Topic
Microheater
About: Microheater is a research topic. Over the lifetime, 814 publications have been published within this topic receiving 12478 citations.
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TL;DR: In this article, a SnO2 thick-film gas sensor was deposited by screen printing onto a micromachined dielectric stacked membrane equipped with an embedded polysilicon microheater and two resistors for temperature measurement.
Abstract: We report developing a SnO2 thick-film gas sensor deposited by screen printing onto a micromachined dielectric stacked membrane equipped with an embedded polysilicon microheater and two resistors for temperature measurement. The microheaters were designed to enable an operating temperature of 400 °C at about 30 mW power consumption. A newly developed scheme for temperature measurement was adopted for on-line adjustment of the film temperature through a conventional low-power feedback circuit. The electrical response of the prototypes to CO and CH4 is discussed, and their performance is compared to traditional devices fabricated via thick-film methods.
32 citations
TL;DR: The potential of this strain engineering platform to fabricate a strain-actuated optical modulator with single-layer MoS2 is illustrated and the compact geometry results in a negligible spatial drift, which facilitates their integration in optical spectroscopy measurements.
Abstract: We present microfabricated thermal actuators to engineer the biaxial strain in two-dimensional (2D) materials. These actuators are based on microheater circuits patterned onto the surface of a poly...
32 citations
TL;DR: In this paper, the authors present an imaging system that enables the extraction of three different types of information: first, the topography measurement of an electronic device at rest; then, two other informations are obtained when the same device is submitted to a transient current: on one hand, the induced surface displacement and on the other hand, qualitative surface temperature variations field.
Abstract: We present an imaging system that enables the extraction of three different types of information: First, the topography measurement of an electronic device at rest; then, two other informations are obtained when the same device is submitted to a transient current: on one hand, the induced surface displacement and on the other hand, the qualitative surface temperature variations field. The same bench includes two imaging techniques, one based upon interferometry, the other upon thermoreflectance, both of them using a light-emitting diode as a source of light. Results on a microheater are presented.
32 citations
TL;DR: An uncooled C-band, external-cavity, silicon-assisted hybrid laser, waveguide-coupled wall-plug-efficiency of 5.5% at room temperature, output power of 10 mW and tuning efficiency of 2.2 nm/mW using a ring-based tunable reflector is demonstrated.
Abstract: We demonstrate a hybrid III-V/SOI laser by vertically coupling a III-V RSOA chip with a SOI-CMOS chip containing a tunable wavelength selective reflector We report a waveguide-coupled wall-plug-efficiency of 55% and output power of 10 mW A silicon resistor-based microheater was integrated to thermally tune a ring resonator for precise lasing wavelength control A high tuning efficiency of 22 nm/mW over a range of 18 nm was achieved by locally removing the SOI handler substrate C-band single mode lasing was confirmed with a side mode suppression ratio of 35 dB This grating coupler based vertical integration approach can be scaled up in two dimensions for efficient multi-wavelength sources in silicon photonics
32 citations
TL;DR: In this article, a bubble-powered micropump which consists of a pair of nozzle-diffuser flow controller and a pumping chamber was fabricated and tested, and the volume flow rate was found to be dependent on the duty ratio and operation frequency.
Abstract: A bubble-powered micropump which consists of a pair of nozzle-diffuser flow controller and a pumping chamber was fabricated and tested in this study. The two-parallel micro line heaters were fabricated to be embedded in the silicon dioxide layer above a silicon wafer which serves as a base plate for the micropump. A pumping chamber, a pair of nozzle-diffuser unit and microchannels including the liquid inlet and outlet port were fabricated by etching through another silicon wafer. A glass wafer having two holes of inlet and outlet ports of liquid serve as upper plate of the pump. Sequential photographs of bubble nucleation, growth and collapse were visualized by CCD camera. The liquid flow through the nozzle during the period of bubble growth and slight back flow of liquid at the collapse period can be clearly seen. The volume flow rate was found to be dependent on the duty ratio and the operation frequency. The volume flow rate decreases as the duty ratio increases in the micropump with either circular or square pumping chamber.
32 citations