Showing papers on "Mask inspection published in 1978"
01 Jan 1978
TL;DR: In this paper, the authors propose a method to solve the problem of "uniformity" and "uncertainty" in the context of health care, and propose a solution.
Abstract: 1
6 citations
06 Sep 1978
TL;DR: In this article, the importance of high speed automatic mask inspection is increasingly evident, as geometry sizes decrease and mask sizes increase, while recording the location of artifacts less than 1/10 the size of a hair in less time than it takes to talk about it, presents formidable problems for the optical architecture of the system.
Abstract: As geometry sizes decrease and mask sizes increase, the importance of high speed automatic mask inspection is increasingly evident. High speed scanning of large surfaces, while recording the location of artifacts less than 1/10 the size of a hair in less time than it takes to talk about it, presents some formidable problems for the optical architecture of the system.© (1978) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
4 citations