Showing papers on "Microheater published in 2018"

Efficient hierarchical mixed Pd/SnO2 porous architecture deposited microheater for low power ethanol gas sensor

Abstract: A novel gas microsensor combining SnO2 submicron/nanostructured porous sensitive film with Micro-Electro-Mechanical systems (MEMS) microheater was successfully fabricated. The film was made of hierarchically mixed Pd/SnO2 (HM-PTO) composites composed of Pd/SnO2 hollow submicrospheres (Pd/SnO2-HSs) and Pd/SnO2 nanoparticles (Pd/SnO2-NPs) deposited on the microheater platform using the microdispensing method. The as-prepared HM-PTO sensors exhibited high sensitivities, fast response/recovery rates, good selectivity, reliable reversibility, and relevant stability towards ethanol at low power consumption. The resulting superior sensing performances were attributed to the unique hierarchical structure. The internal void architecture of Pd/SnO2-HSs provided large specific surface areas, proper mesopore size distribution, large number of active adsorption/interaction sites, as well as promoted the chemisorption and dissociation of gas molecules due Pd-doping to yield superior gas response. In particular, the nano-sized SnO2 particles ensured the uniform deposition of the materials to yield enhanced local conductivities, and possibly faster phase transfer reactions responsible for the extremely good response/recovery performance. This simple fabrication procedure combined with high sensing performances look promising for the development of hierarchical morphologies of novel materials for gas sensing applications.

ppb level detection of NO2 using a WO3 thin film-based sensor: material optimization, device fabrication and packaging

Abstract: In this study, we have investigated the thickness-dependent nitrogen dioxide (NO2) sensing characteristics of a reactive-ion magnetron sputtered tungsten trioxide (WO3) film, followed by morphological and electrical characterizations. Subsequently, the sensing material was integrated with an MEMS platform to develop a sensor chip to integrate with electronics for portable applications. Sputtered films are studied for their sensing performance under different operating conditions to discover the optimum thickness of the film for integrating it with a CMOS platform. The optimized film thickness of similar to 85 nm shows the 16 ppb lower limit of detection and 39 ppb detection precision at the optimum 150 degrees C operating temperature. The film exhibits an extremely high sensor response (R-g - R-a)/R-a x 100 = 26%] to a low (16 ppb) NO2 concentration, which is a comparatively high response reported to date among reactively sputtered films. Moreover, this optimum film has a longer recovery time than others. Thus, an intentional temperature overshoot is made part of the sensing protocol to desorb the NO2 species from the film surface, resulting in full recovery to the baseline without affecting the sensing material properties. Finally, the optimized film was successfully integrated on the sensor platform, which had a chip size of 1 mm(2), with an inbuilt micro-heater. The minimum power consumption of the microheater is similar to 6.6 mW (similar to 150 degrees C), which is practically acceptable. Later, the sensor device was packaged on a Kovar heater for the detailed electrical and sensing characterizations. This study suggests that optimization of the sensing material and optimum operating temperature help to develop a highly sensitive, selective, stable, and portable gas sensor for indoor or outdoor applications.

Pulse-Driven Semiconductor Gas Sensors Toward ppt Level Toluene Detection.

Abstract: Improvements in the responses of semiconductor gas sensors and reductions in their detection limits toward volatile organic compounds (VOCs) are required in order to facilitate the simple detection of diseases, such as cancer, through human-breath analysis. In this study, we introduce a heater-switching, pulse-driven, micro gas sensor composed of a microheater and a sensor electrode fabricated with Pd-SnO2-clustered nanoparticles as the sensing material. The sensor was repeatedly heated and allowed to cool by the application of voltage to the microheater; the VOC gases penetrate into the interior of the sensing layer during its unheated state. Consequently, the utility factor of the pulse-driven sensor was greater than that of a conventional, continuously heated sensor. As a result, the response of the sensor to toluene was enhanced; indeed, the sensor responded to toluene at levels of 1 ppb. In addition, according to the relationship between its response and concentration of toluene, the pulse-driven sen...

High Density Novel Porous ZnO Nanosheets Based on a Microheater Chip for Ozone Sensors

Abstract: High-density porous zinc oxide (ZnO) nanosheets (NSs) are grown on an aluminum (Al) substrate, and a porous ZnO NS-based microelectromechanical systems technology gas sensor is fabricated for ozone (O3) detection. The height of this new ZnO nanostructure can be controlled by using different thicknesses of an Al seedlayer ranging from 25 to 100 nm. Additionally, the results indicate that an increase in the ozone response depends on oxygen vacancy adsorption, as measured by photoluminescence emission. This paper resulted in a low-temperature, hydrothermally grown novel porous ZnO NS ozone gas sensor that measured O3 responses of 96.1% at 300 °C and 53.4% at 150 °C. The response of this sensor compared with the responses of other semiconductor metal oxide materials is also very significant, with the porous ZnO NSs showing potential applications in gas sensing devices used for environmental monitoring.

Modeling and Simulation of Novel Semiconducting Metal Oxide Gas Sensors for Wearable Devices

Abstract: Our work focuses on the design and rigorous evaluation of two novel designs for semiconducting metal oxide (SMO) gas sensors with different shapes and sizes, in order to assess the most efficient layout geometry in terms of power consumption, membrane stability, and temperature distribution. The aim of this paper is to provide two designs, one to be used for a thin sensing film and the other to be applied with a nanowires sensing layer. Both designs implement innovative aspects, allowing for an improvement in state-of-the-art sensors’ selectivity and power consumption, which make the product suitable for use on a wide variety of applications. To further support the simulation results, an analytical model based on a Cauer network is presented for estimating the power consumption of the device. We demonstrate the ability of SMO sensors to operate at 300 °C with high uniform temperature over the sensing material and ultra-low power consumption of roughly 8 mW. In addition, a microheater array design is presented, which is able to heat two active sensing layers to 270 °C and 350 °C simultaneously in 40 $\mu \text{s}$ . Both designs are analyzed for stability, and it was found that the stress generated in the membranes and the resulting deformation is minimal, improving the device stability and reliability.

Direct heating of aqueous droplets using high frequency voltage signals on an EWOD platform

Abstract: We demonstrate a new technique of heating aqueous droplets on conventional EWOD electrodes by using high frequency high-voltage AC signals. At high actuation frequencies (10-1000 kHz), the droplet temperature rises due to Joule heating from the ohmic currents inside the drop. Using this direct heating technique, we were able to achieve temperatures of 93-94 degrees C, which is significant for several biochemical applications. The technique is studied extensively using experiments and modelling. Several performance parameters of this heating technique were compared with a standard microheater through experiments and simulation. For the presented technique, the substrate near the droplet was cooler in comparison to the microheater. This will reduce parasitic heating of nearby droplets. A comprehensive study regarding the optimization of the geometrical parameters and the capability to heat solutions to higher temperatures using lower voltage and higher frequency were also performed using simulations. As conventional EWOD electrodes are used for heating the liquid, separate micro heaters are not required. This significantly simplifies design and allows us to heat any droplet at any location on the chip. This on demand reconfigurability of droplet heating is the primary benefit of this technique. To establish the abilities of our suggested method, two biochemical experiments were demonstrated.

Pulsed DC magnetron sputtered titanium nitride thin films for localized heating applications in MEMS devices

Abstract: Titanium nitride (TiN) thin films are deposited on Si/SiO2 substratesby using Pulsed DC magnetron sputtering and are characterized for their structural, mechanical and electrical properties for their application as localized heating elements in microsystem devices. The influence of substrate temperature on the properties of TiN films has been investigated. The correlation between the structural orientation with mechanical and electrical properties has been established. The films deposited at a substrate temperature of 300 °C have shown better structural, mechanical and electrical properties. This film has been chosen for the fabrication of microheater and its characterization. A maximum temperature of 250 °C is achieved by applying a power of 2.8 W to the microheater.

Thermally tunable ultracompact Fano resonator on a silicon photonic chip.

Abstract: A thermally tunable ultracompact Fano resonator on a silicon photonic chip is reported. The Fano resonator is implemented by using an add–drop microdisk resonator (MDR) with the through and drop ports connected by two waveguides and combined via an adiabatic 2×2, 3 dB coupler to form a Mach–Zehnder interferometer (MZI). Due to the resonant mode interference between the MDR and the MZI, a Fano resonance with an asymmetric line shape resulted. A p-type-doped microheater is incorporated in the MDR to achieve thermal tunability. By tuning the direct current (DC) voltage applied to the microheater, the Fano resonance is tuned. The proposed Fano resonator is designed, fabricated, and characterized. Measurement results show that a Fano resonance with an extinction ratio of 30.2 dB and a slope rate of 41 dB/nm is achieved. When the microheater is tuned by tuning the DC voltage with a power from 0 to 22.9 mW, the Fano line shape is largely tuned with the Fano parameter q tuned from negative to positive and a maximum wavelength shifting as large as 15.97 nm. Thanks to its ultracompact configuration, and strong and fast tunability with low power consumption, the integrated Fano resonator holds a high potential for applications such as on-chip optical switching and sensing.

Fully Screen Printed Thermocouple and Microheater Applied for Time-of-Flight Sensing in Microchannels

Abstract: In order to control the flow inside microchannels, measuring the flow velocity of fluids is an important task. A possible way to determine flow velocity is by measuring the thermal time-of-flight. To this end, in this paper, a full screen printed combination of microheater and thermocouple is presented. Screen printing represents a technology that is attractive for fabricating low-cost sensor systems for microfluidic devices which can be directly integrated into the channel. The structure presented here has been manufactured using high-temperature stable screen printing inks. The thermocouple is calibrated and then the sensor setup is used to determine the flow velocity in a microchannel at various flow rates. The measurement is performed using a frequency domain approach by evaluating phase shifts of slow steady-state oscillations, and alternatively in the time-domain by estimating the heat transfer function from a step response measurement. The measurement results are compared to theoretically predicted values and show good agreement for a flow velocity range from 20 $\mu 1$ /min to 70 $\mu 1$ /min.

Electro-thermal analysis of an Al–Ti multilayer thin film microheater for MEMS thruster application

Abstract: A multilayer thin film aluminum/titanium (Al/Ti) microheater is developed for the microthruster liquid propellant vaporizing and gas heating for increasing the specific impulse. The microheater was fabricated onto a Pyrex 7740 substrate using a Micro-Electro-Mechanical Systems processing technology. A finite-element based multiphysics simulation was employed to simulate the microheater performance. The distribution of temperature and variation of the thermal deformation are simulated in modeling with the different input power. And the simulation shows that heat loss of the microheater is relatively low comparing with the normal heater. Subsequently an experimental testing of the microheater performance based on infrared imaging device was actualized with applied voltage from 5 to 36 V. An auger electron spectroscopy detection was employed to validating the assumption that Al layer oxidizing is the main reason of temperature higher in the test than simulation.

Electro-Thermal Simulation & Characterization of a Microheater for SMO Gas Sensors

Abstract: The microheater is an important part of a semiconducting metal oxide gas sensor, as its primary function is to heat up the sensitive layer to a desired temperature. The operating temperature of the sensor depends on the sensitive material used and the species of the target gases. Therefore, an accurate extraction of the sensor active area temperature as a function of the applied power is critical for device characterization. These measurements are experimentally challenging due to the extremely small sensing surface area, down to a few tens of $\mu \text{m}^{2}$ , resulting in the need to develop new measurement approaches. In this paper, quantitative testing methods based on platinum and chrome silicon (CrSi) resistance thermometry, as well as a qualitative testing method (light glow) have been carried out to measure the power consumption of two different devices. CrSi has been used as a temperature sensor due to its ability to detect temperatures above 450 °C by acting as a phase-change material. For accurate measurements of temperature distribution, the presented gas sensors are equipped with three configurations of resistive temperature detectors at different locations. To further analyze a sample closed-membrane sensor, finite-element simulations were performed and an analytical model was designed and compared with experimentals. [2017–0228]

A comprehensive methodology for design and development of an integrated microheater for on-chip DNA amplification

Abstract: This paper presents the design and development of an optimized aluminum microheater integrated onto a biochip for the amplification of DNA using polymerase chain reaction (PCR). A coupled 3D finite element electro-thermal simulation has been used to aid in the design of the microheater and the PCR reactor. The microheater has a special shape, designed to provide a uniform temperature throughout the PCR chamber. The microreactor is fabricated at the center of a 20 mm × 20 mm silicon chip. It has a meandered shape, a volume of 1.89 µl and occupies a square area with a side of 3.8 mm. Microchannels to transport fluid in and out of the reactor are also provided. After heater design optimization, the simulated temperature of the fluid volume within the PCR chamber is very uniform (95% of the volume has a temperature within ±0.2 °C when the average temperature is 60 °C). This result is validated by DNA melting point experiments, showing a very similar uniformity. A PCR experiment, consisting of 50 cycles of amplification is conducted to demonstrate functionality of the system; amplifications is uniform across the reactor with variation of the threshold cycle within about 0.5 units.

Design and fabrication of screen printed microheater

Abstract: This paper presents the design and fabrication of a low-cost series microheater which works on the principle of Joule heating. The conducting silver-ink (LOCTITE ECI 1010 E & C) and polyethylene terephthalate (PET) sheet are used as a resistive material for the heating circuit and the substrate respectively. The poor thermal conductivity and high electrical resistivity of the PET sheet are advantageous in achieving the excellent heat confinement. Conventional screen printing is used to fabricate the microheater. Screen printing offers high yield with low turnaround time and fabrication can be done with minimum facilities. The maximum operating temperature of microheater is 100 $${^\circ }{\mathrm{C}}$$ , and it may have promising application in the bio-medical analysis. To improve the thermal uniformity, a 100 μm thick glass coverslip is glued on the heater surface. The influence of supply voltage and time on heater temperature profile is predicted using commercial FEM simulation tool—COMSOL Multiphysics. There is good agreement between the measured and simulation results.

Oscillate Boiling from Electrical Microheaters

Abstract: Oscillate boiling offers excellent heat transfer at temperatures above the Leidenfrost temperature. Here we realize an electrical microheater with an integrated thermal probe and resolve the thermal cycle during the high-frequency bubble oscillations. Thermal rates of $10^8\,$K/s were found indicating its applicability for compact and rapid heat transfer from micro electrical devices.

MEMS-based microheaters integrated gas sensors

Abstract: In the present work efforts have been made to develop microheater integrated gas sensors with low power consumption. The design and simulation of a single-cell microheater is carried out using ANSY...

Modeling, Simulation, and Implementation of Fast Settling Switched PI Controller for MOX Integrated Pt Microheater

Abstract: This paper presents a sensor system with temperature control of platinum microheater using a combined control strategy of open-loop and closed-loop control. The method proposed in this paper modifies the proportional integral control for faster response under sampling time constraint of large sampling interval, as a large sampling interval between two control commands slow the response. The initial quick temperature rising open-loop response of microheater contributes to faster rise time, and then, it is switched to closed-loop control when the quick initial rise has taken place, hence termed open-loop to closed-loop switched proportional integral (OLCLS PI) control. The settling time obtained by OLCLS PI and PI are 3 and 14 s, respectively, for 2% accuracy, thereby providing faster response than PI. The work is studied with elaborate modeling and simulation using MATLAB, and a practical implementation on embedded platform is presented using an in-house developed MOX-based gas sensor, which utilizes a platinum microheater.

Development of integrated microsystem for hydrogen gas detection

Abstract: A low-power microelectromechanical system-based metal-oxide gas sensor along with integrated signal conditioning unit is presented in this study to detect and quantify the variation of H 2 gas concentrations. The interface circuit controls the sensor operating temperature, measures the H 2 gas concentration, contributes a user-friendly interface and can be used with any suitable sensor network. A PIC16F877A microcontroller has been used for this purpose. The temperature of the sensors was stabilised by controlling the actuating voltage of the microheater. Temperatures of the microheater depend on the output voltage of the digital-to-analogue converter (DAC) and were measured by sampling the heater resistance through the use of a voltage divider and analogue-to-digital converters (ADCs). A microcontroller accordingly adjusts the output of DAC's in order to apply the appropriate steering voltage to the heaters. The method employed to measure the concentration of gases is to sample the voltage drop over the resistances of the sensors by ADCs. Alarming system for safety measure was also implemented in this design. The preventive action was taken by introducing an additional feature of wireless communication by sending short message service via global system for mobile modem to the designated emergency number.

Flexible and rapid fabrication of silver microheaters with spatial-modulated multifoci by femtosecond laser multiphoton reduction.

Abstract: In this Letter, parallel writing of silver microwire (AgMW) arrays based on femtosecond laser multiphoton reduction (MPR) is realized by modulating a femtosecond laser beam into a multifoci pattern with a spatial light modulator (SLM). Arbitrarily distributed multifoci are generated with predesigned holograms loaded on a SLM for MPR. The experimental parameters for the desired fabrication of AgMWs with multifoci are systematically investigated and optimized. On this basis, different AgMW patterns are dynamically and simultaneously fabricated by loading different holograms onto a high-frequency refreshed SLM in sequence. The quantity and distribution of multifoci can be controlled dynamically by the SLM in the fabrication process, and even the intensity of individual focus is dynamically modulated by the control of the gray level of holograms. Finally, the potential application of this flexible and rapid AgMW fabrication method in microheater fabrication is demonstrated. The microheaters exhibit a controllable temperature gradient after energized.

Miniaturized Single Chip Arrangement of a Wheatstone Bridge Based Calorimetric Gas Sensor

Abstract: The design and fabrication of a miniaturized calorimetric-type gas sensor in a single chip arrangement is presented. Active and passive thin-film Pt meanders are integrated in a single platform (7 × 7 mm2) together with a temperature sensor and a thin-film microheater at the reverse side. Active meanders are covered by a porous Al2O3/2 wt % Pt thick-film layer. The selection of substrate, position of meanders, and active catalysts (especially their concentration) play a crucial role in directing sensor performance. The presented results show that the sensor signal (Wheatstone bridge voltage) is generated by diffusion-limited exothermic reactions which point towards catalytically enhanced combustion reactions mainly inside the active porous layer. By extrapolation of the linear sensitivity curves, the sensitivity limit was estimated to be 4 ppm for propene and to be 18 ppm for CO. In general, the one-chip-sensing concept has high potential to be used as a gas sensor for analysis of combustible gases; however, further optimization of the meander design and the catalyst material as well as investigations of the sensing behavior under varying ambient temperatures are necessary before such applications shall be considered.

Three-dimensional hierarchical and superhydrophobic graphene gas sensor with good immunity to humidity

Abstract: Superhydrophobic reduced graphene oxide (RGO) with unique 3D hierarchical structures is synthesized by exploiting one-step spark plasma sintering (SPS) within 60 s for high-performance NO 2 detection. The effective removal of oxygenated groups and generation of 3D hierarchical structures in SPS render the RGO superhydrophobic. The superhydrophobicity makes the fabricated RGO sensor exceptionally immune to high relative humidity (RH). Specifically, the RGO sensor exhibits a response degradation less than 5.5% to 1 ppm NO 2 when the RH increases from 0% to 70%. Importantly, an integrated microheater array is employed to remarkably activate the RGO-based NO 2 sensor, boosting the sensitivity. Consequently, the NO 2 sensor displays a high sensitivity (25.5 ppm−1) and an extremely low limit of detection (9.1 ppb). The boosted NO 2 sensing performance is attributed to superhydrophobicity, 3D hierarchical structures with high specific surface area (850 m2/g), abundant defect sites and thermal activation with microheaters.

Growth Optimization, Morphological, Electrical and Sensing Characterization of V 2 O 5 Films for SO 2 Sensor Chip

Abstract: In this work, we investigate the Sulphur dioxide (SO 2 ) sensing characteristics of reactive-ion magnetron sputtered vanadium oxide (V 2 O 5 ) film of different thicknesses, followed by morphological and electrical characterization. Later, sensing material is integrated on MEMS platform to develop a sensor chip to integrated with electronics to enable portable, real-time monitoring of gas. Sputtered films are studied for their sensing characteristics at different operating conditions to realize the optimum thickness film to integrate it with CMOS platform. SO 2 limit of detection (LOD) and the detection precision is quantified as 38 ppb [(R a - R g )/R a x 100% = 0.7] and ~10 ppb using optimized ~ 61 nm V 2 O 5 film. The film is found to be more selective towards SO 2 gas as against CO, CO 2 and NO 2 gases. This optimized film is successfully integrated on the sensor platform, with the chip size of 1 mm2, with an inbuilt microheater power consumption of ~22 mW (at 326°C), to provide a localized uniform temperature to sensor film.

A simple approach for the precise measurement of surface temperature distributions on the microscale under dry and liquid conditions based on thin Rhodamine B films

Abstract: The precise measurement of surface temperatures on the microscale is of major importance for lab-on-a-chip applications that deal with temperature-dependent processes. For that, thermometric methods that combine high temperature resolution with feasibility, flexibility and applicability in aqueous environments are strongly required. Here, we present and characterize an easy approach for surface temperature measurements based on thin films of commercially available sol-gel that contain the temperature-sensitive fluorophore Rhodamine B. These films can be applied onto various surfaces in an easy two-step process and allow for temperature mapping on the microscale under both dry and liquid conditions. To demonstrate the potential of the approach we measured the temperature distribution at the surface of resistive microheaters. We analyzed minute surface temperature gradients and conducted time-dependent measurements. This demonstrated the high resolution regarding temperature (

Birefringence and Reflectivity of All-Polymer Tunable Bragg Grating Filters With Microheaters

Abstract: We study the impact of the two heating schemes, i.e., top heating and buried heating, on the modal birefringence and reflectivity of all-polymer tunable grating filters. Numerical simulations show that with top microheaters, birefringence is thermally induced by a temperature gradient between the microheater and the waveguide. In the case of a buried microheater placed beneath the waveguide core, such thermally induced birefringence is effectively eliminated because of the almost uniform temperature distribution around the core region. Simulation results also indicate that the reflectivity of the polymer waveguide Bragg grating filter is reduced for the top heating scheme as the heating power increases whereas it nearly remains unchanged for the buried heating scheme. Experimentally, the thermally-induced part of the waveguide birefringence has been found to increase to $1\times 10^{-3}$ when raising the specific electrical heating power to 70 mW/mm in the top microheater case. With the buried microheater structures, virtually no thermally induced birefringence was found, in consistency with the simulation results. The reflectivity changes of all-polymer tunable grating filters by heating are also studied. The results are considered helpful for designing polymer-based photonic devices that require birefringence control.

Fabrication and control of a microheater array for Microheater Array Powder Sintering

Abstract: Microheater Array Powder Sintering (MAPS) is a novel additive manufacturing process that uses a microheater array to replace the laser of selective laser sintering as the energy source. Most of the previous research on microheaters is for applications in gas sensing or inkjet printing. The operation temperature and response time of the microheater array are critical for the choice of sintering materials and printing speed for the MAPS process. This paper presents the fabrication, packaging, and control of a platinum microheater array that has a target operation temperature of 400 °C and a response time of ~ 1 ms for the MAPS process. First, the fabrication process of a microheater array is presented. The fabricated microheater array was packaged for easy control and to serve as the printhead of the MAPS process. A proportional-integral-derivative controller was designed to control the temperature response of the microheater. Finally, the effectiveness of the controller was evaluated. Results show the fabricated microheater array is capable of reaching the target temperature of 400 °C and has a thermal response time of less than 1 ms, which satisfies the design requirements for the MAPS process.

Efficient Thermal Tuning Employing Metallic Microheater With Slow-Light Effect

Abstract: Thermal tuning acts as one of the most fundamental roles in integrated silicon photonics since it can provide flexibility and reconfigurability. Low tuning power and fast tuning speed are long-term pursuing goals in terms of the performance of the thermal tuning. Here, we propose and experimentally demonstrate an efficient thermal tuning scheme employing the metallic metal heater. The slow-light effect in the photonic crystal waveguide is employed to enhance the performance of the metal microheater. Meanwhile, the metal microheater is integrated on the side of the waveguide rather than on the top. Thanks to both the slow-light effect and the side-integrated microheater, the tuning efficiency is significantly enhanced, and the response time as fast as 2 $\mu \text{s}$ is obtained. Since the thermal tuning with metal heater has been widely applied in silicon photonics, the proposed scheme may provide a valuable solution towards the performance enhancement of the thermal tuning in silicon photonics.

Scaling a Fluorescent Detection System by Polymer-Assisted 3-D Integration of Heterogeneous Dies

Abstract: Scaling by 3-D integration of various heterogeneous components enables miniaturized systems. However, the heterogeneous system integration is challenging due to the dissimilarities in materials and process used in fabrication of individual components. In this paper, we demonstrate a simple 3-D integration method for miniaturization of systems. Various components of the system were stacked using SU-8-based planarization and epoxy-based bonding. Spacer dielectric (SU-8) was patterned using photolithography for the formation of interconnect vias. Electrical interconnects over the large topography between the layers was formed by the screen printing of silver nanoparticle epoxy. Using this integration technique, we demonstrate a fluorescence-sensing platform consisting of a silicon photodetector, plastic optical filters, commercial LED, and a glass microheater chip. This paper resolves several fabrication challenges of planarization, stacking, and interconnection of these divergent chips. For example, the process incompatibility of the plastic optical filters was resolved by additional passivation using parylene-C. The functionality of the demonstrated system is verified by detecting the fluorescence property of Rhodamine B and Rhodamine 6G dyes. Rhodamine B’s sensitivity to temperature was also demonstrated using the on-chip microheater. This process flow can be scaled to stack a larger number of layers for demonstrations of more complicated systems with enhanced functionality and applications. [2018–0064]