Showing papers on "Microheater published in 1983"

Thin film oxygen sensor with microheater

Abstract: A thin film oxygen sensor with a microheater incorporates an oxide semiconductor and has an integral structure of a sensor portion and a heater portion, wherein a porous catalyst layer is formed on a surface of the sensor portion, and a thickness and an average pore diameter of the catalyst layer are determined such that a ratio of the thickness to the average pore diameter falls within a range of 50 to 3,000. The oxygen sensor has good reproducibility, high stability, and high sensitivity for changing a resistance in response to a change in an oxygen content in an atmosphere. The oxygen sensor can be manufactured at low cost and has a compact construction.

Limiting electric current type oxygen sensor with heater and limiting electric current type oxygen concentration detecting device using the same

Abstract: The invention provides a limiting electric current type oxygen sensor with a microheater, having: an oxygen ionic conductor; an anode and a cathode respectively formed on two major surfaces of the oxygen ionic conductor; an insulating film which has a porosity of not less than 0.2 [%], an average pore diameter of not less than 140 [Å], and a thickness between 0.2 [μm] and 10 [μm], and which is formed on one of the anode and the cathode so as to regulate a flow rate of oxygen gas and to provide electrical insulation; and the microheater formed on the insulating film. The oxygen ionic conductor is electrically insulated from the microheater through the insulating film. The invention also provides a limiting electric current type oxygen concentration detecting device having the limiting electric current type oxygen sensor and a constant temperature control circuit.