Topic
Microheater
About: Microheater is a research topic. Over the lifetime, 814 publications have been published within this topic receiving 12478 citations.
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Patent•
19 Nov 2003
TL;DR: In this paper, a microheater that can make the cores of two optical fibers with removed covering close to each other to heat fuse the parts close to the other at prescribed width dimensions is mounted on a heater support.
Abstract: PROBLEM TO BE SOLVED: To provide a device for manufacturing an optical fiber coupler wherein the width dimension of a heat fusion part is 20 to 70 times as long as the diame ter of the fusion part, a cross section is machined into an elliptical shape to obtain sufficient strength, there is few difference between an initial characteristic and a characteristic after its use for a prescribed term and its reliability can be improved, and to obtain the optical fiber coupler. SOLUTION: In this device for manufacturing the optical fiber coupler in which a microheater that can make the cores of two optical fibers with removed covering close to each other to heat fuse the parts close to each other at prescribes width dimensions is mounted on a heater support, the microheater is mounted on the heater support through a reciprocatingly moving device so as to be able to reciprocatingly move the microheater in the direction of central axes of the two optical fibers so that the length of the heat fusion part can be adjusted arbitrarily. COPYRIGHT: (C)2004,JPO
2 citations
TL;DR: In this article, a thermal mass air flow sensor, which consists of a micro-heater and thermal sensors on the silicon-nitride thin membrane structure, is micro-fabricated by MEMS processes.
Abstract: A thermal mass air flow sensor, which consists of a micro-heater and thermal sensors on the silicon-nitride thin membrane structure, is micro-fabricated by MEMS processes. Three thermo-resistive sensors, one for the measurement of microheater temperature, the others for the measurement of membrane temperature upstream and downstream of the micro-heater respectively, are used. The micro-heater is operated under the constant temperature difference mode via a real time controller, based on inlet air temperature. Two design models for microfabricated flow sensor are compared with experimental results and confirmed their applicabilities and limitations. The thermal characteristics are measured to find the best flow indicator. It is found that two normalized temperature indicators can be adopted with some advantages in practice. The flow sensor with this control mode can be adopted for wide capability of high speed and sensitivity in the very low and medium velocity ranges.
2 citations
Patent•
05 Oct 1999
TL;DR: In this paper, the authors proposed a solution to reduce the heat loss of a bridge type micro-heater to a substrate in a flow sensor provided with the microheater, where the sensor chip was stuck to the supporting substrate.
Abstract: PROBLEM TO BE SOLVED: To reduce the heat loss of a bridge type micro-heater to a substrate in a flow sensor provided with the microheater. SOLUTION: The sensor chip 12 of a flow sensor 11 has a cavity section 15 formed through a silicon substrate 14 at the central part of the substrate 14. A thin film micro-heater 16 and a temperature sensor 17 are formed in the form of bridges laid across the cavity section 15. A supporting substrate 13 has a recessed section 21 at the position corresponding to the cavity section 15. When the sensor chip 12 is stuck to the supporting substrate 13, the distance Th from the micro-heater 16 to the substrate 13 becomes equal to the sum of the thickness of the silicon substrate 14 and the depth of the recessed section 21. Therefore, the sensitivity of detection of the flow sensor 11 can be improved, because the heat loss of the micro-heater 16 to the substrate 14 can be reduced by increasing the distance Th.
2 citations
TL;DR: In this paper , a new graphene microheater chip for TEM was developed by stacking graphene on a suspended SiNx membrane as the Joule heating element, which could be heated up to 800 °C within 26.31 ms with a low power consumption of 0.025 mW/1000 μm2.
Abstract: Low-dimensional materials are bringing significant innovations to in situ TEM characterization. Here a new graphene microheater chip for TEM was developed by stacking graphene on a suspended SiNx membrane as the Joule heating element. It could be heated up to 800 °C within 26.31 ms with a low power consumption of 0.025 mW/1000 μm2. The bulging was only ∼50 nm at 650 °C, which is 2 orders of magnitude smaller than those of conventional MEMS heaters at similar temperatures. The performances benefit from the employment of graphene, since its monolayer structure greatly reduces the heat capacity, and the vdW contact significantly reduces the interfacial interaction. The TEM observation on the Sn melting process verifies its great potential in resolving thermodynamic processes. Moreover, more multifunctional in situ chips could be developed by integrating other stimuli to such chips. This work opens a new frontier for both graphene and in situ characterization techniques.
2 citations
TL;DR: In this article, a micro-thermometer/microheater was used to acquire both opto-calorimetric IR spectra and micro-differential thermal responses.
Abstract: Multi-modal chemical sensors based on microelectromechanical systems (MEMS) have been developed with an electrical readout. Opto-calorimetric infrared (IR) spectroscopy, capable of obtaining molecular signatures of extremely small quantities of adsorbed explosive molecules, has been realized with a microthermometer/microheater device using a widely tunable quantum cascade laser. A microthermometer/microheater device responds to the heat generated by nonradiative decay process when the adsorbed explosive molecules are resonantly excited with IR light. Monitoring the variation in microthermometer signal as a function of illuminating IR wavelength corresponds to the conventional IR absorption spectrum of the adsorbed molecules. Moreover, the mass of the adsorbed molecules is determined by measuring the resonance frequency shift of the cantilever shape microthermometer for the quantitative opto-calorimetric IR spectroscopy. In addition, micro-differential thermal analysis, which can be used to differentiate exothermic or endothermic reaction of heated molecules, has been performed with the same device to provide additional orthogonal signal for trace explosive detection and sensor surface regeneration. In summary, we have designed, fabricated and tested microcantilever shape devices integrated with a microthermometer/microheater which can provide electrical responses used to acquire both opto-calorimetric IR spectra and microcalorimetric thermal responses. We have demonstrated the successful detection, differentiation, and quantification of trace amounts of explosive molecules and their mixtures (cyclotrimethylene trinitramine (RDX) and pentaerythritol tetranitrate (PETN)) using three orthogonal sensing signals which improve chemical selectivity.
2 citations