Microheater

About: Microheater is a research topic. Over the lifetime, 814 publications have been published within this topic receiving 12478 citations.

Evaluation of thermal conduction of single carbon nanotube by local heating in air

Abstract: We evaluated thermal conduction of a single carbon nanotube (CNT) in air. Heating the end of the CNT locally by a microheater, we measured temperature dependence of electrical resistance of the single CNT. First, we fabricated the microheater for local heating and four electrodes for electrical resistance measurement on a Silicon on Insulator (SOI) wafer and made a gap for heat insulation. The effectiveness of the SOI wafer and the gap was confirmed by FEM analysis. Next, the single CNT was manipulated on this pattern by nanomanipulation and fixed by Electron-Beam-Induced-Deposition (EBID) in the Scanning Electron Microscope (SEM). Finally, we measured the electrical resistance when the temperature of the microheater was changed by applying the voltage. As a result, we could evaluate the thermal conduction of a specific single CNT in air. This paper also indicates the possibility of using a single CNT as a temperature sensor.

Laser-Deposited Carbon Aerogel Derived from Graphene Oxide Enables NO2-Selective Parts-per-Billion Sensing.

Abstract: Laser-deposited carbon aerogel is a low-density porous network of carbon clusters synthesized using a laser process. A one-step synthesis, involving deposition and annealing, results in the formation of a thin porous conductive film which can be applied as a chemiresistor. This material is sensitive to NO2 compared to ammonia and other volatile organic compounds and is able to detect ultra-low concentrations down to at least 10 parts-per-billion. The sensing mechanism, based on the solubility of NO2 in the water layer adsorbed on the aerogel, increases the usability of the sensor in practically-relevant ambient environments. A heating step, achieved in tandem with a microheater, allows the recovery to the baseline making it operable in real world environments. The operability at room temperature, its low cost and scalable production makes it promising for Internet-of-Things air quality monitoring.

A Miniaturized Tunable Filter Based on a Fiber Bragg Grating Loaded by a Ceramic-Tube Microheater

Abstract: A miniaturized 1.55 μm tunable fiber Bragg grating (FGB) filter is proposed and successfully demonstrated using an aluminum ceramic-tube with a tungsten thick film sleeve microheater. Fine tuning of the Bragg reflective wavelength with 0.0135 nm/oC is achieved by adding the constant thermal distribution along the uniform FBG with a 0.3 nm bandwidth. Furthermore, a 1.5 nm linearly chirped reflection bandwidth is obtained by thermal gradient loading.

Nearly Perfect Polycrystalline, Large-Grained Silicon Arrays Formed at Low-Temperature Ambient by Local Pyrolysis

Abstract: We report low-temperature ambient synthesis of high-quality, several micrometer thick polycrystalline silicon arrays on soda lime glass substrates by local pyrolysis, where SiH4 gas is locally decomposed near and condensed on the resistively heated microheater arrays with an average growth rate of 50 nm/s. The silicon arrays had nearly perfect crystallinity and a minimum grain size larger than 0.2 μm, as determined by spatially resolved Raman spectroscopy and transmission electron microscopy. Boron-doped silicon arrays by the local pyrolysis was further fabricated to yield concentric p-i-n heterojunction arrays with rectifying current–voltage or photovoltaic characteristics.