Piezoelectric sensor

About: Piezoelectric sensor is a research topic. Over the lifetime, 7127 publications have been published within this topic receiving 115903 citations.

Electrothermally Actuated and Piezoelectrically Sensed Silicon Carbide Tunable MEMS Resonator

Abstract: In this letter, we present the design, fabrication, and electrical testing of a silicon carbide microelectromechanical (MEMS) resonant device with electrothermal actuation and piezoelectric sensing. A doubly clamped flexural-mode beam resonator made of cubic silicon carbide has been fabricated with a top platinum electrothermal actuator and a top lead zirconium titanate piezoelectric sensor. Electrothermal transduction has been used to drive the device into resonance and tune its frequency. Piezoelectric transduction has been used as resonance sensing technique. Electrical measurements have shown that, by increasing the dc bias of the actuating voltage from 1 to 7 V, a tuning range of 171 kHz can be achieved with a device resonating at 1.766 MHz.

Modal control of a plate using a fuzzy logic controller

Abstract: This paper presents fuzzy logic based independent modal space control (IMSC) and fuzzy logic based modified independent modal space control (MIMSC) of vibration. The rule base of the controller consists of nine rules, which have been derived based upon simple human reasoning. Input to the controller consists of the first two modal displacements and velocities of the structure and the output of the controller is the modal force to be applied by the actuator. Fuzzy logic is used in such a way that the actuator is never called to apply effort which is beyond safe limits and also the operator is saved from calculating control gains. The proposed fuzzy controller is experimentally tested for active vibration control of a cantilevered plate. A piezoelectric patch is used as a sensor to sense vibrations of the plate and another piezoelectric patch is used as an actuator to control vibrations of the plate. For analytical formulation, a finite element method based upon Hamilton's principle is used to model the plate. For experimentation, the first two modes of the plate are observed using a Kalman observer. Real-time experiments are performed to control the first mode, the second mode and both modes simultaneously. Experiments are also performed to control the first mode by IMSC, the second mode by IMSC and both modes simultaneously by MIMSC. It is found that for the same decibel reduction in the first mode, the voltage applied by the fuzzy logic based controller is less than that applied by IMSC. While controlling the second mode by IMSC, a considerable amount of spillover is observed in the first mode and region just after the second mode, whereas while controlling the second mode by fuzzy logic, spillover effects are much smaller. While controlling two modes simultaneously, with a single sensor/actuator pair, appreciable resonance control is observed both with fuzzy logic based MIMSC as well as with direct MIMSC, but there is a considerable amount of spillover in the off-resonance region. This may be due to the sub-optimal location and/or an insufficient number of actuators. So, another smart plate with two piezoelectric actuators and one piezoelectric sensor is considered. Piezoelectric patches are fixed in an area where modal strains are high. With this configuration of the smart plate, experiments are conducted to control the first three modes of the plate and it is found that spillover effects are greatly reduced.

Piezoelectric loudspeaker and a method for manufacturing the same

Abstract: Disclosed is a piezoelectric loudspeaker. According to the present invention, a piezoelectric loudspeaker comprises: a flat compound piezoelectric sheet in which multiple piezoelectric devices are arranged in an organic material; electrodes which are provided on respective surfaces of the compound piezoelectric sheet; an acoustic impedance matching support layer for maintaining the flat compound piezoelectric sheet in a curved shape and for matching an acoustic impedance; and a support frame for supporting the compound piezoelectric sheet at its circumference. Thus, sound reproduction with a desirable frequency properties that have little distortion can be performed.

A simple bidirectional linear microactuator for nanopositioning - the "Baltan" microactuator

Abstract: A new linear microactuator, using bulk PZT and electro-discharge-machined components, generates a sliding velocity and force of 100 mm/s and 12 mN, respectively, in either direction, and a peak velocity and force of 212 mm/s and 44 mN, respectively. Using a simple combination of two slightly different beams placed in contact with a slider, and vibrated at two different resonance frequencies, 508 and 522 kHz, by a specially designed, axially vibrating piezoelectric element, bidirectional linear motion was obtained. By simply reducing the length of the applied signal, the sliding distance was reduced to 90 nm /spl plusmn/ 2 nm, which could be improved with a variety of control methods. The design offers not only silent operation, slider clamping upon removal of power, and all of the other advantages of piezoelectric actuators, but also the potential to be further reduced in size to sub-mm/sup 3/ for microrobotics and other applications.