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Quantum lithography
About: Quantum lithography is a research topic. Over the lifetime, 113 publications have been published within this topic receiving 4469 citations.
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12 May 2000
TL;DR: It is shown how to write arbitrary 2D patterns by using the nonclassical photon-number states method, and a factor of N = 2 can be achieved easily with entangled photon pairs generated from optical parametric down-conversion.
Abstract: Summary form only given. It has been known for some time that entangled photon pairs, such as generated by spontaneous parametric down conversion, have unusual imaging characteristics with sub-shot-noise interferometric phase measurement. In fact, Fonseca, et al., recently demonstrated resolution of a two-slit diffraction patterned at half the Rayleigh limit in a coincidence counting experiment. What we show is that this type of effect is possible not only in coincidence counting experiments, but also in real two-photon absorbing systems, such as those used in classical interferometric lithography. In particular, we will demonstrate that quantum entanglement is the resource that allows sub-diffraction limited lithography.
1,255 citations
TL;DR: Utilizing the entangled nature of a two-photon state, the experimental results have beaten the classical diffraction limit by a factor of 2 and are a quantum mechanical two- photon phenomenon but not a violation of the uncertainty principle.
Abstract: We report a proof-of-principle experimental demonstration of quantum lithography. Utilizing the entangled nature of a two-photon state, the experimental results have beaten the classical diffraction limit by a factor of 2. This is a quantum mechanical two-photon phenomenon but not a violation of the uncertainty principle.
505 citations
TL;DR: A four-photon interferometer based on linear optics is demonstrated, demonstrating the presence of a four-particle mode-entangled state and anticipating that this scheme should be extendable to arbitrary photon numbers, holding promise for realizable applications with entanglement-enhanced performance.
Abstract: Superposition is one of the most distinctive features of quantum theory and has been demonstrated in numerous single-particle interference experiments. Quantum entanglement, the coherent superposition of states in multi-particle systems, yields more complex phenomena. One important type of multi-particle experiment uses path-entangled number states, which exhibit pure higher-order interference and the potential for applications in metrology and imaging; these include quantum interferometry and spectroscopy with phase sensitivity at the Heisenberg limit, or quantum lithography beyond the classical diffraction limit. It has been generally understood that in optical implementations of such schemes, lower-order interference effects always decrease the overall performance at higher particle numbers. Such experiments have therefore been limited to two photons. Here we overcome this limitation, demonstrating a four-photon interferometer based on linear optics. We observe interference fringes with a periodicity of one-quarter of the single-photon wavelength, confirming the presence of a four-particle mode-entangled state. We anticipate that this scheme should be extendable to arbitrary photon numbers, holding promise for realizable applications with entanglement-enhanced performance.
475 citations
TL;DR: In this article, the authors introduce the concept of biphoton wavepacket and emphasize the very different physics associated with the entangled two-photon system (pure state) and with the individual subsystems (statistical mixture).
Abstract: One of the most surprising consequences of quantum mechanics is the entanglement of two or more distance particles. Even though there are still questions regarding the fundamental issues of quantum theory, quantum entanglement has started to play important roles in practical engineering applications such as quantum information processing, quantum metrology, quantum imaging and quantum lithography. Two-photon states have been the most popular entangled states in fundamental and applied research. Using spontaneous parametric down conversion as an example, this review introduces the concept of biphoton wavepacket and emphasizes the very different physics associated with the entangled two-photon system (pure state) and with the `individual' subsystems (statistical mixture). Experimental approaches for Bell state preparation, pumped by continous wave and ultrashort pulse are discussed.
220 citations
TL;DR: In this article, Boto et al. generalize this procedure in order to create patterns in one and two dimensions, which renders quantum lithography a potentially useful tool in nanotechnology.
Abstract: As demonstrated by Boto et al. [Phys. Rev. Lett. 85, 2733 (2000)], quantum lithography offers an increase in resolution below the diffraction limit. Here, we generalize this procedure in order to create patterns in one and two dimensions. This renders quantum lithography a potentially useful tool in nanotechnology.
113 citations