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Microheater

About: Microheater is a research topic. Over the lifetime, 814 publications have been published within this topic receiving 12478 citations.


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Patent
15 Dec 2003
TL;DR: In this paper, a spin-on-glass microheater surface is applied to a microfluidic device for rapid heating to temperatures above 360°C and rapid cooling is possible using these microheaters.
Abstract: Microfabricated heaters for microfluidic devices for lab-on-a-chip applications comprising channels using deposited conductors such as sputtered metal, alloys, polymers and composites thereof; or conductors prepared by ion implantation, and methods for fabricating same are disclosed. Rapid heating to temperatures above 360° C. and rapid cooling is possible using these microheaters. Repeated heating does not lead to the microheater devices weakening or burning out. Preferred embodiments include application of spin-on-glass on the microheater surface.

10 citations

Proceedings ArticleDOI
Anjin Liu1, Ziyang Zhang1, Dongliang Liu1, Norbert Keil1, N. Grote1 
TL;DR: In this paper, the thermal and optical simulations of polymers and planar waveguides with different heating schemes were performed by finite element method and both the top and buried microheaters were adopted to realize tuning function by the thermo-optic effect.
Abstract: We perform the thermal and optical simulations of silicon nitride / polymer hybrid waveguides with different heating schemes by finite element method. Both the top and buried microheaters are adopted to realize tuning function by the thermo-optic effect. We find the buried microheater is more energy-efficient than the top microheater in creating a uniformed temperature environment in the waveguide region. On the other hand, the top electrode tends to create a strong temperature gradient through the waveguide, which in turn distorts the optical mode. This distortion, however, is different for TE and TM modes. This thermally induced birefringence effect is thoroughly investigated in this paper. Keywords: Silicon nitride waveguide, polymer, microheater, bire fringence, thermal simulation, thermo-optic effect 1. INTRODUCTION Optical integration has attracted much attention worldwide, because of the compact size, cost effectiveness, improved functionalities, and so on. Planar waveguide technologies, including SOI (silicon on insulator), silica-on-silicon, III-V semiconductors, lithium niobate, and polymers, have been extensively investigated due to their potentials of providing a platform for the optical integration. Polymer materials present several advantages, such as low-cost production, fast prototyping, and versatility to incorporate other dielectric and metal materials. In addition, polymers possess both high thermo-optic coefficient and low thermal conductivity [1], wh ich makes them ideal to realize thermally tunable devices, such as variable optical attenuators [2], digital optical switches [3, 4], tunable filters [5], and so on. The thermo-optic coefficient (TOC) of polymer materials is on the order of -1.0 to -3.0 ×10

10 citations

Proceedings ArticleDOI
01 Nov 2015
TL;DR: In this paper, the authors investigated wet chemical etching and plasma etching techniques for the generation of a suspended membrane and spray pyrolysis and sputtering for the deposition of a tin oxide gas sensing layer.
Abstract: The integration of gas sensor components into wearable electronics will provide individuals the ability to detect harmful chemicals and pollutants in the environment. The key to this integration is the development of processing techniques for the fabrication of sensor components which can be incorporated into the conventional CMOS fabrication sequence. This includes the etching required for the formation of a suspended membrane on top of which the microheater and sensing layer are placed and the deposition of the metal oxide sensing layer itself. Recently, spray pyrolysis has been investigated as a possible metal oxide deposition approach which is economical, easy to implement, and provides good step coverage for trench geometries. This work investigates wet chemical etching and plasma etching techniques for the generation of a suspended membrane and the spray pyrolysis and sputtering techniques for the deposition of a tin oxide gas sensing layer.

10 citations

Patent
16 Jun 1998
TL;DR: In this paper, a hot wire type microheater formed by the semiconductor microprocessing technology is composed of an Si substrate 10, SiO2 insulation film 11 formed on the top face of the Si substrate, heater 12 provided on the insulation film, first SiO 2 protective film covering the surface including the heater 12, Si3N4 reinforced part 14 located above the heater, and heat insulating cavity 16.
Abstract: PROBLEM TO BE SOLVED: To provide a hot wire type microheater having a durability enough against a high temp. of about 500°C in operation. SOLUTION: The hot wire type microheater formed by the semiconductor microprocessing technology is composed of an Si substrate 10, SiO2 insulation film 11 formed on the top face of the Si substrate 10, heater 12 provided on the insulation film 11, first SiO2 protective film 13 covering the surface including the heater 12, Si3N4 reinforced part 14 located above the heater for suppressing the displacement of the heater, and heat insulating cavity 16. According to the hot wire type microheater, it is possible to obtain a hot wire type microheater which has a high durability and allows the working time to be greatly prolonged, compared with the hot wire type microheater in prior art. COPYRIGHT: (C)2000,JPO

10 citations

Journal ArticleDOI
TL;DR: In this paper, a thin film silver/titanium microheater with a four-point probe, double spiral geometry for MEMS applications was fabricated on a silica glass substrate.

10 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
202332
202275
202138
202053
201937
201852