Topic
Microheater
About: Microheater is a research topic. Over the lifetime, 814 publications have been published within this topic receiving 12478 citations.
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TL;DR: A microheater array device was designed and fabricated using the SwIFT-LiteTM process at Sandia National Laboratories as discussed by the authors, which contains 18 individually controllable microheaters in a 3×6 array on a silicon substrate.
Abstract: A microheater array device is designed and fabricated using the SwIFT-LiteTM process at Sandia National Laboratories. The device contains 18 individually controllable microheaters in a 3×6 array on a silicon substrate. The microheater array device was designed for use as a biosensor platform with a waveguide for real-time detection of DNA hybridization and melting as well as microfluidics for sample delivery. The design process including modeling, fabrication, and characterization of the heaters and waveguide is detailed. A FRET (florescence resonance energy transfer) system for DNA melting experiments is described, and the associated surface chemistry and microfluidic systems are discussed.
01 Jan 2006
TL;DR: In this paper, the authors developed a controller required to regulate the high temperature set points (up to 650°C) of the microheater, which was provided by an on-chip thin film temperature detector.
Abstract: Microsensors are becoming increasingly important to society as the field of nanotechnology advances. One such microsensor is a solid state gas concentration sensor, which has been used for over a decade, especially in the automotive field to control air/fuel ratios in the combustion process. These devices generally utilize an on-board microheater to improve gas sensitivity. Such a gas sensor is currently being developed here at the University of Utah to detect nitrous oxide (NOx) concentrations in diesel exhaust. My contribution was to develop the controller required to regulate the high temperature set points (up to 650°C) of the microheater. Feedback for this control is provided by an on-chip thin film Resistance Temperature Detector (RTD) located near the microheater. Using this control setup, the system is capable of maintaining a constant set temperature for gas sensing, as well as delivering step temperature profiles needed for testing, tuning and diagnostic purposes. Keywords-Microheater; Gas Sensor; PID Control; Data Converters
01 May 2017
TL;DR: In this article, considering CO 2 gas sensing, the grating design robust against the dimension error is examined, and the combination with the microheater in the vacuum packaged setup will further reduce the thermal loss.
Abstract: Plasmonic thermal emitter is promising for improving the efficiency of the gas sensor generating the infrared matched with the gas absorption band. The combination with the microheater in the vacuum packaged setup will further reduce the thermal loss. Here, considering CO 2 gas sensing, the grating design robust against the dimension error is examined.
01 Jan 2012
TL;DR: In this paper, a 3D micropellistor based on a microheater with a Pt heater embedded in a concave-shaped active area was fabricated by MEMS technology.
Abstract: This paper presents a novel 3D micropellistor based on a 3D microheater. The 3D microheater with a Pt heater embedded in a concave-shaped active area was fabricated by MEMS technology. Then a detector and a compensator was developed by sol-gel process, introducing Pd as the catalytic metal and porous alumna as the reference material. Test results indicate that the 3D catalytic micropellistor has a output voltage of 12 mV to 10% LEL methane. And it has a very high sensitivity, fast response time and liner output voltages.