interesting to understand if they can be used in alternative applications. It is well known that with a radar system it is possible to identify the micro-Doppler feature of a target, to detect the nature of the target itself (what the target is) or how it is vibrating. In fact, thanks to their high transmission frequency, large bandwidth and very short chirp signals, radars designed for automotive applications are able to provide sub-millimeter resolution and a large detection bandwidth, to the point that it is here proposed to exploit them in the vibrational analysis of a target. The aim is to evaluate what information on the vibrations can be extracted, and what are the performance obtainable. In the present work, the use of a commercial Frequency Modulated Continuous Wave radar is described, and the performances achieved in terms of displacement and vibration frequency measurement of the target are compared with the measurement results obtained through a laser vibrometer, considered as the reference instrument. The attained experimental results show that the radar under test and the reference laser vibrometer achieve comparable outcomes, even in a cluttered scenario.

Silicon photonics-based laser Doppler vibrometer array for carotid-femoral pulse wave velocity (PWV) measurement

Abstract: Pulse wave velocity (PWV) is a reference measure for aortic stiffness, itself an important biomarker of cardiovascular risk. To enable low-cost and easy-to-use PWV measurement devices that can be used in routine clinical practice, we have designed several handheld PWV sensors using miniaturized laser Doppler vibrometer (LDV) arrays in a silicon photonics platform. The LDV-based PWV sensor design and the signal processing protocol to obtain pulse transit time (PTT) and carotid-femoral PWV in a feasibility study in humans, are described in this paper. Compared with a commercial reference PWV measurement system, measuring arterial pressure waveforms by applanation tonometry, LDV-based displacement signals resulted in more complex signals. However, we have shown that it is possible to identify reliable fiducial points for PTT calculation using the maximum of the 2nd derivative algorithm in LDV-based signals, comparable to those obtained by the reference technique, applanation tonometry.

Homodyne Laser Vibrometer With Detectability of Nanoscale Vibration and Adaptability to Reflectivity

Abstract: Homodyne laser vibrometer plays an essential role in the precision vibration measurement, but its application is restricted when measuring subfringe vibration and targets with various reflectivities. In order to achieve the nanoscale vibration measurement and to adapt to various reflectivities, an enhanced homodyne laser vibrometer is presented in this paper. First, an active vibration mechanism (AVM) based on a flexure hinge stimulated by a piezoelectric transducer (PZT) is introduced into the reference arm, with which the parameters for nonlinear error correction can be predetermined, and thereby the measurement of vibration less than quarter wavelength is feasible. Second, an automatic gain module is employed to optimize the intensity of the interference signals, which significantly improves the adaptability to target reflectivity. The experimental results show that the laser vibrometer proposed is capable of measuring vibration with amplitude down to 2 nm and vibration with surface reflectivity down to 0.08%.

Guided wave scattering analysis around a circular delamination in a quasi-isotropic fiber-composite laminate

Abstract: Carbon fiber reinforced composites are widely used in the aerospace industry, but barely visible impact damage can lead to delamination and compromise the structural integrity. The scattering of the fundamental anti-symmetric guided wave mode (A0 Lamb mode) at an artificial circular delamination in a quasi-isotropic laminate was investigated experimentally. A 5 cycle Hanning windowed wave pulse was used as the excitation signal for the experiments. Fast Fourier Transform was employed to identify the guided wave amplitude of the scattered field along various directions. The experimental wavefield was captured using a laser Doppler vibrometer. Experimental results are presented for the scattering pattern and scattering amplitude as a function of distance from the damage. The results of this study can help to improve delamination detection techniques using guided waves and to gain physical insights into the scattering of guided waves at a delamination.

MEMS particle sensor based on resonant frequency shifting

Abstract: Recently, as the concentration of fine dust in the atmosphere has increased due to an increase in the use of fossil fuel power plants, automobiles, and factories, it has been increasingly important to measure fine dust in the atmosphere. This is because exposure to fine dust is closely related to the incidence of respiratory and cardiovascular diseases and eventually affects mortality. In this paper, we introduce a MEMS particle sensor based on the resonance frequency shift according to added particle mass. The actuation is driven by Aluminum nitride (AlN), and the total thickness is 2.8 μm. A laser doppler vibrometer (LDV), an optical measuring instrument, was used to measure the resonance frequency of the sensor. Airborne particles naturally were deposited on the sensor. To show the frequency shift according to the particle mass, the frequency shift was measured by dividing the case where the deposited particle mass was small and large. In each case, the frequency shift according to the deposited particle mass was predicted and compared with the frequency shift measured by LDV. It was shown that the deposited particle mass and frequency shift are proportional. The deposition of particulate mass was estimated by image analysis. The frequency shift caused by the particle mass deposited on the sensor was defined as the sensitivity of the sensor. The estimated sensitivity of the sensor is 0.219 to 0.354 kHz/pg.