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Microheater

About: Microheater is a research topic. Over the lifetime, 814 publications have been published within this topic receiving 12478 citations.


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Journal ArticleDOI
TL;DR: In this article , an active waveguide that is constructed via depositing an ITO layer (as the microheater) surrounding the pre-fabricated GSST layer on a silicon rib-waveguide is designed.
Abstract: Optical phase change materials (O-PCMs) are emerging as promising active materials for exploitation in silicon photonics platforms, due to their compatibility with CMOS fabrication technology and the tunability of their optical characteristics via external excitation. Despite their advantages, O-PCMs suffer from relatively high insertion loss hindering efficient modulation. Also, the change of the imaginary part of the refractive index in O-PCMs is large and the realization of a Mach-Zehnder modulator (MZM) based on O-PCM materials becomes challenging. To overcome these issues, we consider the variation of both real and imaginary parts of the refractive index, facilitated by a GSST-based MZM design. To achieve this, we design an active waveguide that is constructed via depositing an ITO layer (as the microheater) surrounding the pre-fabricated GSST layer on a silicon rib-waveguide. The active length of the proposed MZM is designed ∼4.3 µm at the wavelength of 1.55 µm. The simulations indicate that a compact MZM can be achieved by eliminating the S-bends in the MZM structure without affecting the modulation. The proposed bend-less MZM demonstrates an insertion loss less than 1.7 dB and an extinction ratio greater than 35 dB over the entire optical C-band.

1 citations

Proceedings ArticleDOI
01 Jul 2016
TL;DR: In this article, the surface plasmon polariton is combined with the basic thermal emission from the microheater for the wavelength selectivity, and the wavelength is decided by the gas species mixed together in He discharging gas.
Abstract: The semiconductor silicon is known as the material which is not suitable for the light source. Outside the visible light region, we try two different light sources. One is the infrared light source. The surface plasmon polariton is combined with the basic thermal emission from the microheater for the wavelength selectivity. Another is vacuum UV light source using the atmospheric pressure plasma. The wavelength is decided by the gas species mixed together in He discharging gas. In both devices, MEMS structures play the important roles for the efficiency.
Proceedings ArticleDOI
01 Aug 2020
TL;DR: In this article, three simulation models of a graphene-based micro heater are established, and the thermal performance of three micro heaters was compared and analyzed, and COMSOL is applied to simulate and analyze thermal distribution of the models.
Abstract: Micro heaters are widely used in the fields of gas sensors, gas galvanometers, infrared light sources, and collection of fine particles. Recently, micro heater for gas sensor usually use platinum as it’s electrode material. This paper aims to improve the wearability of flexible gas sensors. Because graphene has high thermal conductivity, low convective heat coefficient, and good toughness, it has the potential to replace traditional metal materials to make electrode structures for flexible sensor components. In this paper, three simulation models of graphene-based micro heater are established, and the thermal performance of three micro heaters was compared and analyzed. COMSOL is applied to simulate and analyze thermal distribution of the models. Results show that, when the applied voltage is 9V, the steady-state temperature of the micro heater is between104-105 ℃, and at this time the power consumption achieved 146 mW. The graphene-based micro heater can basically meet the needs of the optimal working temperature of flexible gas sensor. This work helps in the wearable development of flexible sensors.
Patent
18 Jul 2016
TL;DR: In this article, the authors proposed an air flow sensor to prevent pollution by heating a protection layer by a device heating unit electrically connected to a microheater in series, where the microheaters and the device heating units simultaneously heated.
Abstract: The present invention relates to an air flow sensor to prevent pollution which prevents pollution of the air flow sensor by heating a protection layer by a device heating unit electrically connected to a microheater in series. The air flow sensor comprises: a silicon substrate; a support layer stacked on an upper portion of the silicon substrate; a heating unit stacked on an upper portion of the support layer, having a microheater emitting heat; a temperature sensor stacked on an upper portion of the support layer, measuring changes in the temperature of ambient air due to heat emitted by the microheater; an external air temperature sensor disposed in a direction in which air flows to measure the temperature of air flowing from the outside; a sensor unit having temperature measuring resistors respectively disposed on both sides of the temperature sensor; and a protection layer stacked on the sensor unit and an upper portion of the heating unit. The heating unit further comprises a device heating unit electrically connected to the microheater to emit heat, and the microheater and the device heating unit simultaneously heated.
Book ChapterDOI
01 Jan 2015
TL;DR: In this article, the performance of a low power microheater for a gas sensing system has been evaluated by using simulation and simulation of a gas sensor with different membrane sizes and geometries taking into account the temperature distribution and power consumption problems.
Abstract: The purpose of this work is to design, simulate, and to evaluate the performance of a low power microheater for a gas sensing system A microheater is a microstructure incorporated in a MOS gas sensor in order to elevate the temperature of the sensor to an operating range for the reliable performance of a gas sensor An approach is made in this work to find an optimized microheater structure by considering different membrane sizes and geometries and taking into account the temperature distribution and power consumption problems The materials used for the analysis are Platinum and Polysilicon After analyzing various microheater designs, a novel design is developed by optimization and varying geometry, layer dimension, and materials of the device For the developed design, thermal profile and power consumption analysis are carried out The entire work is carried out in COMSOL MULTIPHYSICS 42

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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
202332
202275
202138
202053
201937
201852