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Lead zirconate titanate
About: Lead zirconate titanate is a research topic. Over the lifetime, 7141 publications have been published within this topic receiving 150878 citations.
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TL;DR: In this article, a new piezoelectric thin-film actuator that uses a combination of piezolectric unimorph beams to generate lateral displacement has been developed, and the actuators have demonstrated forces greater than 7 mN at displacements of nearly 1 mum.
Abstract: Many microelectromechanical system applications require large in-plane actuation forces, with stroke lengths ranging from submicrometer to tens of micrometers in distance. Piezo electric thin films are capable of generating very large actuation forces, but their motion is not easily directed into lateral displacement in microscale devices. A new piezoelectric thin-film actuator that uses a combination of piezoelectric unimorph beams to generate lateral displacement has been developed. The piezoelectric actuators were fabricated using chemical-solution-derived lead zirconate titanate thin films. These actuators have demonstrated forces greater than 7 mN at displacements of nearly 1 mum, with maximum stroke lengths at 20 V greater than 5 mum in a 500-mum-long by 100-mum-wide actuator. Force and displacement capabilities can be manipulated through simple changes to the actuator design, while actuator nonlinearity can produce dramatic gains in work capacity and stroke length for longer actuators.
63 citations
TL;DR: In this article, the formation of double-peak profiles of Pb(Zr0.52Ti0.48)O3 thin films was studied using the same framework used to understand the imbibition and wetting of the sol-gel in the capillary channels.
Abstract: The patterning of sol-gel-derived thin films by micromolding in capillaries can produce unintended topographical deviations from the shape of the original mold that may limit the utility of the technique in potential applications. During drying and heat treatment, nonuniform shrinkage across the film due to the densification of the gel matrix results in “double-peak” film topographies whereby the film thickness is greater at the lateral edges than in the middle. Using the same framework used to understand the imbibition and wetting of the sol-gel in the capillary channels, we developed a mechanism to explain the formation of the double-peak profile. As a model system, patterned Pb(Zr0.52Ti0.48)O3 thin films were studied. Atomic force microscopic characterization was used to quantify the effect of the rate of gelation on the topography of the patterned thin films. Modifications to the channel mold design eliminate the peak formation, producing more homogeneous patterns that better replicate the features of the mold.
63 citations
Patent•
24 Dec 1990TL;DR: A ferroelectric capacitor as mentioned in this paper consists of a lead zirconate titanate formed on a silicon substrate, a plurality of rectangular trenches formed in the direction of thickness of the Ferroelectric layer with a ferro electrode material there between, and first and second electrodes consisting of metal tungsten buried in the trenches to oppose each other with the ferro electric material therebetween.
Abstract: A ferroelectric capacitor includes a ferroelectric layer consisting of lead zirconate titanate formed on a silicon substrate, a plurality of rectangular trenches formed in the direction of thickness of the ferroelectric layer with a ferroelectric material therebetween, and first and second electrodes consisting of metal tungsten buried in the trenches to oppose each other with the ferroelectric material therebetween.
63 citations
TL;DR: The measured permittivities of the unpoled composites are consistent with the predictions of the Bruggeman model and can be described by modified linear mixture rules.
Abstract: Composites of lead zirconate titanate (PZT) powder dispersed in a vinylidene fluoride-trifluoroethylene copolymer [P(VDF-TrFE)] matrix have been prepared by compression molding. Three groups of polarized samples have been prepared by poling: only the ceramic phase, the ceramic and polymer phases in parallel directions, and the two phases in antiparallel directions. The measured permittivities of the unpoled composites are consistent with the predictions of the Bruggeman model. The changes in the pyroelectric and piezoelectric coefficients of the poled composites with increasing ceramic volume fraction can be described by modified linear mixture rules. When the ceramic and copolymer phases are poled in the same direction, their pyroelectric activities reinforce while their piezoelectric activities partially cancel. However, when the ceramic and copolymer phases are poled in opposite directions, their piezoelectric activities reinforce while their pyroelectric activities partially cancel.
63 citations
TL;DR: Several metal oxide perovskites and Bi-layered perovsites are of substantial interest for integrated circuit memories as mentioned in this paper, and the high remanent polarization of ferroelectric lead zirconate titanate and strontium bismuth tantalate hold out the promise of lowvoltage, high-speed, nonvolatile memories.
63 citations