Microheater

About: Microheater is a research topic. Over the lifetime, 814 publications have been published within this topic receiving 12478 citations.

Effect of heater geometry on the high temperature distribution on a MEMS micro-hotplate

Abstract: Temperature uniformity on a micro-hotplate is important for gas sensor sensitivity, linearity, and resolution. There are several ways to create a uniform temperature distribution on a micro-hotplate. In this paper, the modification of microheater geometry is the method used. Four different heater geometries are simulated using ConvetorWare software to determine which geometry can give the most uniform temperature distribution. The simulations show that the heater geometry which combines parallel and meander shapes results in the most uniform heat distribution. The electrical potential and current distributions of the four different micro-heater geometries are also evaluated.

Pt Nanostructures Fabricated by Local Hydrothermal Synthesis for Low-Power Catalytic-Combustion Hydrogen Sensors

Abstract: Hollow, microrod-like Pt nanostructures are locally synthesized on a small, suspended microheater platform (9 μm × 110 μm) as the catalytic layer of a low-power hydrogen (H2) catalytic combustion s...

Pulsed DC magnetron sputtered titanium nitride thin films for localized heating applications in MEMS devices

Abstract: Titanium nitride (TiN) thin films are deposited on Si/SiO2 substratesby using Pulsed DC magnetron sputtering and are characterized for their structural, mechanical and electrical properties for their application as localized heating elements in microsystem devices. The influence of substrate temperature on the properties of TiN films has been investigated. The correlation between the structural orientation with mechanical and electrical properties has been established. The films deposited at a substrate temperature of 300 °C have shown better structural, mechanical and electrical properties. This film has been chosen for the fabrication of microheater and its characterization. A maximum temperature of 250 °C is achieved by applying a power of 2.8 W to the microheater.

A Low Power Cantilever-Based Metal Oxide Semiconductor Gas Sensor

Abstract: This letter, for the first time, reports a novel metal oxide semiconductor (MOS) gas sensor based on a single cantilever. The extremely brief Platinum microheater without any coil, is on a $10~\mu \text{m}$ wide cantilever, which shows very low static power consumption and fast heating response. Sensors were fabricated on a four inch Si wafer using typical micro-electro-mechanical system (MEMS) process, and SnO2 was chosen as the sensing material. Test results indicate that the static power consumption is only 2.96 mW. With this applied power, the sensor can reach 400 °C and the heating-up time is just 260 $\mu \text{s}$ . Both of them are enormously improved, comparing with the MEMS MOS gas sensors with suspended membrane supported by slender beams. The sensor shows a good linear characteristic to 0–10 ppm ethanol. Moreover, due to the single cantilever structure, ten sensors can be fabricated inside a die of 1 mm2, improving the integration by an order of magnitude.

Material and design considerations for low-power microheater modules for gas-sensor applications

Abstract: A large number of gas-sensitive materials like semiconducting metal oxides operate only at elevated temperatures. A new type of low-power microheater module based on new materials (such as diamond-like carbon or silicon carbide) is investigated. Simulation methods (finite-element method, FEM) are used to compare different types of concepts for low-power microheater modules. The thermal behaviour of membranes with different material combinations and the mechanical stress induced into a thin membrane at elevated temperatures are analysed by simulation. The advantage of using new materials like diamond, diamond-like carbon or silicon carbide films in these fields will be demonstrated and a proposal for realization is given. The benefit of extensive simulation studies in the approach is to minimize the costs for development, especially in sensitive fields of research and development.