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Polycrystalline silicon

About: Polycrystalline silicon is a research topic. Over the lifetime, 19554 publications have been published within this topic receiving 198222 citations. The topic is also known as: polysilicon & poly-Si.


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Patent
Takashi Aoyama1, Kazuhiro Ogawa1, Yasuhiro Mochizuki1, Naohiro Momma1, Katsuhisa Usami1 
02 Dec 1991
TL;DR: In this article, a glass substrate after depositing amorphous silicon (a-Si) thereupon is transferred to a laser annealing chamber which is kept in non-oxidation ambient and provided with a sample holder and a substrate heating mechanism.
Abstract: TFTs with an inverted stagger structure are fabricated according to the invention as follows; a glass substrate after depositing amorphous silicon (a-Si) thereupon is transferred to a laser annealing chamber which is kept in non-oxidation ambient and provided with a sample holder and a substrate heating mechanism. The substrate is fixed on the sample holder, then subjected to laser annealing while being heated from the glass substrate side, thereby growing polycrystalline silicon having substantially improved crystallinity, on which a-Si is further deposited. According to this process of the invention, it is capable of forming TFTs having a higher mobility and a smaller leakage current in the periphery of the substrate, with addition of almost no changes to the process and device structures of conventional TFTs which constitute pixels, and even more the peripheral drive circuitry is capable of being integrated in the display substrate.

86 citations

Journal ArticleDOI
TL;DR: In this article, a parallel multijunction solar cell is described which allows fundamental radiative recombination limits upon photovoltaic cell energy conversion efficiency to be approached more closely in good quality material than possible in a single-junction device.
Abstract: A novel parallel multijunction solar cell is described which allows fundamental radiative recombination limits upon photovoltaic cell energy conversion efficiency to be approached more closely in good quality material than possible in a single‐junction device However, the real advantage arises for poor quality material with the structure shown to be particularly tolerant of both impurity and grain boundary effects A novel implementation approach is described for potentially high‐performance, low‐cost, thin‐film polycrystalline silicon solar cells

85 citations

01 Jan 1994

85 citations

Journal ArticleDOI
TL;DR: Lab-free electrical detection of DNA hybridization has been achieved using both MOS capacitors and Poly-Si TFTs and single base pair DNA mismatches can be detected with the technique.

85 citations

Journal ArticleDOI
TL;DR: In this paper, the design, fabrication, and testing of silicon micromachined magnetic actuators are presented, and applications of such actuators in magnetically assisted levitation and parallel assembly of three-dimensional structures are demonstrated.
Abstract: Results on design, fabrication, and testing of silicon micromachined magnetic actuators are presented. Electroplated, low-stress Permalloy (Ni/sub 80/Fe/sub 20/) material is the medium for magnetic interaction and force generation. The Permalloy piece is supported by a structural plate, which consists of polycrystalline silicon thin film prepared by low-pressure chemical vapor deposition (LPCVD). Magnetic actuators supported both by cantilever beams and by torsional beams can provide large force (on the order of 100 /spl mu/N) and large displacement (on the order of 100 /spl mu/m). The vertical loading force of magnetic actuators under external bias has been experimentally determined. Applications of such actuators in magnetically assisted levitation and parallel assembly of three-dimensional structures are demonstrated.

85 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
202343
2022130
2021122
2020313
2019498
2018534