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Showing papers on "Pulsed laser deposition published in 1977"


Journal ArticleDOI
TL;DR: In this article, the design and characteristics of a low-energy ion beam deposition system are discussed, where metal ions with an energy of 100 eV are deposited onto the substrate at a current density of 4-5 µA/cm2.
Abstract: The design and characteristics of a low-energy ion beam deposition system are discussed. In the system, metal ions with an energy of 100 eV are deposited onto the substrate at a current density of 4–5 µA/cm2. Germanium single crystalline films are deposited on germanium (111) and silicon (111) substrate at substrate temperatures above 300°C. In the case of deposition below 200°C, films are found to be amorphous and re-crystallized by annealing above 300°C. When the ion energy over 500 eV is used, sputtering of the substrate is dominant and deposition is not observed for Ge+ ions and the silicon substrate combination. The results demonstrated the feasibility of growing thin film by low-energy ion beam deposition.

63 citations


Patent
28 Apr 1977
TL;DR: In this article, a sample of material to be analyzed is applied in a thin layer to a substrate such as an elongated tape and then is illuminated by a laser beam of such wavelength and power that at least a portion of the sample is vaporized.
Abstract: A sample of material to be analyzed is applied in a thin layer to a substrate such as an elongated tape and then is illuminated by a laser beam of such wavelength and power that at least a portion of the sample is vaporized. The substrate is non-absorptive at the laser wavelength and therefore is unaffected by the laser beam. The vaporized matter is removed from the region at which vaporization takes place, and is subsequently excited in a plasma to facilitate analysis by a conventional spectrometer.

40 citations


Journal ArticleDOI
R.N. Castellano1
TL;DR: In this article, a model is proposed to predict the partial pressure of oxygen at which a dielectric film forms, based on the thermodynamic properties of the compound formed, which suggests that compound formation occurs at the target and that the oxide is sputtered in the collision process.

32 citations


Patent
06 Oct 1977
TL;DR: In this article, it has been shown that by preheating at a lower temperature there is reduced thermal decomposition at the deposition surface, especially for semiconductor materials such as indium gallium phosphide and gallium arsenide phosphide.
Abstract: In the vapor phase epitaxy fabrication of semiconductor devices and in particular semiconductor lasers, the deposition body on which a particular layer of the laser is to be grown is preheated to a temperature about 40° to 60° C. lower than the temperature at which deposition occurs. It has been discovered that by preheating at this lower temperature there is reduced thermal decomposition at the deposition surface, especially for semiconductor materials such as indium gallium phosphide and gallium arsenide phosphide. A reduction in thermal decomposition reduces imperfections in the deposition body in the vicinity of the deposition surface, thereby providing a device with higher efficiency and longer lifetime.

29 citations


Journal ArticleDOI
J.E. Smith1, T.O. Sedgwick1
TL;DR: In this paper, Raman and resonance fluorescence spectra, determined by inelastic light scattering measurements, can be used to probe a gas phase chemical reaction in situ during the reaction.

24 citations


Journal ArticleDOI
TL;DR: In this article, the operating characteristics of a compact copper vapor laser which displays self-mode-locked operation and is capable of operating at pulse rates to 150 kHz are described and compared to the self-programmable laser.
Abstract: The operating characteristics of a compact copper vapor laser which displays self-mode-locked operation and is capable of operating at pulse rates to 150 kHz are described.

21 citations



Journal ArticleDOI
TL;DR: In this paper, the effect of various physical vapor deposition parameters on the thermoelectric power of thin film (10 000 A) Mo-Ni junctions deposited by electron beam evaporation was investigated.

11 citations


Patent
06 Jan 1977
TL;DR: In this paper, a high-flux source for the vapor deposition of electrode maials, such as gold, during the fabrication of precision quartz-crystal resonators, or the like is proposed.
Abstract: A novel, high-flux source for use in the vapor deposition of electrode maials, such as gold, during the fabrication of precision quartz-crystal resonators, or the like The design is based on the theory and technology of nozzle beams The nozzle beam type source disclosed herein is conceived: (1) to permit large deposition rates with minimum wastage of electrode material; (2) to operate in high vacuum; (3) to emit vapor in a horizontal direction, thereby permitting the use of a pair of sources to plate both sides of a substrate simultaneously; and (4) to operate for extended periods of time without requiring frequent breaking of the vacuum in order to replenish the source It is estimated that this design can operate at a deposition rate equal or above that of a conventional evaporation-type source with less than one percent of the wastage of electrode material experienced with a conventional source

11 citations


Patent
29 Jun 1977
TL;DR: In this article, a method of producing.gamma-Fe203 magnetic disk medium of continuous thin film is provided, in which a deposition source is deposited on an opposed Al-alloy substrate by means of a reactive vacuum deposition technique and the deposited film is thermally treated so as to be the magnetic disks medium.
Abstract: of the Disclosure A method of producing .gamma.- Fe203 magnetic disk medium of continuous thin film is provided, in which a deposition source is deposited on an opposed Al-alloy substrate by means of a reactive vacuum deposition technique and the deposited film is thermally treated so as to be the magnetic disk medium. As the deposition source, a ferroalloy containing about 1 to 10 at.% Ti and about 0.5 to 5 at.% Co is employed.

9 citations


Book ChapterDOI
01 Jan 1977
TL;DR: In this paper, the authors reported the first continuous laser operation of Na2 molecules in the ultraviolet, visible and near-infrared (VINR) regime and showed that this system was studied in more detail and laser operation with other alkali dimers was achieved.
Abstract: Gases and vapors of simple molecules are promising candidates for efficient, scalable and tunable lasers in the ultraviolet, visible and near infrared. This paper reports on laser investigations of optically pumped alkali dimers, which are of special interest, due to their simple molecular structure, stability, ease of production and favorable absorption and emission cross sections. Pulsed laser oscillation in molecular sodium was first observed by Henesian et al. [1] and Itoh et al. [2]. In a recently published paper [3] we reported first continuous laser operation of Na2 molecules. In the meantime this system was studied in more detail and laser operation with other alkali dimers was achieved. Furtheron successful pulse laser operation of sulphur dimers [4] and cw oscillation of J2 [5] was reported.

Journal ArticleDOI
TL;DR: In this paper, a simple analytical model has been developed which describes the heating of a thin opaque target in air when subjected toirradiation from a high-power pulse laser, and effects due to the formation of a laser supported absorption wave (LSAW) above the target surface are explicitly included in this model.
Abstract: A simple analytical model has been developed which describes the heating of a thin opaque target in air when subjected toirradiation from a high‐power pulse laser. Effects due to the formation of a laser supported absorption wave (LSAW) above the target surface are explicitly included in this model. The results shows that despite the increased coupling due to the presence of the LSAW, the resultant target heating from a tightly focused beam (small spot diameter) can be severely retarded by energy spreading as the LSAW expands over the target surface.


Journal ArticleDOI
TL;DR: The design, construction, and operation of a compact vapor deposition system is described in this paper, where the authors describe the design and construction of the system, as well as its operation.
Abstract: The design, construction, and operation of a compact vapor deposition system is described.(AIP)


Journal ArticleDOI
TL;DR: In this paper, the heating of polymer surfaces associated with vacuum metal deposition is determined by the deposition rate and the deposition time and also by the thermo-physical characteristics of the substrate growing film system.
Abstract: 1. The heating of polymer surfaces associated with vacuum metal deposition is determined by the deposition rate and the deposition time and also by the thermo-physical characteristics of the substrate—growing film system, and at high deposition rates may reach the phase-transition temperatures of the polymers.


Patent
11 Oct 1977
TL;DR: In this paper, the authors proposed to secure the output of a laser beam by having high-accuracy and high-efficiency measurement of the laser beam output without stopping the irradiation of the beam.
Abstract: PURPOSE:To secure stabilized output of laser beam by having high-accuracy and high-efficiency measurement of the laser beam output without stopping the irradiation of the laser beam.