Topic
Silicon oxide
About: Silicon oxide is a research topic. Over the lifetime, 22220 publications have been published within this topic receiving 260986 citations.
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TL;DR: Lee et al. as discussed by the authors showed that when HfO2 is deposited on SiO2, parts of the Si-O-Si bonds are broken and Hf-O−Si bonds, which are the low refractive index used to make interference filters, are broken.
Abstract: Hafnium oxide presents a strong interest either for optical coatings or for microelectronic applications. An important parameter to control is its chemical interaction with silicon oxide, since those two materials are usually in direct contact in both applications: For optical coatings, silica is the low refractive index used to make interference filters [see M. R. Kozlowski, Thin Films for Optical Systems (Marcel Dekker, New York)], in microelectronics HfO2 could be used as a gate insulator in metal-oxide semiconductor technology [B. H. Lee, Tech. Dig. Int. Electron Devices Meet. 99, 133]. One interesting characterization method of the created interface is infrared spectroscopy in the so-called multiple internal reflection (MIR) technique. Mono- and bilayers of HfO2 and SiO2 have been deposited on germanium substrates by e-beam evaporation and ion beam sputtering. MIR measurements made on those samples show that when HfO2 is deposited on SiO2, parts of the Si–O–Si bonds are broken and Hf–O–Si bonds, repr...
59 citations
TL;DR: In this paper, the performance of various abrasives for CMP of uniaxially pressed Si3N3 bearing balls by magnetic float polishing (MFP) was investigated.
59 citations
Patent•
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18 Sep 1987
TL;DR: A thin-film EL device of which the surface is coated with a protective film of a two-layer structure consisting of an insulating film (10) and a metallic film (20) in order to obtain good airtightness and high reliability is described in this article.
Abstract: A thin-film EL device of which the surface is coated with a protective film of a two-layer structure consisting of an insulating film (10) and a metallic film (20) in order to obtain good air-tightness and high reliability. The insulating film (10) consists of any one of a silicon oxide film, a silicon nitride film, an aluminum oxide film or a tantalum oxide film, and the metallic film consists of a thin film of either aluminum or tantalum.
59 citations
Patent•
01 Mar 2012TL;DR: In this paper, the carbon nanofibers having a cone geometry are coated with a silicon layer and a protective silicon oxide layer and the resulting composite material is suitable for high-capacity electrodes in lithium ion batteries.
Abstract: Methods and devices for an anode formed from coated carbon nanofibers are provided. The carbon nanofibers having a cone geometry are coated with a silicon layer and a protective silicon oxide layer. The resulting composite material is suitable for high-capacity electrodes in lithium ion batteries. The electrodes incorporating the coated carbon nanofibers have improved rate capacity and decreased initial cycle irreversibility.
59 citations
TL;DR: In this paper, the authors employed scanning probe microscopy to reveal atomic structures and nanoscale morphology of graphene-based electronic devices (i.e., a graphene sheet supported by an insulating silicon dioxide substrate) for the first time.
Abstract: We employ scanning probe microscopy to reveal atomic structures and nanoscale morphology of graphene-based electronic devices (i.e. a graphene sheet supported by an insulating silicon dioxide substrate) for the first time. Atomic resolution STM images reveal the presence of a strong spatially dependent perturbation, which breaks the hexagonal lattice symmetry of the graphitic lattice. Structural corrugations of the graphene sheet partially conform to the underlying silicon oxide substrate. These effects are obscured or modified on graphene devices processed with normal lithographic methods, as they are covered with a layer of photoresist residue. We enable our experiments by a novel cleaning process to produce atomically-clean graphene sheets.
59 citations