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Microheater

About: Microheater is a research topic. Over the lifetime, 814 publications have been published within this topic receiving 12478 citations.


Papers
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Journal ArticleDOI
TL;DR: In this paper, a microheater device that enables the application of a temperature field on a glass surface, thereby enabling the study of temperature dependence of DNA-surface interactions is described.
Abstract: Despite deoxyribonucleic acid (DNA)’s well-known temperature sensitivity, not much work has been reported on leveraging temperature to manipulate the interaction of DNA with surfaces. This paper describes a microheater device that enables the application of a temperature field on a glass surface, thereby enabling the study of temperature-dependence of DNA-surface interactions. Experimental data for thermal performance of the device agree well with finite-element simulation results. Experiments demonstrate the capability of spatially selective detachment of DNA from a glass surface using the device. The integration of thermal-based capabilities described here with analysis tools such as polymerase chain reaction may help improve DNA detection and separation capabilities.

11 citations

Journal ArticleDOI
TL;DR: In this article, a series microheater based on the principle of Joule heating was designed and fabricated for bio-medical analysis, and the maximum operating temperature was achieved by using a glass coverslip on the heater surface.
Abstract: This paper presents the design and fabrication of a low-cost series microheater which works on the principle of Joule heating. The conducting silver-ink (LOCTITE ECI 1010 E & C) and polyethylene terephthalate (PET) sheet are used as a resistive material for the heating circuit and the substrate respectively. The poor thermal conductivity and high electrical resistivity of the PET sheet are advantageous in achieving the excellent heat confinement. Conventional screen printing is used to fabricate the microheater. Screen printing offers high yield with low turnaround time and fabrication can be done with minimum facilities. The maximum operating temperature of microheater is 100 $${^\circ }{\mathrm{C}}$$ , and it may have promising application in the bio-medical analysis. To improve the thermal uniformity, a 100 μm thick glass coverslip is glued on the heater surface. The influence of supply voltage and time on heater temperature profile is predicted using commercial FEM simulation tool—COMSOL Multiphysics. There is good agreement between the measured and simulation results.

11 citations

Patent
10 Oct 2012
TL;DR: In this article, a micro electro mechanical system (MEMS) gyroscope, a chip level temperature control method thereof and a processing method thereof are described, where a microheater and a temperature sensor are processed on a glass substrate by a micromachining technique.
Abstract: The invention relates to a micro electro mechanical system (MEMS) gyroscope, a chip level temperature control method thereof and a processing method thereof. A microheater and a temperature sensor are processed on a glass substrate by a micromachining technique; the glass substrate is bonded with an MEMS gyroscope structure chip; the MEMS gyroscope chip is heated by applying voltage at the two ends of the microheater; and the integrated temperature sensor monitors the temperature of the MEMS gyroscope chip in real time so as to drive a peripheral circuit to adjust the voltage at the two ends of the heater and keep the temperature of the gyroscope chip constant and a little higher than the upper limit of the temperature of the working environment. The heater and the temperature sensor are integrated on the glass substrate, the volume is small and the temperature sensitivity is high. The chip level temperature control method has the characteristics of low power consumption, small volume, high applicability and high repeatability, can be compatible with the micromachining process, can realize batch production, and can be widely applied to chip level temperature control of other MEMS chips.

10 citations

Journal ArticleDOI
TL;DR: A novel process is proposed for fusing and tapering a fiber coupler with a microheater, and the conditions for fabricating wavelength-flattened fiber couplers with this method are established.
Abstract: A novel process is proposed for fusing and tapering a fiber coupler with a microheater, and the conditions for fabricating wavelength-flattened fiber couplers with this method are established. This microheater could be used to obtain fiber-processing temperatures near 1700 °C in air. Fibers with cladding diameters of 125 and 107 μm were used. The peak coupling ratio was controlled quantitatively and increased exponentially with increases in fusing time at each temperature. The average excess loss at 1.55 μm was 0.05 dB, and the average coupling ratio deviation for a change in the incident light polarization angle was 0.48%, with an average coupling ratio of 13.7% (n = 14). These properties were obtained with an accurately controlled fusing temperature and a wide and stable microheater heat region for tapering.

10 citations

Proceedings ArticleDOI
Ankur Jain1, K.D. Ness1, Angie McConnell1, Linan Jiang1, Kenneth E. Goodson1 
01 Jan 2003
TL;DR: In this article, a microheater device for use in experiments to study the effect of temperature on nerve cell growth is presented, which consists of a thin membrane with embedded heater and temperature sensors.
Abstract: There has been significant work on use of MEMS for biomedical applications in the past few years. This work presents a microheater device for use in experiments to study the effect of temperature on nerve cell growth. The device consists of a thin membrane with embedded heater and temperature sensors. Nerve cells could be immobilized on the membrane surface and their growth behavior could be studied by applying different heating powers, the goal being the actuation and control of cell growth using temperature. This work presents the design and fabrication of the microheater device being used in these cell growth experiments. Experimental data and finite element modeling are used to characterize the thermal response of the device. This yields a low value of the membrane thermal conductivity which indicates the amorphous nature of the thin film.Copyright © 2003 by ASME

10 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
202332
202275
202138
202053
201937
201852