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Microheater

About: Microheater is a research topic. Over the lifetime, 814 publications have been published within this topic receiving 12478 citations.


Papers
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Patent
24 Mar 2004
TL;DR: In this paper, a thermal printing operation is performed by applying a variable voltage or current between the two metal wires in order to heat the microheater to a predetermined temperature, and the wires are disposed on two sides of the heating surface of the body.
Abstract: A thermal printing device includes a substrate, an insulation layer on the substrate, and a plurality of microheaters on the insulation layer. Two adjacent ones of the microheaters are separated by a trench. Each of the microheaters includes a body having a heating surface, and two metal wires disposed on two sides of the heating surface of the body. A thermal printing operation is performed by applying a variable voltage or current between the two metal wires in order to heat the microheater to a predetermined temperature.

8 citations

Journal ArticleDOI
TL;DR: In this article, a temperature management system for a deformable mirrors of piezo-actuated display package (PADP) is described, where a temperature control system using a microheater and a temperature feedback circuit is developed.
Abstract: This paper describes a temperature management system for a deformable mirrors of piezo-actuated display package (PADP). This package which is integrated in microbeam projectors is used in portable devices such as cellphones, laptops, and personal digital assistants (PDAs), to name a few. Ambient temperature change is a critical factor affecting the performance of PADP. To reduce this effect of ambient temperature change, a temperature control system using a microheater and a temperature feedback circuit is developed. A computational model of the transient thermal analysis for the feedback control system is also developed. The obtained theoretical results are in a good agreement with the experimental measurements. Under this controlled system, the magnitude of the temperature fluctuation is reduced by ±0.5 °C. In order to enhance the performance of the developed system, various values of the temperature sensor resistance are used, leading to a reduction of about 10% of the temperature fluctuation.

8 citations

Journal ArticleDOI
TL;DR: In this article, the authors describe the simulation, fabrication, and feedback control of a microheater array designed for the implementation of real-time control during thermal evolution of microstructure.
Abstract: This paper describes the simulation, fabrication, and feedback control of a microheater array designed for the implementation of real-time control during thermal evolution of microstructure. The ten-channel heating array was designed through finite element simulation and microfabricated to be compatible with in situ imaging in a scanning electron microscope. Control algorithms are implemented that demonstrate cooperative control of the temperature (using calibrated Ti heater line resistances as a proxy) across the set of channels in the array. The goal of this system is to be able to generate controlled thermal, and thus microstructural, and property distribution during processing of polycrystalline materials.

8 citations

Journal ArticleDOI
TL;DR: Pulsed laser deposition with nanosecond and picosecond lasers has been used to deposit novel nanostructured gas sensitive WO 3, SnO 2 layers, and V 2 O 5 layers, with and without noble metal additives, on SGX Sensortech SA MEMS microheater platforms as discussed by the authors.

8 citations

Journal ArticleDOI
TL;DR: The theoretical model of thermotaxis developed here furthers the understanding of the function of a cell as a thermal and chemical sensor and offers a fundamental new experimental tool with which to explore the interaction of cellular systems with their thermal microenvironment.
Abstract: While the cellular interaction with the chemical microenvironment has been studied in detail in the past, the effect of thermal signals and gradients on cells is not well understood. While almost all biological macrosystems exhibit temperature sensitivity, this has not been studied much at the cellular level. The capability of precise control of temperature and heat flux at the scale of a few microns using microfabricated structures makes microelectromechanical systems (MEMS) ideal for investigating these effects. This work describes a MEMS-based microheater platform capable of subjecting surface-adhered cells to microscale temperature gradients. This microdevice comprises a free-standing thin film based microheater platform. The design and microfabrication of this microdevice are described. A thermal conduction model is developed in order to thermally characterize the microheater platform. Protocols for culturing cells on the microheater platform are developed, making it possible to adhere cells on the microheater surface and subject them to a desired spatial temperature gradient. Experiments demonstrating the spatial control of cell viability using the microheater device are described. This is followed by experiments that explore the possibility of cellular growth in response to thermal gradients, similar to chemotaxis. Thermotactic effect is well known at the organismal level. However, cells used in this work did not exhibit any thermotactic effect. A theoretical model for predicting cell response to a spatial temperature gradient in its microenvironment is proposed. The model is based on the effect of the temperature gradient on the chemical sensory process of the cell. The model predicts that in addition to the thermal gradient, the thermotactic effect also depends on a number of other parameters that have not been well characterized in the past. The microheater platform described in this work offers a fundamental new experimental tool with which to explore the interaction of cellular systems with their thermal microenvironment. The theoretical model of thermotaxis developed here furthers the understanding of the function of a cell as a thermal and chemical sensor.

8 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
202332
202275
202138
202053
201937
201852