Topic
Microheater
About: Microheater is a research topic. Over the lifetime, 814 publications have been published within this topic receiving 12478 citations.
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TL;DR: In this paper, a modified local heating procedure is presented that reduces the sheet resistance of silicon wafers used as heating regions, and the temperature dropping gradient is improved with a novel microheater during micromolding.
Abstract: A modified local heating procedure is presented that reduces the sheet resistance of silicon wafers used as heating regions. The temperature-dropping gradient is improved obviously with our novel microheater during micromolding. In comparison with the nonsteady diffusion model, secondary ion mass spectrometry (SIMS) measurements show better agreement of nonsteady diffusion model at high temperature than at low temperature. Fine polymer microstructures can be obtained effectively by our micromolding process using a novel microheater.
1 citations
01 Jan 2011
TL;DR: It is demonstrated that vapor bubbles can be generated above the microheaters resulting in fast fluid displacement and therefore in mechanical cell lysis by pushing the cell against the wall or the ceiling of the microfluidic channel.
Abstract: We demonstrate the first mechanical single-cell lysis via on-chip integrated microheaters. The chip combines an electrical layer with embedded microheaters and a fluidic layer, fabricated by soft lithography. Vapor bubbles can be generated above the microheaters resulting in fast fluid displacement and therefore in mechanical cell lysis by pushing the cell against the wall or the ceiling of the microfluidic channel. Single-cell lysis was analyzed with Calcein AM stained mouse fibroblasts via monitoring the exclusion of the live cell stain after bubble formation. 27 of 27 cells were lysed, even in a distance of up to 37 μm away from the heater.
1 citations
04 Mar 2010
TL;DR: A series of finite element thermoelectric coupling simulations on the Ti/Pt/Cr/Au thin-film microheater array were conducted in this article, and a carbon nanotube bundle was grown locally at a temperature of above 650°C while the temperatures in most ungrown area remain below 450°C.
Abstract: A series of finite element thermoelectric coupling simulations on the Ti/Pt/Cr/Au thin film microheater array were conducted. The infrared image of the fabricated microheater device confirmed the simulation results. Based on these simulations, a microheater array was fabricated on Si/SiO 2 substrate, and carbon nanotube bundles were grown locally at a temperature of above 650°C while the temperatures in most ungrown area remain below 450°C, which is compatible with current IC process, facilitating the way for carbon nanotubes toward micro/nano electronics applications.
1 citations
TL;DR: In this article, a miniaturized wireless heating strip was designed for safe wireless hyperthermia treatment against restenosis, which can be inserted into a stent that can be deployed in a blood vessel using a typical catheter-based delivery system.
Abstract: This work proposes a miniaturized wireless heating strip designed for safe wireless hyperthermia treatment against restenosis. The proposed heating strip was designed to be inserted into a stent that can be deployed in a blood vessel using a typical catheter-based delivery system. The device consists of a micromachined LC-based resonator and a microheater with a temperature regulator (MHTR). The LC-based resonator was employed to achieve wireless resonant RF heating, with the embedded MHTR serving as an electric current breaker in the resonator circuit to maintain the strip’s temperature within a desired range. An acrylate-based composite was used as the key material of the MHTR for temperature sensing and electric-current breaking. The MHTR allows smooth heating regulation in a passive manner, reducing the complexity of the device, and thus further facilitates the miniaturization of the device. The frequency responses to temperature of devices with and without an MHTR were studied. The performance of devices immersed in physiological saline solution was also examined in detail. Wireless heating tests demonstrated that the proposed MHTR effectively maintained the device temperature at around 45 °C with an output RF power of 500 mW. The results indicate that the proposed device potentially offers safe and reliable hyperthermia treatment.
1 citations
TL;DR: In this article , the design, fabrication and characterization of novel inter-layer microheaters based on low temperature co-fired ceramics (LTCC) technology has been presented.
Abstract:
This paper presents design, fabrication and characterization of novel inter-layer microheaters based on low temperature co-fired ceramics (LTCC) technology. LTCC microheater structures (S1 to S3) with three different heater configurations has been presented. Microheater structure S1 has a heater pattern generated only on the top LTCC layer while S2 and S3 structures have inter-layer heater patterns. These structures have been simulated using COMSOL software to depict the temperature distribution over the active area. LTCC being a multilayer technology, heater patterns are generated in two different layers of LTCC tapes and connected through vias (3D interconnections) to fabricate inter-layer microheaters. By distributing the heater pattern of S1 equally in two LTCC tape layers (as in S3), this method allows possibility to develop miniature LTCC microheaters using conventional screen-printing process. The developed microheaters are characterized and the results are compared. At an input power of ~ 1W, structure S3 reaches a peak temperature of 316 °C as compared to 272 °C achieved with S1 configuration. Thermal imaging results shows better temperature uniformity in the active area for inter-layer microheaters as compared to microheater having heater pattern only on the top LTCC layer.
1 citations