Topic
Plasma processing
About: Plasma processing is a research topic. Over the lifetime, 10812 publications have been published within this topic receiving 176291 citations.
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Book•
28 Oct 1994
TL;DR: In this paper, the authors introduce the concept of particle and energy balance in discharges and introduce the theory of collision dynamics and wave-heated discharges, as well as chemical reactions and equilibrium.
Abstract: 1. Introduction. 2. Basic Plasma Equations and Equilibrium. 3. Atomic Collisions. 4. Plasma Dynamics. 5. Diffusion and Transport. 6. DC Sheaths. 7. Chemical Reactions and Equilibrium. 8. Molecular Collisions. 9. Chemical Kinetics and Surface Processes. 10. Particle and Energy Balance in Discharges. 11. Capacitive Discharges. 12. Inductive Discharges. 13. Wave-Heated Discharges. 14. DC Discharges. 15. Etching. 16. Deposition and Implantation. 17. Dusty Plasmas. 18. Kinetic Theory of Discharges. Appendix A: Collision Dynamics. Appendix B: The Collision Integral. Appendix C: Diffusion Solutions for Variable Mobility Model.
5,728 citations
TL;DR: The physical and chemical fundamentals of plasma electrolysis are discussed in this article, and the equipment and deposition procedures for coating production are described, and the effects of electrolyte composition and temperature on ignition voltage, discharge intensity and deposited layer thickness and composition are outlined.
Abstract: This paper overviews the relatively new surface engineering discipline of plasma electrolysis, the main derivative of this being plasma electrolytic deposition (PED), which includes techniques such as plasma electrolytic oxidation (PEO) and plasma electrolytic saturation (PES) processes such as plasma electrolytic nitriding/carburizing (PEN/PEC). In PED technology, spark or arc plasma micro-discharges in an aqueous solution are utilised to ionise gaseous media from the solution such that complex compounds are synthesised on the metal surface through the plasma chemical interactions. The physical and chemical fundamentals of plasma electrolysis are discussed here. The equipment and deposition procedures for coating production are described, and the effects of electrolyte composition and temperature on ignition voltage, discharge intensity and deposited layer thickness and composition are outlined. AC-pulse PEO treatment of aluminium in a suitable passivating electrolyte allows the formation of relatively thick (up to 500 μm) and hard (up to 23 GPa) surface layers with excellent adhesion to the substrate. A 10–20 μm thick surface compound layer (1200HV) and 200–300 μm inner diffusion layer with very good mechanical and corrosion-resistant properties can also be formed on steel substrates in only 3–5 min by use of the PEN/PEC saturation techniques. Details are given of the basic operational characteristics of the various techniques, and the physical, mechanical and tribological characteristics of coatings produced by plasma electrolytic treatments are presented.
2,552 citations
TL;DR: In this paper, a review of plasma chemical processes occurring in the volume part of electrical nonequilibrium discharges is presented, where the role of energetic electrons as initiators of chemical reactions in a cold background gas is discussed.
Abstract: A review is presented of plasma chemical processes occurring in the volume part of electrical nonequilibrium discharges. The role of energetic electrons as initiators of chemical reactions in a cold background gas is discussed. Different discharge types of (glow, corona, silent, RF, and microwave discharges) are investigated with respect to their suitability for plasma processing. Emphasis is placed on the requirements of initiating and maintaining the discharge and, at the same time, optimizing plasma parameters for the desired chemical process. Using large-scale industrial ozone production as an example, the detailed process of discharge optimization is described. Other applications of volume plasma processing include other plasma chemical syntheses as well as decomposition processes such as flue gas treatment and hazardous waste disposal. The author only deals with plasmas which are not in equilibrium. >
771 citations
Book•
01 May 1994
TL;DR: In this paper, the authors present thin film technology, thin film characterisation, and high energy techniques for thin film. But they do not discuss the effects of these technologies on the performance of the film.
Abstract: Thin Film Technology. Gas Kinetics. Vacuum Technology. Evaporation. Deposition. Epitaxy. Chemical Vapor Deposition. High-Energy Techniques. Plasma Processes. Film Characterization.
736 citations
TL;DR: In this paper, simultaneous optical, electrical, and thrust measurements of an aerodynamic plasma actuator are presented, which reveal the temporal and macro-scale spatial structure of the plasma and the electrical characteristics of the discharge to the actuator performance as measured by the thrust produced.
Abstract: We present simultaneous optical, electrical, and thrust measurements of an aerodynamic plasma actuator. These measurements indicate that the plasma actuator is a form of the dielectric barrier discharge, whose behavior is governed primarily by the buildup of charge on the dielectric-encapsulated electrode. Our measurements reveal the temporal and macroscale spatial structure of the plasma. Correlating the morphology of the plasma and the electrical characteristics of the discharge to the actuator performance as measured by the thrust produced indicates a direct coupling between the interelectrode electric field (strongly modified by the presence of the plasma) and the charges in the plasma. Our measurements discount bulk heating or asymmetries in the structure of the discharge as mechanisms for the production of bulk motion of the surrounding neutral air, although such asymmetries clearly exist and impact the effectiveness of the actuator.
644 citations