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Microheater

About: Microheater is a research topic. Over the lifetime, 814 publications have been published within this topic receiving 12478 citations.


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Journal ArticleDOI
TL;DR: In this paper, a simple process using a silicon-on-isolator (SOI) wafer was used to fabricate a siliconbased vertical microheater to generate thermal bubbles for the applications in microfluidic systems.
Abstract: This paper presents a simple process using a silicon-on-isolator (SOI) wafer to fabricate a silicon-based vertical microheater to generate thermal bubbles for the applications in microfluidic systems. The fabrication process consists of only two photolithography masks that provide an effective way of manufacturing a resistive bulk microheater and a high-aspect-ratio microchannel. The electrothermal property of the proposed microheater has been characterized and verified by finite-element analysis and experiment. According to the design concept and experimental results, the largest temperature occurred at the smallest neck section due to the nonuniform property of the resistance along the length of the arch-type microheater, and thus, the vapor bubble was generated and attached to the vertical sidewall of the microheater. For a typical microheater design, bubble nucleation could be generated under a applied voltage of 5 V, and the bubble could obstruct the entire 100 mum width of the microchannel when the applied voltage reaches 8 V. A switching test has showed that the silicon-based microheater has a good thermal resistance behavior for long-term reliability and that the modulation of output flow rate is easily handled by the sizes of the thermal bubbles. Moreover, the bubble can be formed with a steady growth, even when the maximum fluid velocity is larger than 920 mum/s in a microchannel with a rectangular cross section 100 mum wide and 50 mum high. These results reveal that the microfluid gate presented here is well designed and that bubble sizes are stable and controllable.

7 citations

Journal ArticleDOI
TL;DR: In this paper, a low power methane gas sensor with microheater was fabricated by silicon bulk micromachining technology and a platinum micro heater was embedded in the gas sensor.
Abstract: A low power methane gas sensor with microheater was fabricated by silicon bulk micromachining technology. In order to heat up the sensing layer to operating temperature, a platinum (Pt) micro heater was embedded in the gas sensor. The line width and gap of the microheater was 20 and 4.5 , respectively. Zinc oxide (ZnO) nanowhisker arrays were grown on a sensor from a ZnO seed layer using a hydrothermal method. A 200 ml aqueous solution of 0.1 mol zinc nitrate hexahydrate, 0.1 mol hexamethylenetetramine, and 0.02 mol polyethylenimine was used for growing ZnO nanowhiskers. Temperature distribution of the sensor was analyzed by infrared thermal camera. The optimum temperature for highest sensitivity was found to be although relatively high (64%) sensitivity was obtained even at as low a temperature as . The power consumption was 72 mW at , and only 25 mW at .

7 citations

Journal ArticleDOI
TL;DR: An approach for the realization of coupled-mode induced transparency (CMIT) in a hybrid polydimethylsiloxane (PDMS)-coated silica microbubble resonator, with an Au microwire inserted in the hollow channel is demonstrated.
Abstract: We demonstrate an approach for the realization of coupled-mode induced transparency (CMIT) in a hybrid polydimethylsiloxane (PDMS)-coated silica microbubble resonator, with an Au microwire inserted in the hollow channel. Owing to the large negative thermo-optics coefficient of PDMS, different radial order modes with opposite thermal sensitivities can coexist in this hybrid microcavity. By applying a current through the Au microwire, which acts as a microheater, the generated Ohmic heating could thermally tune the resonance frequencies and the frequency detuning of the coupled mode to achieve controllable CMIT. This platform offers an efficient and convenient way to obtain controllable CMIT for applications, such as label-free biosensing and quantum information processing.

7 citations

Proceedings ArticleDOI
01 Dec 2010
TL;DR: In this paper, the optimized sputtering conditions required for successful deposition of nichrome thin film and fabrication of microheaters over a biocompatible polymer PDMS, for biomedical application were discussed.
Abstract: Nichrome (Ni - Cr 80/20 wt %) is one of the most widely used thin film material for the development of micro heaters in various applications Present paper discusses the optimized sputtering conditions required for successful deposition of nichrome thin film and fabrication of microheaters over a biocompatible polymer PDMS, for biomedical application Various sputtering conditions like the base vacuum, working pressure, sputtering power and time were standardized to obtain crack free nichrome thin film deposition over PDMS and glass surface Microheaters were fabricated using the conventional photolithography technique and the resulting structures were used to measure temperature coefficient of resistance (TCR) of nichrome Measured sheet resistance and TCR of the crack free deposited nichrome thin film over PDMS surface were 362 Ω/ and 713 ppm/°C respectively

7 citations

Journal ArticleDOI
TL;DR: In this paper, the fabrication of inexpensive, biocompatible and transparent substrate for rapid prototyping is reported, which is composed of polymethylmetacrylate (PMMA) as substrate, aluminum (Al) as conductive material and a light cure acrylic bi-compatible adhesive to perform the bonding between the aluminum and the substrate.

7 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
202332
202275
202138
202053
201937
201852