Topic
Lithography
About: Lithography is a research topic. Over the lifetime, 23507 publications have been published within this topic receiving 348321 citations.
Papers published on a yearly basis
Papers
More filters
TL;DR: In this paper, the authors describe a flexible technique for fabricating 10-nm-scale devices for use as high-resolution scanning sensors and functional probes and report on the lithographic capabilities of the technique and discuss progress in one initial application.
Abstract: We describe a flexible technique for fabricating 10-nm-scale devices for use as high-resolution scanning sensors and functional probes. Metallic structures are deposited directly onto atomic force microscope tips by evaporation through nanoscale holes fabricated in a stencil mask. We report on the lithographic capabilities of the technique and discuss progress in one initial application, to make high-spatial-resolution magnetic force sensors.
79 citations
Patent•
03 Jul 1992TL;DR: In this paper, a direct-to-press imaging system for use in lithographic printing is described, where a master-image printing cylinder is used with separate application of ink and water onto its surface to enable repetitive conveyance of image-formatted ink films onto substrates for printing purposes.
Abstract: A direct-to-press imaging system for use in lithographic printing wherein a master-image printing cylinder is used with separate application of ink and water onto its surface to enable repetitive conveyance of image-formatted ink films onto substrates for printing purposes. The imaging system includes a master-image printing cylinder adapted for receiving a hydrophilic coating layer on its surface and a device for laying down a uniform layer of hydrophilic material on the surface of this cylinder. An apparatus is also provided for applying oleophilic material in image-formatted patterns on top of the layer of hydrophilic material on the master-image printing cylinder to form a printing structure having separate hydrophilic and oleophilic areas of the format to be printed. Further, a mechanism is provided for removing the printing structure including both the hydrophilic and oleophilic materials from the surface of the master-image printing cylinder so that a new printing structure corresponding to a new image to be printed can be formed on the master-image printing cylinder.
79 citations
TL;DR: In this paper, a nanometer scale polymer pattern was formed on the surface of a glass plate by nano-imprint lithography with the aim of reducing the reflection of light at the surface.
79 citations
TL;DR: In this article, the authors investigated the possibilities of Hot Embossing Lithography (HEL) as a novel technique for the replication of nanostructures and demonstrated that nano-printing combined with the lift-off technique can be used to fabricate arrays of interdigitated metal electrodes.
79 citations
10 Nov 2008
TL;DR: In this paper, a number of simple and unconventional methods have been introduced, beginning first with research demonstrations in the mid 1990s, and their applications to optics, organic devices, electronic devices, biological devices, and fluidics.
Abstract: Patterning or lithography is at the core of modern science and technology and cuts across all disciplines. With the emergence of nanotechnology, conventional methods based on electron beam lithography and extreme ultraviolet photolithography have become prohibitively expensive. As a result, a number of simple and unconventional methods have been introduced, beginning first with research demonstrations in the mid 1990s. This book focuses on these unconventional patterning techniques and their applications to optics, organic devices, electronic devices, biological devices, and fluidics.
79 citations