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Showing papers on "Pulsed laser deposition published in 2021"


Journal ArticleDOI
TL;DR: In this paper, the authors reported the growth of ultrathin black phosphorus (BP) on the centimetre scale through pulsed laser deposition and fabricated large-scale field effect transistor arrays on BP films, yielding appealing hole mobility of up to 213 and 617 cm2 V−1/s−1 at 295 and 250 K, respectively.
Abstract: Two-dimensional materials provide opportunities for developing semiconductor applications at atomistic thickness to break the limits of silicon technology. Black phosphorus (BP), as a layered semiconductor with controllable bandgap and high carrier mobility, is one of the most promising candidates for transistor devices at atomistic thickness1–4. However, the lack of large-scale growth greatly hinders its development in devices. Here, we report the growth of ultrathin BP on the centimetre scale through pulsed laser deposition. The unique plasma-activated region induced by laser ablation provides highly desirable conditions for BP cluster formation and transportation5,6, facilitating growth. Furthermore, we fabricated large-scale field-effect transistor arrays on BP films, yielding appealing hole mobility of up to 213 and 617 cm2 V−1 s−1 at 295 and 250 K, respectively. Our results pave the way for further developing BP-based wafer-scale devices with potential applications in the information industry. Centimetre-scale growth of few-layer black phosphorous with high crystalline quality and homogeneity is realized by pulsed laser deposition.

90 citations


Journal ArticleDOI
TL;DR: In this article, the authors provide an overview of the current understanding of epitaxial growth of different phases of Ga2O3 by various growth techniques including pulsed laser deposition (PLD), molecular beam epitaxy (MBE), metal-organic chemical vapour deposition (MOCVD), sputtering, mist chemical vapours deposition (Mist CVD), and atomic layer deposition (ALD).
Abstract: Gallium oxide (Ga2O3) is rapidly emerging as a material of choice for the development of solar blind photodetectors and power electronic devices which are particularly suitable in harsh environment applications, owing to its wide bandgap and extremely high Baliga figure of merit (BFOM). The Ga2O3 based devices show robustness against chemical, thermal and radiation environments. Unfortunately, the current Ga2O3 technology is still not mature for commercial usage., Thus, extensive research on the growth of various polymorph of Ga2O3 materials has been carried out. This article aims to provide an overview of the current understanding of epitaxial growth of different phases of Ga2O3 by various growth techniques including pulsed laser deposition (PLD), molecular beam epitaxy (MBE), metal-organic chemical vapour deposition (MOCVD), sputtering, mist chemical vapour deposition (Mist CVD) and atomic layer deposition (ALD).The review also investigates the factors such as the growth temperature, pressure, carrier gas, III/V ratio, substrate as well as doping which would influence the synthesis and the stability of meta stable phases of Ga2O3. In addition, a through discussion of growth window is also provided using phase diagrams for aforementioned epitaxial deposition methods.

44 citations


Journal ArticleDOI
Yitian Ma1, Li Li, Ji Qian1, Wenjie Qu1, Rui Luo1, Feng Wu, Renjie Chen1 
TL;DR: In this article, a detailed comparison of advantages between magnetron sputtering and other vapor deposition equipment, including atomic layer deposition (ALD), thermal evaporation (TE), molecular beam epitaxy (MBE), Pulsed Laser Deposition (PLD), is provided.

38 citations


Journal ArticleDOI
TL;DR: In this paper, a pulsed laser deposition (PLD) method was used to fabricate a six layer multiple-homojunction using gradient nitrogen doped TiO2 (g-N-TiO2) to extend the width of band bending over the bulk of the porous photocatalyst.

33 citations


Journal ArticleDOI
TL;DR: In this paper, the evolution of local structure in epitaxial GeTe/Sb2Te3 based superlattices was studied by a combination of atomic-resolution scanning transmission electron microscopy with energy dispersive X-ray spectroscopy.

30 citations


Journal ArticleDOI
TL;DR: In this paper, the effect of creating vacancies on the thin films of ZnO has appeared on the optical and structural properties of Ag/ir-Zn/ZnO thin film was studied by X-ray diffraction, Xray photoelectron spectrometer, and energy dispersive X-Ray diffraction.

29 citations


Journal ArticleDOI
TL;DR: In this article, the influence of the dominant laser parameters, ambient gas, and substrate-target conditions on the various properties of diamond-like carbon films by arranging the data reported in the last decade is discussed.

29 citations


Journal ArticleDOI
TL;DR: In this article, the authors achieved pulsed laser deposition ofTiO2 nanostructures and investigated their nonlinear properties using z-scan technique using second harmonic Q-switched Nd: YAG laser at repetition rate of 1Hz and wavelength of 532 nm with three different laser fluencies in the range of 0.77-1.1 J/cm2.
Abstract: The present work aims to achieve pulsed laser deposition ofTiO2 nanostructures and investigate their nonlinear properties using z-scan technique.The second harmonic Q-switched Nd: YAG laser at repetition rate of 1Hz and wavelength of 532 nm with three different laser fluencies in the range of 0.77-1.1 J/cm2 was utilized to irradiate the TiO2 target. The products of laser-induced plasma were characterized by utilizing UV-Vis absorption spectroscopy, x-ray diffraction (XRD), atomic force Microscope (AFM),and Fourier transform infrared (FTIR). A reasonable agreement was found among the data obtained usingX-Ray diffraction, UV-Vis and Raman spectroscopy. The XRD results showed that the prepared TiO2 thin films were all crystallite structure with no impurity peaks of other elements. Also, their peak intensities were increased with increasing the ablating laser fluency. AFM measurements indicated that,during pulsed laser deposition, as the laser fluency was increased, the average diameter of the prepared TiO2 nanoparticles (TiO2 NPs)was decreased from 86 to 57 nm, althoughthe differences were increased with the increase in the laser fluency. The multiphoton absorption was investigated using ultra-fast femtosecond laser with the z-scan method.The impact of thickness of the prepared films on the non-linear absorption coefficient was studied as well.

26 citations


Journal ArticleDOI
TL;DR: In this paper, a novel class of nanostructured Zr50Cu50 (%at) metallic glass films with superior and tunable mechanical properties is produced by pulsed laser deposition.

26 citations


Journal ArticleDOI
12 Feb 2021-ACS Nano
TL;DR: In this paper, the atomic structure of defects, grains, and grain boundaries in mono-and bilayer MoS2 grown by pulsed laser deposition is analyzed. And the role of the grain boundaries on the growth of bilayer monolayers is investigated.
Abstract: Pulsed laser deposition (PLD) can be considered a powerful method for the growth of two-dimensional (2D) transition-metal dichalcogenides (TMDs) into van der Waals heterostructures. However, despite significant progress, the defects in 2D TMDs grown by PLD remain largely unknown and yet to be explored. Here, we combine atomic resolution images and first-principles calculations to reveal the atomic structure of defects, grains, and grain boundaries in mono- and bilayer MoS2 grown by PLD. We find that sulfur vacancies and MoS antisites are the predominant point defects in 2D MoS2. We predict that the aforementioned point defects are thermodynamically favorable under a Mo-rich/S-poor environment. The MoS2 monolayers are polycrystalline and feature nanometer size grains connected by a high density of grain boundaries. In particular, the coalescence of nanometer grains results in the formation of 180° mirror twin boundaries consisting of distinct 4- and 8-membered rings. We show that PLD synthesis of bilayer MoS2 results in various structural symmetries, including AA' and AB, but also turbostratic with characteristic moire patterns. Moreover, we report on the experimental demonstration of an electron beam-driven transition between the AB and AA' stacking orientations in bilayer MoS2. These results provide a detailed insight into the atomic structure of monolayer MoS2 and the role of the grain boundaries on the growth of bilayer MoS2, which has importance for future applications in optoelectronics.

25 citations


Journal ArticleDOI
TL;DR: In this paper, using the pulsed laser deposition (PLD) technique, hydroxyapatite (HAP) was sputtered on a dense substrate of alumina at different times of exposure.
Abstract: The development of biomaterials innovative compositions to be appropriate for hard tissue regeneration is vital and wished to improve the quality of life worldwide. In this work, using the pulsed laser deposition (PLD) technique, hydroxyapatite (HAP) was sputtered on a dense substrate of alumina at different times of exposure. The investigation of surface morphology indicated that grains of alumina were configured with dimensions of about 1.3–2.94 μm, while high content of porosity was observed. Moreover, the data revealed a significant plunge of surface roughness, whereas the average roughness decreased from 53 nm to 29 nm, and the maximum roughness valley depth decreased from 281 to 248 nm, recorded for 5 to 20 min of exposure time. The mechanical properties were examined non-destructively using ultrasonic waves, and it was noticed that the microhardness changed significantly from 24.7 ± 0.7 GPa to 27.2 ± 0.8 GPa for the compositions compared to 0 and 20 min samples. The attachment behavior of human osteoblasts cell line towards the obtained scaffolds was examined in vitro and prove that cells were proliferated and spread to cover the scaffold surface. This elucidates that manipulation of an innovative scaffold design can be executed based on tailoring of bioactive material (HAP) depositions on an inert biomaterial (alumina) to combine both mechanical and bioactivity, with less degradation rate.

Journal ArticleDOI
TL;DR: In this article, a Ga2O3:Eu/n-Si based light-emitting diode was successfully fabricated with a multilayer structure of ITO/Ga2O 3: Eu/N-Si/Au.

Journal ArticleDOI
TL;DR: In this article, the defect densities from the chemical bond formation between Si and O atoms were studied in Si-doped Ga2O3 photodetectors with a metal-semiconductor-metal structure.

Journal ArticleDOI
TL;DR: In this paper, a new method of efficiency of CdTe thin film solar cells has been proposed, which combines the characteristics of pulsed laser deposition (PLD) and combined with high power pulse bias power supply.

Journal ArticleDOI
TL;DR: In this article, a Si-doped β-Ga2O3 film was fabricated by pulsed laser deposition with an as-deposited 2323 S cm−1 conductivity (resistivity = 4.3 × 10−4 Ω-cm, carrier concentration = 2.24 × 1020 cm−3, mobility = 64.5 cm2 V−1−s−1, and electrical activation efficiency = 77%).
Abstract: Conductive homoepitaxial Si-doped β-Ga2O3 films were fabricated by pulsed laser deposition with an as-deposited 2323 S cm−1 conductivity (resistivity = 4.3 × 10−4 Ω-cm, carrier concentration = 2.24 × 1020 cm−3, mobility = 64.5 cm2 V−1 s−1, and electrical activation efficiency = 77%). High quality homoepitaxial films deposited on commercial (010) Fe-compensated β-Ga2O substrates were determined by high-resolution transmission electron microscopy and x-ray diffraction. The β-Ga2O3 films have ∼70% transparency from 3.7 eV (335 nm) to 0.56 eV (2214 nm). The combination of high conductivity and transparency offers promise for numerous ultrawide bandgap electronics and optoelectronic applications.

Journal ArticleDOI
TL;DR: In this paper, a wafer-scale (4-inch) pulsed laser deposition of high-mobility Zr-doped In2O3 (IZrO) TCO for solar cells is demonstrated.
Abstract: Sputtered transparent conducting oxides (TCOs) are widely accepted transparent electrodes for several types of high-efficiency solar cells. However, the different sputtering yield of atoms makes stoichiometric transfer of target material challenging for multi-compounds. Additionally, the high kinetic energies of the arriving species may damage sensitive functional layers beneath. Conversely, pulsed laser deposition (PLD) is operated at higher deposition pressures promoting thermalization of particles. This leads to stoichiometric transfer and additionally reduces the kinetic energy of ablated species. Despite these advantages, PLD is rarely used within the photovoltaic community due to concerns about low deposition rates and the scalability of the technique. In this study, wafer-scale (4-inch) PLD of high-mobility Zr-doped In2O3 (IZrO) TCO for solar cells is demonstrated. IZrO films are grown at room temperature with deposition rate on par with RF-sputtering (>4 nm min−1). As-deposited IZrO films are mostly amorphous and exhibit excellent optoelectronic properties after solid phase crystallization at <200 °C. 100-nm thick films feature a sheet resistance of 21 Ω◻−1 with electron mobilities ≈70 cm2 V−1s−1. PLD-grown IZrO is applied as rear electrode in efficient semi-transparent halide perovskite solar cells leading to the improved stabilized maximum power point efficiency (15.1%) as compared to the cells with sputtered ITO electrodes (11.9%).

Journal ArticleDOI
TL;DR: In this paper, the effect of nitrogen doping on the electrical and optical properties of VO2 thin films was investigated using an innovative method based on a VN target and an O2 ambient gas, which was used to synthesize N:VO2 films on quartz substrates using reactive pulsed laser deposition.

Journal ArticleDOI
TL;DR: In this article, a hexagonal boron nitride (h-BN) target was prepared by two-step wet chemical reaction method using a nontoxic starting materials (urea and boric acid).

Journal ArticleDOI
TL;DR: In this paper, a tetragonal Mn3O4 phase of manganese oxide with traces of cubic Mn2O3 was grown on p-type silicon (100) using pulsed laser deposition technique under different deposition temperatures ranging from 500°C to 800°C.


Journal ArticleDOI
TL;DR: In this paper, a pulsed laser deposition technique was used to produce Zn/ZnO thin film and Ag/ZN/Zno thin film by ablation of Zn metal with and without Ag metal in the evacuated chamber, respectively.

Journal ArticleDOI
TL;DR: In this paper, an ultrathin capping layer of SrTiO3 was used as a template for ex situ epitaxial growth of a water-soluble sacrificial layer.
Abstract: A new synthetic approach has recently been developed for the fabrication of freestanding crystalline perovskite oxide nanomembranes, which involves the epitaxial growth of a water-soluble sacrificial layer. By utilizing an ultrathin capping layer of SrTiO3, here we show that this sacrificial layer, as grown by pulsed laser deposition, can be stabilized in air and therefore be used as transferrable templates for ex situ epitaxial growth using other techniques. We find that the stability of these templates depends on the thickness of the capping layer. On these templates, freestanding superconducting SrTiO3 membranes were synthesized ex situ using molecular beam epitaxy, enabled by the lower growth temperature which preserves the sacrificial layer. This study paves the way for the synthesis of an expanded selection of freestanding oxide membranes and heterostructures with a wide variety of ex situ growth techniques.

Journal ArticleDOI
TL;DR: In this article, a review analyzes the limits and understanding of the Langmuir probe technique as a foundation for attaining its full potential, which can impact the way pulsed laser deposition is used.
Abstract: The history of pulsed laser deposition (PLD) and transient plasmas generated by laser ablation is intertwined with the development of various techniques for its fundamental understanding. Some diagnostic tools have been developed to better suit the rapid transient nature of the plasma (space and time dependence of all parameters, fast decay and complex chemistry inside the plasma), whereas others have been adapted from basic plasma physics studies. Langmuir probe method has been used as a real-time in situ diagnostic tool for laser ablation and later for PLD. It remains a useful tool for the PLD community arsenal, which can easily be adapted to the development of new lasers and ablation regimes and new deposition configuration, being one of the most versatile techniques for plasma diagnostics. It is the cornerstone on which charge particles are analyzed and has led to several important discoveries, such as multiple peak distribution, selective acceleration during expansion, plume splitting, plasma turbulences and fluctuations. However, because the Langmuir probe theory adaptation from classical plasma physics is not straightforward, it might lead to misinterpretation and often incorrect analysis of data. This review analyzes the limits and understanding of the technique as a foundation for attaining its full potential, which can impact the way PLD is used. This is especially useful for the pressing need of real-time, in-situ diagnostics and feedback loops for systematic semi-industrial implementation of the PLD technique.

Journal ArticleDOI
TL;DR: In this article, the authors explored the properties of high performance LATP thin films fabricated by large-area Pulsed Laser Deposition (PLD) and showed that the as-deposited thin films exhibit an ionic conductivity of around 0.5 μS cm−1 at room temperature (comparable to the state-of-the-art of LiPON) which increases to a remarkably high value of 0.1 mS cm −1 after an additional annealing at 800 °C.
Abstract: The NASICON superionic solid electrolyte Li1+xAlxTi2−x(PO4)3 (LATP) with 0.3 ≤ x ≤ 0.5 remains one of the most promising solid electrolytes thanks to its good ionic conductivity and outstanding stability in ambient air. Despite the intensive research for bulk systems, there are only very few studies of LATP in a thin film form (thickness < 1 μm) and its implementation in all-solid-state batteries and microbatteries. The following study fills this gap by exploring the properties of high performance LATP thin films fabricated by large-area Pulsed Laser Deposition (PLD). The as-deposited thin films exhibit an ionic conductivity of around 0.5 μS cm−1 at room temperature (comparable to the state-of-the-art of LiPON) which increases to a remarkably high value of 0.1 mS cm−1 after an additional annealing at 800 °C. A possible cause for this significant enhancement in ionic conductivity by two orders of magnitude is the formation of a glassy, intergranular phase. The performance of both as-deposited and annealed LATP films makes them suitable as solid electrolytes, which opens the path to a new family of stable and high performance all-solid-state thin film batteries.

Journal ArticleDOI
TL;DR: In this article, the electronic structure and magnetic properties of 5% Fe-CeO2 TF were studied using pulsed laser deposition (PLD) technique at 200mTorr oxygen partial pressure.

Journal ArticleDOI
Shuaihang Hou1, Zhiliang Li1, Yuli Xue1, Xinkun Ning1, Jianglong Wang1, Shufang Wang1 
TL;DR: In this article, a-axis-oriented SnSe epitaxial films were successfully prepared via the pulsed laser deposition technology, and the thin films exhibited a relatively high power factor (PF) of ∼472μW⋅m−1-K−2.

Journal ArticleDOI
TL;DR: In this article, the influence of UV illumination by the plasma plume on the substrate stoichiometry during pulsed laser deposition (PLD) was examined on the model perovskite S r T i O 3 (STO) by the means of in situ impedance spectroscopy.


Journal ArticleDOI
TL;DR: In this article, an AgNbO3 epitaxial film was fabricated by pulsed laser deposition, which possesses high dielectric breakdown strength (Eb) of 624 kV/cm.

Journal ArticleDOI
TL;DR: In this article, the influence of surface roughness on the sputter yield of Mo under keV D ion bombardment was investigated for different impact angles, and the areal densities of the Mo marker layers were determined with Rutherford backscattering spectroscopy.