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Microheater

About: Microheater is a research topic. Over the lifetime, 814 publications have been published within this topic receiving 12478 citations.


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Journal Article
TL;DR: In this article, the temperature sensor and power dissipation of microheaters were measured and calculated at the various temperatures and the thermal distribution of heater was examined by a IR thermoviewer.
Abstract: Using the results analyzed by FEM(Finite Element Method). the microheaters with the stress-balanced (150 nm)/(300 nm)/(150 nm) diaphragms were fabricated by silicon micromachining techniques. Pt was used as microheater materials. Pt temperature sensor was fabricated to measure the temperature of microheaters. Resistance of temperature sensor and power dissipation of microheater were measured and calculated at the various temperatures. The thermal distribution of heater was examined by a IR thermoviewer. Measured and simulated results are compared and analyzed. The temperature coefficient of resistance of heater was about . Pt heater showed the power dissipation of about 51 mW at and a uniform thermal distribution on the surface.

1 citations

Proceedings ArticleDOI
Teng-chao Huang1, Yibing Shen1, Xu Liu1, Jian Bai1, Xiyun Hou1, Hui Ye1, Di Lou1 
30 Dec 2004
TL;DR: In this paper, a micro fluid oscillator with a boron diffused resistor is proposed, where the actuation principle is based on the combination of Marangoni effect.
Abstract: A novel micro fluid oscillator with a boron diffused resistor is proposed in this paper. The actuation principle is based on the combination of Marangoni effect. The contemporary microfabrication technique enables us to fabricate microheater tiny enough to control temperature so quickly and precisely in micro length scale. The devices exhibiting the Marangoni effect in square channels were designed and fabricated from one silicon substrate and two quartz substrates. And the three substrates were aligned, bonded and packaged for testing. In this actuator there is a pair of micro-heaters to produce a thermal gradient along the slit. The driving wattage is about 0.1W and the resistors can make a temperature difference about 100 degrees during 0.1s with a pulsewidth of 20us for 0.1A current pulses. Then the movement is driven towards the lower temperature direction by the interfacial tension of the air-liquid interface. This micro fluid actuator can play important role in many liquid micro-systems such as in micromotor and micro valve.

1 citations

Proceedings ArticleDOI
01 Dec 2015
TL;DR: In this article, an integrated tunable MSM PD based on Indium Tin Oxide (ITO) that is fabricated on Si and InP is presented, which is achieved by thermally controlling the bandgap of the semiconductor using a Nickel Chromium (NiCr) microheater which is collocated on the opposite side of the PD substrate.
Abstract: This paper presents the design and fabrication of an integrated tunable MSM PD based on Indium Tin Oxide (ITO) that is fabricated on Si and InP. Tuning is achieved by thermally controlling the bandgap of the semiconductor using a Nickel Chromium (NiCr) microheater which is collocated on the opposite side of the PD substrate.

1 citations

Journal ArticleDOI
TL;DR: In this paper , a comparative study of titanium, platinum, and titanium nitride micro-electro mechanical systems based micro-heaters was presented, where a common geometry and thin film thicknesses were selected to achieve comparable base resistances for all three microheater materials.
Abstract: This paper presents a comparative study of titanium (Ti), platinum (Pt), and titanium nitride (TiN) micro-electro mechanical systems based micro-heaters. In the present study, a common geometry and thin film thicknesses were selected to achieve comparable base resistances for all three microheater materials. Titanium, platinum, and titanium nitride thin films are deposited using DC magnetron sputtering, E-beam evaporation, and reactive DC magnetron sputtering techniques, respectively, and deposited thicknesses were verified using scanning electron microscopy. Mechanical properties such as Young’s modulus and hardness were also evaluated using nano-indentation. Later, the micro-heaters were fabricated, packaged, and characterized. The thermal coefficient of resistance (TCR) was found to be 4146, 2641, and 487 ppm/°C for Ti, Pt, and TiN micro-heaters, respectively. Power–temperature (P–T) characterization showed that the power required to reach the set temperature is comparable for all the above micro-heater materials. The TiN micro-heater exhibits a linear voltage–current (V–I) characteristic compared to platinum and titanium micro-heaters. The temperatures measured using infra-red imaging were comparable to those calculated by TCR measurements. Furthermore, thermal stability studies have been performed on all micro-heaters for 110 h. TiN microheaters were found to be more stable and resilient to external environmental conditions than Ti and Pt microheaters because of their lower TCR values.

1 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
202332
202275
202138
202053
201937
201852