Microheater

About: Microheater is a research topic. Over the lifetime, 814 publications have been published within this topic receiving 12478 citations.

Microheater, its manufacture, and gas sensor

Abstract: PURPOSE: To provide a microheater with excellent insulating property and good heating efficiency, a method for manufacturing it, and a gas sensor using this microheater. CONSTITUTION: In a microheater provided with a base, a thin plate part formed on the base, and a heating electrode, the base 2 has a cavity part 3, and the heating electrode 5 is formed in the cavity part 3 inner part which is the reverse side of the thin plate part 4. The heating electrode 5 is formed by ion implantation to the base 2 and etching. Further, the microheater 1 is preferably provided with a gas sensing material on the surface of the thin plate part 4.

Efficient Thermal Tuning Employing Metallic Microheater With Slow-Light Effect

Abstract: Thermal tuning acts as one of the most fundamental roles in integrated silicon photonics since it can provide flexibility and reconfigurability. Low tuning power and fast tuning speed are long-term pursuing goals in terms of the performance of the thermal tuning. Here, we propose and experimentally demonstrate an efficient thermal tuning scheme employing the metallic metal heater. The slow-light effect in the photonic crystal waveguide is employed to enhance the performance of the metal microheater. Meanwhile, the metal microheater is integrated on the side of the waveguide rather than on the top. Thanks to both the slow-light effect and the side-integrated microheater, the tuning efficiency is significantly enhanced, and the response time as fast as 2 $\mu \text{s}$ is obtained. Since the thermal tuning with metal heater has been widely applied in silicon photonics, the proposed scheme may provide a valuable solution towards the performance enhancement of the thermal tuning in silicon photonics.

A Highly-Sensitive Differential-Mode Microchemical Sensor Using TFBARs with On-Chip Microheater for Volatile Organic Compound (VOC) Detection

Abstract: In this paper, we first report the microchemical sensor application of differential-mode Thin Film Bulk Acoustic Resonators (TFBARs) for Volatile Organic Compound (VOC) detection Using the micro heater element, the membrane temperature of TFBARs can be increased up to 250 oC Generally, VOCs are decomposed to CO and CO 2 at the temperature of above 200oC, the additional reference oscillator without VOC adsorption can be simply realized by heating the membrane The RF signal mixer is used to determine the shift in oscillation frequency between sensing and reference oscillators The frequency responses and sensitivities to benzene, ethanol, and formaldehyde are tested and presented, respectively

Heavily-Doped Bulk Silicon Sidewall Electrodes Embedded between Free-Hanging Microfluidic Channels by Modified Surface Channel Technology.

Abstract: Surface Channel Technology is known as the fabrication platform to make free-hanging microchannels for various microfluidic sensors and actuators. In this technology, thin film metal electrodes, such as platinum or gold, are often used for electrical sensing and actuation purposes. As a result that they are located at the top surface of the microfluidic channels, only topside sensing and actuation is possible. Moreover, in microreactor applications, high temperature degradation of thin film metal layers limits their performance as robust microheaters. In this paper, we report on an innovative idea to make microfluidic devices with integrated silicon sidewall electrodes, and we demonstrate their use as microheaters. This is achieved by modifying the original Surface Channel Technology with optimized mask designs. The modified technology allows to embed heavily-doped bulk silicon electrodes in between the sidewalls of two adjacent free-hanging microfluidic channels. The bulk silicon electrodes have the same electrical properties as the extrinsic silicon substrate. Their cross-sectional geometry and overall dimensions can be designed by optimizing the mask design, hence the resulting resistance of each silicon electrode can be customized. Furthermore, each silicon electrode can be electrically insulated from the silicon substrate. They can be designed with large cross-sectional areas and allow for high power dissipation when used as microheater. A demonstrator device is presented which reached 119.4 ∘ C at a power of 206.9 m W , limited by thermal conduction through the surrounding air. Other potential applications are sensors using the silicon sidewall electrodes as resistive or capacitive readout.