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Microheater

About: Microheater is a research topic. Over the lifetime, 814 publications have been published within this topic receiving 12478 citations.


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Journal ArticleDOI
TL;DR: In this article, Wang et al. proposed a method to solve the problem of molecular catalysts and applications in Inha University's Center for Molecular Catalysts and Applications (BK21 plus program).

2 citations

Proceedings ArticleDOI
15 Oct 2012
TL;DR: In this paper, the primary aim of the present work is to lower the operating temperature of the metal-oxide based sensors for detection of volatile organic compounds (VOCs) without compromising the sensitivity of the device.
Abstract: The primary aim of the present work is to lower the operating temperature of the metal-oxide based sensors for detection of volatile organic compounds (VOCs) without compromising the sensitivity of the device. For this purpose, nanostructured oxides of ITO, Cu and Zn have been explored. The oxides of Cu and Zn have been synthesized by a novel process of thermal oxidation of the respective metal layers in air ambient without using any seed or catalyst layer. On the other hand, nanostructured ITO was obtained by RF magnetron sputtering process. For the heating of the sensing layer, a Ni microheater has been integrated on the sensor chip. Micro-electro-mechanical Systems (MEMS) technology has been adopted for the fabrication of the complete sensor for achieving the desired operating temperature at reduced power level. The sensor was extensively tested for a variety of VOCs such as acetone, methanol, ethanol and IPA. The issues involved in integrating nanostructured oxides with MEMS technology are also addressed.

2 citations

Journal ArticleDOI
TL;DR: In this paper , a suspended micro-heater with the suspended structure inhibits substrate heat transfer, resulting in power consumption as low as 18 mW when the operating temperature is approximately 300 °C.
Abstract: Abstract Gaseous ethanol detection has attracted significant interest owing to its practical applications such as in breath analysis, chemical process monitoring, and safety evaluations of food packaging. In this study, titanium dioxide (TiO 2 ) nanoparticles functionalized with cobalt porphyrin (CoPP) are utilized as resistive ethanol-sensing materials, and are integrated with a suspended micro-heater for low power consumption. The micro-heater with the suspended structure inhibits substrate heat transfer, resulting in power consumption as low as 18 mW when the operating temperature is approximately 300 °C. CoPP functionalization allows an enhanced response (197.8%) to 10 ppm ethanol compared to that of pristine TiO 2 nanoparticles. It is confirmed that the sensor response is reliable upon exposure to 10 ppm ethanol for three cycles. In addition, responses of different magnitude are obtained under exposure to ethanol at various concentrations from 9 to 1 ppm, indicating that the resistance change originates from a charge transfer between the sensing materials and target gas. The sensing mechanism of CoPP-functionalized TiO 2 in relation to charge transfer is analyzed, and the performance of the proposed sensor with previously reported TiO 2 -based ethanol sensors is compared. Considering that it is processed by batch fabrication, consumes low power, and offers high sensitivity, the proposed sensor is promising for use as a portable sensor in the distributed monitoring of gaseous ethanol.

2 citations

Journal ArticleDOI
TL;DR: In this article, the experimental study of the process of subcooled liquid boiling up on a transparent microheater with pulsed heat release was conducted, where the maximum bubble diameter, rates of their growth and times of boiling incipience on the heat flux density and liquid subcooling in the ranges of 11-32 MW/m2 and 50-75 K, respectively, were obtained.
Abstract: The paper deals with the experimental study of the process of subcooled liquid boiling up on a transparent microheater with pulsed heat release. Dependences of the maximum bubble diameter, rates of their growth and times of boiling incipience on the heat flux density and liquid subcooling in the ranges of 11–32 MW/m2 and 50–75 K, respectively, were obtained. The nucleation temperature was calculated for the studied regimes using the COMSOL Multiphysics software.

2 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
202332
202275
202138
202053
201937
201852