Topic
Lithography
About: Lithography is a research topic. Over the lifetime, 23507 publications have been published within this topic receiving 348321 citations.
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TL;DR: In this paper, stimulus-responsive surface confined poly(N-isopropylacrylamide) (pNIPAAM) brush nanopatterns were prepared on gold-coated silicon substrates in a "grafting-from" approach that combines "nanoshaving" and surface-initiated polymerization using atom transfer radical polymerization (ATRP).
Abstract: Stimulus-responsive, surface confined poly(N-isopropylacrylamide) (pNIPAAM) brush nanopatterns were prepared on gold-coated silicon substrates in a “grafting-from” approach that combines “nanoshaving”, a scanning probe lithography method, with surface-initiated polymerization using atom transfer radical polymerization (ATRP). The reversible, stimulus-responsive conformational height change of these nanopatterned polymer brushes was demonstrated by inverse transition cycling in water, and water−methanol mixtures (1:1, v:v). Our findings are consistent with the behavior of laterally confined and covalently attached polymer chains, where chain mobility is restricted largely to the out-of-plane direction. Our nanofabrication approach is generic and can likely be extended to a wide range of vinyl monomers.
183 citations
Patent•
16 Aug 2005
TL;DR: In this article, an apparatus and method are disclosed for determining the properties of a substrate by measuring the angle-resolved spectrum as a result of the radiation being reflected off the substrate in the pupil plane of the high numerical aperture lens.
Abstract: According to the present invention, an apparatus and method are disclosed for determining the properties of a substrate by measuring the angle-resolved spectrum as a result of the radiation being reflected off the substrate in the pupil plane of the high numerical aperture lens. The properties may be dependent on angle and wavelength and may include the intensity of TM- and TE-polarized light and their associated phase differences.
182 citations
TL;DR: Optical waveguides that incorporate Bragg gratings have been written in bulk fused silica by using the femtosecond laser direct-write method and without the need for lithography or ion-beam techniques.
Abstract: Optical waveguides that incorporate Bragg gratings have been written in bulk fused silica by using the femtosecond laser direct-write method and without the need for lithography or ion-beam techniques. A single manufacturing process is used to create waveguide-Bragg grating reflectors for operation in the C band.
179 citations
TL;DR: The combination of Langmuir-Blodgett lithography with nanoimprinting enables the fabrication of large, nanostructured surface areas on a wide spectrum of different biomaterials.
179 citations
TL;DR: In this paper, the authors demonstrate wavelength-scale photonic nanostructures, including photonic crystals, fabricated in silicon-on-insulator using deep ultraviolet (UV) lithography.
Abstract: We demonstrate wavelength-scale photonic nanostructures, including photonic crystals, fabricated in silicon-on-insulator using deep ultraviolet (UV) lithography. We discuss the mass-manufacturing capabilities of deep UV lithography compared to e-beam lithography. This is illustrated with experimental results. Finally, we present some of the issues that arise when trying to use established complementary metal-oxide-semiconductor processes for the fabrication of photonic integrated circuits.
179 citations