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Piezoelectric sensor

About: Piezoelectric sensor is a research topic. Over the lifetime, 7127 publications have been published within this topic receiving 115903 citations.


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Journal ArticleDOI
TL;DR: In this paper, the authors investigated the possible use of a fuzzy-controlled semi-active isolation system (PSIS), whose seismic response is attenuated by a variable friction damper driven by an embedded piezoelectric actuator.

34 citations

Journal ArticleDOI
TL;DR: In this article, a piezoelectrically actuated microvalve with integrated sensors for flow modulation at low temperatures is presented, which is used to control the flow of a cryogen for distributed cooling.
Abstract: This paper reports on design, fabrication, and testing of a piezoelectrically actuated microvalve with integrated sensors for flow modulation at low temperatures. One envisioned application is to control the flow of a cryogen for distributed cooling with a high degree of temperature stability and a small thermal gradient. The valve consists of a micromachined die fabricated from a silicon-on-insulator wafer, a glass wafer, a commercially available piezoelectric stack actuator, and Macor ceramic encapsulation that has overall dimensions of 1.5 x 1.5 x 1.1 cm3. A piezoresistive pressure sensor and a thin-film Pt resistance temperature detector are integrated on the silicon die. The assembly process allows the implementation of normally open, partially open, and normally closed valves. At room temperature, gas flow modulation from 200 to 0 mL/min is achieved from 0- to 40-V actuation. Flow modulation at various temperatures from room temperature to 205 K is also reported. The pressure sensor has sensitivity of 356 ppm/kPa at room temperature, with temperature coefficient of sensitivity of -6507 ppm/K. The temperature sensor has sensitivity of 0.29 %/K. The valve and the sensors are tested across a wide range of temperatures, and the effect of temperature on performance is discussed.

33 citations

Journal ArticleDOI
TL;DR: The vibration suppression of smart structures using intelligent control strategy is considered and the results obtained are very satisfactory compared to previous investigations of the team.

33 citations

Proceedings ArticleDOI
01 May 1996
TL;DR: In this article, a computer code, IDIMPACT, based on a proposed impact load identification method for identifying both the amount of the impact load and its location in composite plates from distributed build-in piezoelectric sensor measurements is presented.
Abstract: This paper presents a computer code, IDIMPACT, based on a proposed impact load identification method for identifying both the amount of the impact load and its location in composite plates from distributed build-in piezoelectric sensor measurements. The proposed method consists of a system model characterizing the dynamic response of composite plates and of a response comparator estimating the impact location and force history by comparing the sensor measurements with the simulated ones. To verify the computer code and the proposed method, instrumented hammer impact tests were conducted on a 36-inch-by-30-inch composite plate with distributed surface-mounted piezo-ceramic sensors. The computer code was implemented in a PC with data acquisition boards to digitize the sensor measurements. The code would automatically run and graphically display the predicted location and impact force-time history from a monitor. The code has reliably with high accuracy predicted the force and location of every impact event that was tested.© (1996) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

33 citations

Journal ArticleDOI
TL;DR: In this paper, a continuous charge integration technique is used to measure the effective longitudinal piezoelectric coefficient (d33) of thin films, which is performed by applying a static force normal to the films and recording the stress-induced polarization with a charge integrator.
Abstract: A continuous charge integration technique is used to measure the effective longitudinal piezoelectric coefficient (d33) of thin films. Measurements are performed by applying a static force normal to the films and recording the stress-induced polarization with a charge integrator. Measurements for the as-deposited PbZr0.53Ti0.47O3 (PZT) thin films show that the piezoelectric effect is strongly time-dependent and the relaxation is well described by the stretched exponential law. It was demonstrated that the continuous charge integration technique is highly useful for the characterization of the piezoelectric properties of thin films.

33 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
202385
2022134
2021146
2020219
2019251
2018238