MOSFET

About: MOSFET is a research topic. Over the lifetime, 24833 publications have been published within this topic receiving 400258 citations. The topic is also known as: metal–oxide–semiconductor field-effect transistor.

Design of ion-implanted MOSFET's with very small physical dimensions

Abstract: This paper considers the design, fabrication, and characterization of very small Mosfet switching devices suitable for digital integrated circuits, using dimensions of the order of 1 /spl mu/. Scaling relationships are presented which show how a conventional MOSFET can be reduced in size. An improved small device structure is presented that uses ion implantation, to provide shallow source and drain regions and a nonuniform substrate doping profile. One-dimensional models are used to predict the substrate doping profile and the corresponding threshold voltage versus source voltage characteristic. A two-dimensional current transport model is used to predict the relative degree of short-channel effects for different device parameter combinations. Polysilicon-gate MOSFET's with channel lengths as short as 0.5 /spl mu/ were fabricated, and the device characteristics measured and compared with predicted values. The performance improvement expected from using these very small devices in highly miniaturized integrated circuits is projected.

FinFET-a self-aligned double-gate MOSFET scalable to 20 nm

Abstract: MOSFETs with gate length down to 17 nm are reported To suppress the short channel effect, a novel self-aligned double-gate MOSFET, FinFET, is proposed By using boron-doped Si/sub 04/Ge/sub 06/ as a gate material, the desired threshold voltage was achieved for the ultrathin body device The quasiplanar nature of this new variant of the vertical double-gate MOSFETs can be fabricated relatively easily using the conventional planar MOSFET process technologies

Silicon-on-Insulator Technology: Materials to VLSI

Abstract: 1 Introduction.- 2 SOI Materials.- 2.1 Introduction.- 2.2 Heteroepitaxial techniques.- 2.2.1 Silicon-on-Sapphire (SOS).- 2.2.2 Other heteroepitaxial SOI materials.- 2.2.2.1 Silicon-on-Zirconia (SOZ).- 2.2.2.2 Silicon-on-Spinel.- 2.2.2.3 Silicon on Calcium Fluoride.- 2.3 Dielectric Isolation (DI).- 2.4 Polysilicon melting and recrystallization.- 2.4.1 Laser recrystallization.- 2.4.2 E-beam recrystallization.- 2.4.3 Zone-melting recrystallization.- 2.5 Homoepitaxial techniques.- 2.5.1 Epitaxial lateral overgrowth.- 2.5.2 Lateral solid-phase epitaxy.- 2.6 FIPOS.- 2.7 Ion beam synthesis of a buried insulator.- 2.7.1 Separation by implanted oxygen (SIMOX).- 2.7.1.1 "Standard"SIMOX.- 2.7.1.2 Low-dose SIMOX.- 2.7.1.3 ITOX.- 2.7.1.4 SMOXMLD.- 2.7.1.5 Related techniques.- 2.7.1.6 Material quality.- 2.7.2 Separation by implanted nitrogen (SIMNI).- 2.7.3 Separation by implanted oxygen and nitrogen (SIMON).- 2.7.4 Separation by implanted Carbon.- 2.8 Wafer Bonding and Etch Back (BESOI).- 2.8.1 Hydrophilic wafer bonding.- 2.8.2 Etch back.- 2.9 Layer transfer techniques.- 2.9.1 Smart-Cut(R).- 2.9.1.1 Hydrogen / rare gas implantation.- 2.9.1.2 Bonding to a stiffener.- 2.9.1.3 Annealing.- 2.9.1.4 Splitting.- 2.9.1.5 Further developments.- 2.9.2 Eltran(R).- 2.9.2.1 Porous silicon formation.- 2.9.2.2 The original Eltran(R) process.- 2.9.2.3 Second-generation Eltran(R) process.- 2.9.3 Transferred layer material quality.- 2.10 Strained silicon on insulator (SSOI).- 2.11 Silicon on diamond.- 2.12 Silicon-on-nothing (SON).- 3 SOI Materials Characterization.- 3.1 Introduction.- 3.2 Film thickness measurement.- 3.2.1 Spectroscopic reflectometry.- 3.2.2 Spectroscopic ellipsometry.- 3.2.3 Electrical thickness measurement.- 3.3 Crystal quality.- 3.3.1 Crystal orientation.- 3.3.2 Degree of crystallinity.- 3.3.3 Defects in the silicon film.- 3.3.3.1 Most common defects.- 3.3.3.2 Chemical decoration of defects.- 3.3.3.3 Detection of defects by light scattering.- 3.3.3.4 Other defect assessment techniques.- 3.3.3.5 Stress in the silicon film.- 3.3.4 Defects in the buried oxide.- 3.3.5 Bond quality and bonding energy.- 3.4 Carrier lifetime.- 3.4.1 Surface Photovoltage.- 3.4.2 Photoluminescence.- 3.4.3 Measurements on MOS transistors.- 3.4.3.1 Accumulation-mode transistor.- 3.4.3.2 Inversion-mode transistor.- 3.4.3.3 Bipolar effect.- 3.5 Silicon/Insulator interfaces.- 3.5.1 Capacitance measurements.- 3.5.2 Charge pumping.- 3.5.3 ?-MOSFET.- 4 SOI CMOS Technology.- 4.1 SOI CMOS processing.- 4.1.1 Fabrication yield and fabrication cost.- 4.2 Field isolation.- 4.2.1 LOCOS.- 4.2.2 Mesa isolation.- 4.2.3 Shallow trench isolation.- 4.2.4 Narrow-channel effects.- 4.3 Channel doping profile.- 4.4 Source and drain engineering.- 4.4.1 Silicide source and drain.- 4.4.2 Elevated source and drain.- 4.4.3 Tungsten clad.- 4.4.4 Schottky source and drain.- 4.5 Gate stack.- 4.5.1 Gate material.- 4.5.2 Gate dielectric.- 4.5.3 Gate etch.- 4.6 SOI MOSFET layout.- 4.6.1 Body contact.- 4.7 SOI-bulk CMOS design comparison.- 4.8 ESD protection.- 5 The SOI MOSFET.- 5.1 Capacitances.- 5.1.1 Source and drain capacitance.- 5.1.2 Gate capacitance.- 5.2 Fully and partially depleted devices.- 5.3 Threshold voltage.- 5.3.1 Body effect.- 5.3.2 Short-channel effects.- 5.4 Current-voltage characteristics.- 5.4.1 Lim & Fossum model.- 5.4.2 C?-continuous model.- 5.5 Transconductance.- 5.5.1 gm/ID ratio.- 5.5.2 Mobility.- 5.6 Basic parameter extraction.- 5.6.1 Threshold voltage and mobility.- 5.6.2 Source and drain resistance.- 5.7 Subthreshold slope.- 5.8 Ultra-thin SOI MOSFETs.- 5.8.1 Threshold voltage.- 5.8.2 Mobility.- 5.9 Impact ionization and high-field effects.- 5.9.1 Kink effect.- 5.9.2 Hot-carrier degradation.- 5.10 Floating-body and parasitic BJT effects.- 5.10.1 Anomalous subthreshold slope.- 5.10.2 Reduced drain breakdown voltage.- 5.10.3 Other floating-body effects.- 5.11 Self heating.- 5.12 Accumulation-mode MOSFET.- 5.12.1 I-V characteristics.- 5.12.2 Subthreshold slope.- 5.13 Unified body-effect representation.- 5.14 RF MOSFETs.- 5.15 CAD models for SOI MOSFETs.- 6 Other SOI Devices.- 6.1 Multiple-gate SOI MOSFETs.- 6.1.1 Multiple-gate SOI MOSFET structures.- 6.1.1.1 Double-gate SOI MOSFETs.- 6.1.1.2 Triple-gate SOI MOSFETs.- 6.1.1.3 Surrounding-gate SOI MOSFETs.- 6.1.1.4 Triple-plus gate SOI MOSFETs..- 6.1.2 Device characteristics.- 6.1.2.1 Current drive.- 6.1.2.2 Short-channel effects.- 6.1.2.3 Threshold voltage.- 6.1.2.4 Volume inversion.- 6.1.2.5 Mobility.- 6.2 MTCMOS/DTMOS.- 6.3 High-voltage devices.- 6.3.1 VDMOS and LDMOS.- 6.3.2 Other high-voltage devices.- 6.4 Junction Field-Effect Transistor.- 6.5 Lubistor.- 6.6 Bipolar junction transistors.- 6.7 Photodiodes.- 6.8 G4 FET.- 6.9 Quantum-effect devices.- 7 The SOI MOSFET in a Harsh Environment.- 7.1 Ionizing radiations.- 7.1.1 Single-event phenomena.- 7.1.2 Total dose effects.- 7.1.3 Dose-rate effects.- 7.2 High-temperature operation.- 7.2.1 Leakage current.- 7.2.2 Threshold voltage.- 7.2.3 Output conductance.- 7.2.4 Subthreshold slope.- 8 SOI Circuits.- 8.1 Introduction.- 8.2 Mainstream CMOS applications.- 8.2.1 Digital circuits.- 8.2.2 Low-voltage, low-power digital circuits.- 8.2.3 Memory circuits.- 8.2.3.1 Non volatile memory devices.- 8.2.3.2 Capacitorless DRAM.- 8.2.4 Analog circuits.- 8.2.5 Mixed-mode circuits.- 8.3 Niche applications.- 8.3.1 High-temperature circuits.- 8.3.2 Radiation-hardened circuits.- 8.3.3 Smart-power circuits.- 8.4 Three-dimensional integration.

Tunneling Field-Effect Transistors (TFETs) With Subthreshold Swing (SS) Less Than 60 mV/dec

Abstract: We have demonstrated a 70-nm n-channel tunneling field-effect transistor (TFET) which has a subthreshold swing (SS) of 52.8 mV/dec at room temperature. It is the first experimental result that shows a sub-60-mV/dec SS in the silicon-based TFETs. Based on simulation results, the gate oxide and silicon-on-insulator layer thicknesses were scaled down to 2 and 70 nm, respectively. However, the ON/ OFF current ratio of the TFET was still lower than that of the MOSFET. In order to increase the on current further, the following approaches can be considered: reduction of effective gate oxide thickness, increase in the steepness of the gradient of the source to channel doping profile, and utilization of a lower bandgap channel material

Ge/Si nanowire heterostructures as high-performance field-effect transistors

Abstract: Field-effect transistors (FETs) based on semi-conductor nanowires could one day replace standard silicon MOSFETs in miniature electronic circuits. MOSFETs, or metal-oxide semiconductor field-effect transistors, are a type of transistor used for high-speed switching and in a computer's integrated circuits. A specially designed nanowire with a germanium shell and silicon core has shown promise as a nanometre-scale field-effect transistor: it has a near-perfect channel for electronic conduction. Now, in transistor configuration, this germanium/silicon nanowire is shown to have properties including high conductance and short switching time delay that are better than state-of-the-art silicon MOSFETs. In a transistor configuration, a new germanium/silicon nanowire has characteristics such as conductance, on-current and switching time delay that are better than those of state-of-the-art silicon metal-oxide-semiconductor field-effect transitors. Semiconducting carbon nanotubes1,2 and nanowires3 are potential alternatives to planar metal-oxide-semiconductor field-effect transistors (MOSFETs)4 owing, for example, to their unique electronic structure and reduced carrier scattering caused by one-dimensional quantum confinement effects1,5. Studies have demonstrated long carrier mean free paths at room temperature in both carbon nanotubes1,6 and Ge/Si core/shell nanowires7. In the case of carbon nanotube FETs, devices have been fabricated that work close to the ballistic limit8. Applications of high-performance carbon nanotube FETs have been hindered, however, by difficulties in producing uniform semiconducting nanotubes, a factor not limiting nanowires, which have been prepared with reproducible electronic properties in high yield as required for large-scale integrated systems3,9,10. Yet whether nanowire field-effect transistors (NWFETs) can indeed outperform their planar counterparts is still unclear4. Here we report studies on Ge/Si core/shell nanowire heterostructures configured as FETs using high-κ dielectrics in a top-gate geometry. The clean one-dimensional hole-gas in the Ge/Si nanowire heterostructures7 and enhanced gate coupling with high-κ dielectrics give high-performance FETs values of the scaled transconductance (3.3 mS µm-1) and on-current (2.1 mA µm-1) that are three to four times greater than state-of-the-art MOSFETs and are the highest obtained on NWFETs. Furthermore, comparison of the intrinsic switching delay, τ = CV/I, which represents a key metric for device applications4,11, shows that the performance of Ge/Si NWFETs is comparable to similar length carbon nanotube FETs and substantially exceeds the length-dependent scaling of planar silicon MOSFETs.