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Microheater

About: Microheater is a research topic. Over the lifetime, 814 publications have been published within this topic receiving 12478 citations.


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Patent
17 Oct 2012
TL;DR: In this article, a three-dimensional microheater with an arc groove heating membrane area and a manufacturing method was described, where a resistive heater is arranged in the groove of the heating membrane in a broken line or curve form and an electrode on the lining frame through a lead wire on the support cantilever beam.
Abstract: The invention relates to a three-dimensional microheater with an arc groove heating membrane area and a manufacturing method thereof. The three-dimensional microheater is characterized in that: the groove heating membrane area of which the cross section is an arc is connected with a lining frame through a support cantilever beam; a resistive heater is arranged in the groove of the heating membrane in a broken line or curve form and is connected with an electrode on the lining frame through a lead wire on the support cantilever beam; and a heat insulating cavity is positioned under the heatingmembrane area and the support cantilever beam. The resistive heater of the heater is arranged in the groove of the central heating membrane area with the three-dimensional structure, heat loss due toconvection heat exchange is smaller and the power consumption of the heater can be effectively reduced. The arc-structure groove heating membrane area avoids corners, so the heat stress is uniformly distributed in the heating membrane area, and the mechanical strength of the heater at high temperature is improved.

5 citations

Proceedings ArticleDOI
06 May 2015
TL;DR: In this paper, the design and electro-thermo-mechanical analysis of molybdenum microheaters suitable for high temperature exhaust gas sensors were considered for simulation.
Abstract: Microheaters play a vital role in gas sensor applications. Exhaust gas sensors need high temperature microheaters to heat sensing films uniformly at low powers. In this paper, we present design and electro-thermo-mechanical analysis of molybdenum microheaters suitable for high temperature exhaust gas sensors. Double-spiral (DS), double-meander (DM), cross-meander (CS), modified-S (MS) and modified double spiral (MDS) shape structures were considered for simulation. The geometry of the resistive structure was optimized to improve temperature uniformity over a heating area of 500 × 500 µm2. Simulations show that the microheater consumed 83.65 mW power to reach a maximum temperature of 800 °C with a temperature gradient of 8.2°C. Structural deformation of the microheater membrane was studied to determine its stability and reliability under high thermal stresses. The maximum membrane deformation was found to be 15.25 µm at 800°C. Platinum, tungsten and molybdenum microheaters were compared in terms of their power consumption, temperature gradient and membrane deformations.

5 citations

Journal ArticleDOI
TL;DR: A thermally controlled dust capturing scheme by integrating a polystyrene (PS) layer and microheater on quartz crystal microbalance (QCM) was introduced in this article . But, it is not suitable for outdoor applications.

5 citations

Journal ArticleDOI
TL;DR: In this paper, a microheater array with a target temperature of 400°C and a response time of less than 1 ms for the powder sintering process is presented.
Abstract: Microheater Array Powder Sintering (MAPS) is a novel additive manufacturing process that uses a microheater array to replace the laser of selective laser sintering as the energy source. Most of the previous research on microheaters is for applications in gas sensing or inkjet printing. The operation temperature and response time of the microheater array are critical for the choice of sintering materials and printing speed for the MAPS process. This paper presents the fabrication, packaging, and control of a platinum microheater array that has a target operation temperature of 400 °C and a response time of ~ 1 ms for the MAPS process. First, the fabrication process of a microheater array is presented. The fabricated microheater array was packaged for easy control and to serve as the printhead of the MAPS process. A proportional-integral-derivative controller was designed to control the temperature response of the microheater. Finally, the effectiveness of the controller was evaluated. Results show the fabricated microheater array is capable of reaching the target temperature of 400 °C and has a thermal response time of less than 1 ms, which satisfies the design requirements for the MAPS process.

5 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
202332
202275
202138
202053
201937
201852