Piezoelectric sensor

About: Piezoelectric sensor is a research topic. Over the lifetime, 7127 publications have been published within this topic receiving 115903 citations.

Topology optimization of piezoelectric sensors/actuators for torsional vibration control of composite plates

Abstract: Torsional vibration control can be crucial for applications of smart materials and structures. In this paper, the problem of topology optimization of collocated piezoelectric sensor/actuator (S/A) pairs for torsional vibration control of a laminated composite plate is directly addressed. Both isotropic and anisotropic PZT S/A pairs are considered and it is highlighted that the torsional vibration can be more effectively damped out by employing the topological optimal design of the S/A pairs than by using the conventional designs. To implement this topology optimization, a genetic algorithm (GA) based on a bit-array representation method is presented and a finite element (FE) simulation model based on the first-order shear theory and an output feedback control law is adopted. Numerical experiments are used to verify the present algorithm and show that the present optimal topology design can achieve significantly better active damping effect than the one using a continuously distributed PZT S/A pair, which was often adopted by many other researchers. Together with the progress in laser cutting and micromachining techniques, topology optimization of piezoelectric sensors and/or actuators would be promising in active vibration control of smart structures.

Finite element modeling of active control of functionally graded shells in frequency domain via piezoelectric sensors and actuators

Abstract: A flat-shell element is presented for the active control of functionally graded material (FGM) shells through integrated piezoelectric sensor/actuator layers. The finite element formulation based on first-order shear deformation theory (FSDT) can be applied to shells ranging from relatively thin to moderately thick dimensions. A constant gain displacement and velocity feedback control algorithm coupling the direct and inverse piezoelectric effects is applied to provide active control of the integrated FGM shell in a self-monitoring and self-controlling system. Frequency response characteristics of the FGM shell containing the piezoelectric sensors/actuators are analyzed in the frequency domain. The effects of constituent volume fraction and the influence of feedback control gain values on the dynamic responses of the FGM shell system are examined in detail.

Dynamic Design of Piezoelectric Laminated Sensors and Actuators using Topology Optimization

Abstract: Sensors and actuators based on piezoelectric plates have shown increasing demand in the field of smart structures, including the development of actuators for cooling and fluid-pumping applications and transducers for novel energy-harvesting devices. This project involves the development of a topology optimization formulation for dynamic design of piezoelectric laminated plates aiming at piezoelectric sensors, actuators and energy-harvesting applications. It distributes piezoelectric material over a metallic plate in order to achieve a desired dynamic behavior with specified resonance frequencies, modes, and enhanced electromechanical coupling factor (EMCC). The finite element employs a piezoelectric plate based on the MITC formulation, which is reliable, efficient and avoids the shear locking problem. The topology optimization formulation is based on the PEMAP-P model combined with the RAMP model, where the design variables are the pseudo-densities that describe the amount of piezoelectric material at eac...

Integrated tip strain sensor for use in combination with a single axis atomic force microscope

Abstract: An integrated tip strain sensor is combination with a single axis atomic force microscope (AFM) for determining the profile of a surface in three dimensions. A cantilever beam carries an integrated tip stem on which is deposited a piezoelectric film strain sensor. A high-resolution direct electron beam (e-beam) deposition process is used to grow a sharp tip onto the silicon (Si) cantilever structure. The direct e-beam deposition process permits the controllable fabrication of high-aspect ratio, nanometer-scale tip structures. A piezoelectric jacket with four superimposed elements is deposited on the tip stem. The piezoelectric sensors function in a plane perpendicular to that of a probe in the AFM; that is, any tip contact with the linewidth surface will cause tip deflection with a corresponding proportional electrical signal output. This tip strain sensor, coupled to a standard single axis AFM tip, allows for three-dimensional metrology with a much simpler approach while avoiding catastrophic tip "crashes". Two-dimensional edge detection of the sidewalls is used to calculate the absolute value or the linewidth of overlay, independent of the AFM principle. The technique works on any linewidth surface material, whether conductive, non-conductive or semiconductive.

Simultaneous sensing and actuation using piezoelectric materials

Abstract: The possibility of using a single piezoelectric element simultaneously as both a structural actuator and collocated sensor is investigated. The coupled actuator and sensor equations for an arbitrary elastic structure with piezoelectric elements are developed using an assumed modes energy method. Examination of these equations suggests a simple implementation of collocated strain or strain rate sensing using a voltage driven piezoelectric element. The properties of such a collocated strain or strain rate sensor are presented. The general equations are applied to the case of a cantilevered beam with surface mounted piezoceramics. The theoretical derivations are validated experimentally on an actively controlled cantilevered beam test article with a single piezoelectric element used for collocated strain rate feedback.