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Profilometer

About: Profilometer is a research topic. Over the lifetime, 2532 publications have been published within this topic receiving 40885 citations.


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Journal ArticleDOI
TL;DR: The high resolution surface profile of a 3-D diffuse object is obtained by measurement of the phase distribution across the image of a projected sinusoidal grating deformed by the surface, based on phase-shifting interferometric techniques.
Abstract: The high resolution surface profile of a 3-D diffuse object is obtained by measurement of the phase distribution across the image of a projected sinusoidal grating deformed by the surface. A shearing polarization interferometer is used for projection. Deformed grating images are detected by an array camera and processed by a microcomputer. Surface height resolutions of better than 10 μm have been attained, limited essentially by electronic quantization noise. In contrast to direct deformed grating analysis, this method, based on phase-shifting interferometric techniques, is capable of accurate measurement even with coarse projected gratings and low density image sensing arrays. Areas of application include industrial quality control, biostereometrics, robotics, and solid modeling for computer graphics.

990 citations

Journal ArticleDOI
TL;DR: This work presents surface roughness power spectra of many surfaces of practical importance, obtained from the surface height profile measured using optical methods and the atomic force microscope, and shows how the power spectrum determines the contact area between two solids.
Abstract: Surface roughness has a huge impact on many important phenomena. The most important property of rough surfaces is the surface roughness power spectrum C(q). We present surface roughness power spectra of many surfaces of practical importance, obtained from the surface height profile measured using optical methods and the atomic force microscope. We show how the power spectrum determines the contact area between two solids. We also present applications to sealing, rubber friction and adhesion for rough surfaces, where the power spectrum enters as an important input.

866 citations

Journal ArticleDOI
TL;DR: In vivo measurements of human skin by a fiber optical implementation of the sensor based on short coherence interferometry are demonstrated and in vivo 3-D mapping of naked skin was performed without preparation.
Abstract: "Coherence radar," an optical 3-D sensor based on short coherence interferometry, is used to measure skin surface topology. This method is called optical coherence profilometry (OCP) and it may be a useful tool for medical diagnosis in dermatology because different medical conditions show distinct alterations of the skin surface. The measuring uncertainty is less than 2 μm. The measuring time is about 4 s. in vivo 3-D mapping of naked skin was performed without preparation. For clinical application, a fiber optical implementation was introduced. Spectral radar is an optical sensor for the acquisition of skin morphology based on OCT techniques. The scattering amplitude a(z) along one vertical axis from the surface into the bulk can be measured within one exposure. No reference arm scanning is necessary. The theory of the sensor, including the dynamic range, is discussed and in vivo measurements of human skin by a fiber optical implementation of the sensor are demonstrated. © 1998 Society of Photo-Optical Instrumentation Engineers.

738 citations

Journal Article
TL;DR: In this article, the optical coherence profilometry (OCP) method is used for medical diagnosis in dermatology because different medical conditions show distinct alterations of the skin surface.
Abstract: "Coherence radar," an optical 3-D sensor based on short coherence interferometry, is used to measure skin surface topology. This method is called optical coherence profilometry (OCP) and it may be a useful tool for medical diagnosis in dermatology because different medical conditions show distinct alterations of the skin surface. The measuring uncertainty is less than 2 μm. The measuring time is about 4 s. in vivo 3-D mapping of naked skin was performed without preparation. For clinical application, a fiber optical implementation was introduced. Spectral radar is an optical sensor for the acquisition of skin morphology based on OCT techniques. The scattering amplitude a(z) along one vertical axis from the surface into the bulk can be measured within one exposure. No reference arm scanning is necessary. The theory of the sensor, including the dynamic range, is discussed and in vivo measurements of human skin by a fiber optical implementation of the sensor are demonstrated.

694 citations

Journal ArticleDOI
TL;DR: A three-dimensional sensor designed primarily for rough objects that supplies an accuracy that is limited only by the roughness of the object surface, which differs from conventional optical systems in which the depth accuracy is limited by the aperture.
Abstract: We introduce a three-dimensional sensor designed primarily for rough objects that supplies an accuracy that is limited only by the roughness of the object surface. This differs from conventional optical systems in which the depth accuracy is limited by the aperture. Consequently, our sensor supplies high accuracy with a small aperture, i.e., we can probe narrow crevices and holes. The sensor is based on a Michelson interferometer, with the rough object surface serving as one mirror. The small coherence length of the light source is used. While scanning the object in depth, one can detect the local occurrence of interference within the speckles emerging from the object. We call this method coherence radar.

690 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
2023246
2022458
202188
202080
2019105
201889