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Silicon nitride

About: Silicon nitride is a research topic. Over the lifetime, 32678 publications have been published within this topic receiving 413599 citations. The topic is also known as: N₄Si₃.


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Journal ArticleDOI
TL;DR: In this article, a stable n-doping of WSe2 using thin films of SiNx deposited on the surface via plasma-enhanced chemical vapor deposition is presented, where positive fixed charge centers inside SiNs act to dope thin flakes n-type via field-induced effect.
Abstract: Stable n-doping of WSe2 using thin films of SiNx deposited on the surface via plasma-enhanced chemical vapor deposition is presented. Positive fixed charge centers inside SiNx act to dope WSe2 thin flakes n-type via field-induced effect. The electron concentration in WSe2 can be well controlled up to the degenerate limit by simply adjusting the stoichiometry of the SiNx through deposition process parameters. For the high doping limit, the Schottky barrier width at the metal/WSe2 junction is significantly thinned, allowing for efficient electron injection via tunneling. Using this doping scheme, we demonstrate air-stable WSe2 n-MOSFETs with a mobility of ∼70 cm2/V s.

81 citations

Journal ArticleDOI
TL;DR: In this article, the authors examined two sets of substrate parameters, one with a substrate temperature of 300 K and the substrate grounded (U 0 V, 300 K ), and the other with the substrate biased at − 50 K and its temperature maintained at 573 K (U − 50 V, 573K ).

81 citations

Journal ArticleDOI
TL;DR: The development of silicon nitride ceramics over the last two decades has brought about the advancement of materials which were first fabricated by the application of mechanical pressure and temperature (i.e., hot pressing) resulting in high flexure strengths (e.g., 700-800 MPa) but rather poor resistance to creep at temperatures of ~1200°C.
Abstract: The evolution of silicon nitride ceramics over the last two decades has brought about the advancement of materials which were first fabricated by the application of mechanical pressure and temperature (i.e., hot pressing) resulting in high flexure strengths (e.g., 700–800 MPa) but rather poor resistance to creep at temperatures of ~1200°C. At the same time, these ceramics remained quite brittle with fracture-toughness values of 4–5 MPa m½, such that strengths were very sensitive to flaw or crack sizes. As a result, measured strengths exhibited considerable scatter, as reflected by a low Weibull modulus. In the ensuing years, approaches were sought to develop more economical methods of fabricating silicon nitride components by densifying to near-net shape. Methods were also sought for increasing the elevated-temperature reliability by minimizing the additives employed to promote densification and by utilizing additives that produced more stable and refractory grain boundary phases. The application of gas-pressure sintering methods, utilizing gaseous environments of 10–100 atmospheres, led to the ability to produce dense near-net shaped components with very high fracture strengths (e.g., ≥1000 MPa). At the same time, advances in processing and additive chemistry, sometimes combined with additional fabrication methods (e.g., hot isostatic pressing), have resulted in ceramics with excellent creep resistances at temperatures in excess of 1300°C. Some of these silicon nitride ceramics exceed the elevated-temperature capability of superalloys by 200°C. The initial desire for light-weight ceramic components that could sustain tensile loads for high-temperature applications is, indeed, beginning to bear fruit. One of the most impressive examples of the development of a complexly shaped lightweight component is the silicon nitride turbocharger rotor used in a number of Japanese automobiles, which is currently manufactured at a cost approaching that of the opposing superalloy rotor and provides exceptionally high mechanical reliability and production yields. Currently, there are also earnest efforts to incorporate silicon nitride valves for engines, as well as in a variety of other components (e.g., combustion swirl chambers, valve-lifter pads, etc.). The acceptance and use of this class of brittle materials, which were once considered prohibitively expensive for fabrication into complex shapes and not suited for such applications, is a remarkable testimony of the progress that has been made.

81 citations

Journal ArticleDOI
TL;DR: In this article, the bending of microfabricated silicon nitride cantilevers was used to determine surface stress changes at solid-liquid interfaces, and the radius of curvature of the bent cantilever is directly proportional to changes in the differential surface stress between its opposite sides.

80 citations

Journal ArticleDOI
TL;DR: In this paper, the rheological properties of nonaqueous silicon nitride powder suspensions have been investigated using steady shear and viscoelastic measurements, and the volume fraction dependences of the high shear viscosity of three different silicone nitride powders were compared and the differences were related to effective volume effects and the physical characteristics of the powders.
Abstract: The rheological properties of nonaqueous silicon nitride powder suspensions have been investigated using steady shear and viscoelastic measurements. The polymeric dispersant, Hypermer KD-3, adsorbed strongly on the powder surfaces, and colloidally stable, fluid suspensions up to a volume fraction of {Phi} = 0.50 could be prepared. The concentrated suspensions all displayed a shear thinning behavior which could be modeled using the high shear form of the Cross equation. The viscoelastic response at high concentrations was dominated by particle interactions, probably due to interpenetration of the adsorbed polymer layers, and a thickness of the adsorbed Hypermer KD-3 layer, {Delta} {approx} 10 nm, was estimated. The volume fraction dependences of the high shear viscosity of three different silicon nitride powders were compared and the differences, analyzed by using a modified Krieger-Dougherty model, were related to effective volume effects and the physical characteristics of the powders. The significantly lower maximum volume fraction, {Phi}{sub m} = 0.47, of the SN E-10 powder was referred to the narrow particle size distribution and the possibility of an unfavorable particle morphology.

80 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
2023245
2022529
2021421
2020686
2019994
2018911