Topic
Microheater
About: Microheater is a research topic. Over the lifetime, 814 publications have been published within this topic receiving 12478 citations.
Papers published on a yearly basis
Papers
More filters
21 Feb 2013
TL;DR: In this paper, the temperature distribution of microheaters during electromigration was observed by near-infrared (NIR) charge coupled device (CCD) imaging system, and the temperature of the hot spot, located at the tip of the microheater, was well controlled with varying the applied voltage.
Abstract: Temperature distribution of microheaters during electromigration (EM) was observed by near-infrared (NIR) charge coupled device (CCD) imaging system. The temperature of the hot spot, located at the tip of the microheater, was well controlled with varying the applied voltage. Microheaters were broken during EM processes, and breakdown region clearly corresponded to the position of the hot spot. These results imply that NIR CCD imaging system is a useful tool for the investigation of the temperature distribution of microheaters.
1 citations
TL;DR: In this paper, the topology creation by the selective laser sintering method was made and samples of microheater based on ruthenium dioxide micro-powder were made, which were used as microheaters to measure changes in the thermal conductivity of gases.
1 citations
Patent•
05 Jan 2011
TL;DR: In this article, a solenoid type heating resistor-containing three-dimensional microheater is characterized in that: a groove-shaped heating area supporting film is connected with a substrate frame through a supporting suspension girder.
Abstract: The invention relates to a solenoid type heating resistor-containing three-dimensional microheater and a manufacturing method thereof. The solenoid type heating resistor-containing three-dimensional microheater is characterized in that: a groove-shaped heating area supporting film is connected with a substrate frame through a supporting suspension girder; the cross section of the groove-shaped heating area supporting film has a V-shaped or reverse trapezoidal structure; an upper heating resistance wire is connected with a lower heating resistance wire to form a solenoid type heating resistor embedded in the heating area supporting film and the solenoid type heating resistor is connected with an electrode on the substrate frame through a lead on the supporting suspension girder; and the heating area supporting film and the solenoid type heating resistor embedded in the heating area supporting film are supported by the supporting suspension girder to be suspended on a silicon substrate. The heating resistor of the three-dimensional microheater provided by the invention has a solenoid type structure and is embedded in the heating area supporting film, so annularly heating can be realized and the heating efficiency is high. The three-dimensional microheater is particularly suitable for the fields of infrared light sources and sensing.
1 citations
01 Dec 2013
TL;DR: A meander shaped microheater designed using Intellisuite v8.2 and fabricated using a nickel alloy, and tested for its hydrogen sensing property at different bias voltages and with different operating temperatures, finding the optimum operating temperature to be 150°C.
Abstract: MEMS based gas sensors offer superior performance compared to conventional ceramic gas sensors owing to their low power consumption, high sensitivity, faster response and compatibility to CMOS circuits. The design of microheater on the thin membrane of the MEMS structure is crucial to achieve the required temperature. In this paper a meander shaped microheater has been designed using Intellisuite v8.2 and fabricated using a nickel alloy (DilverP1) on micromachined silicon platform (2mm×2mm). A low temperature chemical deposition technique (using Sodium Zincate bath) has been adopted to deposit the sensing layer on top of the microheater. Structural morphology of ZnO was studied by FESEM. The hexagonal nanoflake like structures having average size of 50-70nm were formed. Resistive planar contacts (Au-Au) have been taken and the device was then tested for its hydrogen sensing property at different bias voltages (0-3V) and with different operating temperatures (30-210 °C) taking N2 as a carrier gas. The optimum operating temperature was found ~ 150°C with a high response magnitude of ~80.7% and appreciably fast response time ~29.6s at a H2 concentration of 20000ppm. At lower concentration level (100ppm) the sensor performance was also found to be promising with RM of ~36.8% and response time of 40.8s.
1 citations