Topic
Nozzle
About: Nozzle is a research topic. Over the lifetime, 158675 publications have been published within this topic receiving 893026 citations. The topic is also known as: spout.
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Patent•
17 Jul 2003
TL;DR: In this article, a gas distributing system and a method of operating the distributing system is provided, which automatically adjusts the distribution of plasma gas inside a wafer processing chamber during a dry etching or a film deposition process.
Abstract: A gas distributing system and a method of operating the distributing system is provided. After setting a few control valve parameters, the gas distributing system automatically adjusts the distribution of plasma gas inside a wafer processing chamber during a dry etching or a film deposition process so that uniform single wafer is produced. First, a main gas conduit is redirected into two separate gas conduit inside a gas separator. One conduit connects with a gas nozzle near the central region of an upper electrode panel distributor and the other conduit connects with a gas nozzle near the peripheral region of the upper electrode panel distributor. An O-ring between the central region and the peripheral region prevents any mixing of gas from the nozzles in these two regions. Gas distribution inside the reaction chamber can be changed to meet the need of different processing conditions by adjusting the flow control valves mounted on the two conduits.
83 citations
TL;DR: In this article, effects of torch structure, gas feeding, and characteristics of power supply on the length of laminar plasma jets were experimentally examined, and the influence of flow turbulence at the torch, nozzle exit on the temperature distribution of plasma jets was numerically simulated.
Abstract: Long, laminar plasma jets at atmospheric pressure of pure argon and a mixture of argon and nitrogen with jet length up to 45 fi,Hes its diameter could be generated with a DC are torch by! restricting the movement of arc root in the torch channel. Effects of torch structure, gas feeding, and characteristics of power supply on the length of plasma jets were experimentally examined. Plasma jets of considerable length and excellent stability could be obtained by regulating the generating parameters, including are channel geometry gas flow I ate, and feeding methods, etc. Influence of flow turbulence at the torch,nozzle exit on the temperature distribution of plasma jets was numerically simulated. The analysis indicated that laminar flow plasma with very low initial turbulent kinetic energy will produce a long jet, with low axial temperature gradient. This kind of long laminar plasma jet could greatly improve the controllability for materials processing, compared with a short turbulent are let.
83 citations
TL;DR: In this article, the experimental and CFD study on the mass flow-rate characteristic through an orifice-type restrictor in aerostatic bearings was conducted, and the results showed that the Mass Flow Rate through an Orifice is different from that through a nozzle.
83 citations
TL;DR: In this paper, a propagation-based X-ray phase contrast imaging technique was applied to compare the transient needle motion and near-nozzle flow characteristics of single and multi-hole injectors.
83 citations
Patent•
21 Jul 1993TL;DR: In this paper, a checkvalve is provided in the purge hole for preventing backflow therethrough into the turbine vane, which allows a reduction in cooling air through the vane at low power operation for increasing efficiency while preventing back-flow of combustion gases into the purification hole.
Abstract: A turbine nozzle includes a vane integrally joined between outer and inner bands, with the inner band having a purge hole for discharging a portion of cooling air channeled through the vane. A checkvalve is provided in the purge hole for preventing backflow therethrough into the vane. In an exemplary embodiment, the checkvalve allows a reduction in cooling air through the vane at low power operation for increasing efficiency while preventing backflow of combustion gases into the purge hole.
83 citations