scispace - formally typeset
Search or ask a question
Topic

Microheater

About: Microheater is a research topic. Over the lifetime, 814 publications have been published within this topic receiving 12478 citations.


Papers
More filters
Proceedings ArticleDOI
05 Jan 2009
TL;DR: Results show that ITO nanofiber gas sensor exhibits significantly better sensitivity for NO2 at lower temperature and good selectivity forNO2 and H2 and the highest sensitivity of the sensor is about 34; and this sensor can also work at room temperature.
Abstract: This paper presents the gas sensing characteristics of Indium-Tin-Oxide (ITO) nanofibers. ITO nanofibers were fabricated by electrospinning process and integrated with microheater, micro temperature sensor and interdigitaded electrodes (IED). The morphology and crystal structure of ITO nanofibers were studied by SEM and XRD, respectively. The optimal working temperature and sensitivity of the ITO nanofiber gas sensors were investigated. The ITO nanofiber gas sensor exhibits a linear current-voltage relationship. The highest sensitivity of the sensor is about 34, which is obtained at a working temperature of 300°C; and this sensor can also work at room temperature, the sensitivity at room temperature is about 5.2. The detect limitation of this ITO nanofiber sensor is 10ppm. This sensor shows no response for H 2 . These results show that ITO nanofiber gas sensor exhibits significantly better sensitivity for NO 2 at lower temperature and good selectivity for NO 2 and H 2 .

1 citations

Journal ArticleDOI
TL;DR: In this article , a fabrication concept is demonstrated that allows for the fabrication of membrane-suspended microstructures using standard microfabrication techniques directly integrated with printed circuit boards (PCB) by laminating polyimide (PI) films over cavities in the PCB.
Abstract: When microelectromechanical systems are manufactured in high densities, the necessary routing layer structures can become complex and thus expensive if executed in silicon technology. If, additionally, the microstructures are also to be fabricated suspended on membranes, complex thinning processes become necessary to form these often rather fragile membranes. Here, a novel fabrication concept is demonstrated that allows for the fabrication of membrane-suspended microstructures using standard microfabrication techniques directly integrated with printed circuit boards (PCB) by laminating polyimide (PI) films over cavities in the PCB. This results in cost-effective routing layer fabrication and direct compatibility with common electronic component standards such as SMT (surface-mount technology) and THT (through-hole technology). To illustrate the capabilities of the fabrication process, we fabricated an array of membrane suspended microheaters. Individual platinum microheater elements are suspended on PI membranes that are 25 $\mu \text{m}$ thick and 500 $\mu \text{m}$ in diameter. The fabricated PCB carries a $10\times 10$ array of suspended microheaters on an area of 26mm $\times\,\,26$ mm. The characterization of the microheater array shows that a yield of 86% functional microheaters was achieved. An individual microheater shows an almost linear heating characteristic at least up to 200°C demonstrating the viability of the technique for creating functional membrane-suspended microstructures on a PCB. [2021-0226]

1 citations

Journal ArticleDOI
TL;DR: In this paper, a noncontact and absolute measurement method for thermal diffusivity was reported, where the IR irradiation from an electric microheater had a significant effect on heat conduction in the sample.
Abstract: We have already reported the brand new noncontact and absolute measurement method for thermal diffusivity. In this method, thermal diffusivity was measured from IR movie of 1D thermal conduction. Unfortunately, the IR irradiation from an electric microheater had a significant effect on heat conduction in the sample. And it could not be handled by a numerical calculation process. So the region, in which the correct value could be obtained, was narrow. To eliminate the effects of IR irradiation, we tried two ideas. One was the use of a laser as the heat source, instead of an electric microheater. The other was to attach the IR radiation suppressor to an electric microheater. As a result, the accuracy was significantly improved compared with the previous report, through the use of an IR irradiation suppressor on an electric microheater.

1 citations

Patent
20 Jul 2017
TL;DR: In this paper, a gas sensor with temperature uniformity is presented, which includes a complementary metal-oxide semiconductor (CMOS) substrate layer, a dielectric layer and a gas sensing layer.
Abstract: A gas sensor device with temperature uniformity is presented herein. In an implementation, a device includes a complementary metal-oxide semiconductor (CMOS) substrate layer, a dielectric layer and a gas sensing layer. The dielectric layer is deposited on the CMOS substrate layer. Furthermore, the dielectric layer includes a temperature sensor and a heating element coupled to a heat transfer layer associated with a set of metal interconnections. The gas sensing layer is deposited on the dielectric layer.

1 citations

Proceedings ArticleDOI
22 Dec 2020
TL;DR: In this article, the authors described the design, fabrication, and test results of Zinc Oxide (ZnO) thin films based ethanol (C2H5OH) sensor.
Abstract: This paper described the design, fabrication, and test results of Zinc Oxide (ZnO) thin films based ethanol (C2H5OH) sensor. Pure ZnO (c- axis oriented) thin films was prepared by RF magnetron sputtering techniques at room temperature on Silicon (Si)/Silicon dioxide (SiO2)substrate for gas sensing applications. Along with the ZnO thin film, Pt micro-heater, platinum resistance thermometer (PRT) and interdigited gold (Au) electrodes were also fabricated verticallyto make a complete C2H5OH sensor device. The layout design of platinum(Pt) microheater and PRT along with the interdigited electrodes is performed by the computor tool L-EDIT. The thermo-mechanical analysis of micr-heater was performed by the multi-physics simulator ANSYS. The deposited ZnO thin film is annealed at different temperatures in the range of 250 °C to 450 °C. The properties of annealed ZnO thin film was analyzed by using various charactirization techniques such as surface profilometer, XRD, EDX and SEM. A measurement set-up was also developed to measure the performance of Pt micro heater and the sensitivity of the sensor at differnet concentration of C2H5OH. The highest sensitivity of C2H5OH sensor was achieved at the operating temperature of 350 °C. The Ethanol sensor shows good performance in terms of stability, sensitivity, recovery, response, reversibility and repeatability in the concentration of C2H5OH ranging from 50 ppm to 200 ppm.

1 citations


Network Information
Related Topics (5)
Silicon
196K papers, 3M citations
80% related
Carbon nanotube
109K papers, 3.6M citations
80% related
Graphene
144.5K papers, 4.9M citations
79% related
Thin film
275.5K papers, 4.5M citations
79% related
Nanoparticle
85.9K papers, 2.6M citations
78% related
Performance
Metrics
No. of papers in the topic in previous years
YearPapers
202332
202275
202138
202053
201937
201852