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Local oxidation nanolithography
About: Local oxidation nanolithography is a research topic. Over the lifetime, 387 publications have been published within this topic receiving 28607 citations.
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TL;DR: The atomic force microscope as mentioned in this paper is a combination of the principles of the scanning tunneling microscope and the stylus profilometer, which was proposed as a method to measure forces as small as 10-18 N. As one application for this concept, they introduce a new type of microscope capable of investigating surfaces of insulators on an atomic scale.
Abstract: The scanning tunneling microscope is proposed as a method to measure forces as small as 10-18 N. As one application for this concept, we introduce a new type of microscope capable of investigating surfaces of insulators on an atomic scale. The atomic force microscope is a combination of the principles of the scanning tunneling microscope and the stylus profilometer. It incorporates a probe that does not damage the surface. Our preliminary results in air demonstrate a lateral resolution of 30 A and a vertical resolution less than 1 A.
12,344 citations
IBM1
TL;DR: Using an atomic force microscope, atomic-scale features on the frictional force acting on a tungsten wire tip sliding on the basal plane of a graphite surface at low loads are observed.
Abstract: Using an atomic force microscope, we have observed atomic-scale features on the frictional force acting on a tungsten wire tip sliding on the basal plane of a graphite surface at low loads, < 10-4 N. The atomic features have the periodicity of the graphite surface and are discussed in terms of a phenomenological model for the tip motion described by the sum of a periodic tip-surface force and the spring force exerted by the wire.
1,541 citations
TL;DR: A force detection scheme that makes use of a modified cantilever beam and senses the force gradient through frequency modulation is described, achieving high resolution under ultrahigh-vacuum conditions with the force microscope for reactive surfaces.
Abstract: Achieving high resolution under ultrahigh-vacuum conditions with the force microscope can be difficult for reactive surfaces, where the interaction forces between the tip and the samples can be relatively large. A force detection scheme that makes use of a modified cantilever beam and senses the force gradient through frequency modulation is described. The reconstructed silicon (111)-(7x7) surface was imaged in a noncontact mode by force microscopy with atomic resolution (6 angstroms lateral, 0.1 angstrom vertical).
994 citations
TL;DR: In this paper, the chemical modification of hydrogen-passivated n-Si surfaces by a scanning tunneling microscope (STM) operating in air is reported, and the modified surface regions have been characterized by STM spectroscopy, scanning electron microscopy (SEM), time-of-flight secondary ion mass spectrometry (TOF SIMS), and chemical etch/Nomarski microscopy.
Abstract: The chemical modification of hydrogen‐passivated n‐Si (111) surfaces by a scanning tunneling microscope (STM) operating in air is reported. The modified surface regions have been characterized by STM spectroscopy, scanning electron microscopy (SEM), time‐of‐flight secondary‐ion mass spectrometry (TOF SIMS), and chemical etch/Nomarski microscopy. Comparison of STM images with SEM, TOF SIMS, and optical information indicates that the STM contrast mechanism of these features arises entirely from electronic structure effects rather than from topographical differences between the modified and unmodified substrate. No surface modification was observed in a nitrogen ambient. Direct writing of features with 100 nm resolution was demonstrated. The permanence of these features was verified by SEM imaging after three months storage in air. The results suggest that field‐enhanced oxidation/diffusion occurs at the tip‐substrate interface in the presence of oxygen.
723 citations
TL;DR: In this article, a self-sensing piezoelectric force sensor with a stiffness of 1800 N/m and a sub-nanometer amplitudes is presented, allowing atomic resolution with relatively bluntly etched tungsten tips.
Abstract: Atomic resolution by noncontact atomic force microscopy with a self-sensing piezoelectric force sensor is presented. The sensor has a stiffness of 1800 N/m and is operated with sub-nanometer amplitudes, allowing atomic resolution with relatively bluntly etched tungsten tips. Sensitivity and noise are discussed.
507 citations