Topic
Silicon oxide
About: Silicon oxide is a research topic. Over the lifetime, 22220 publications have been published within this topic receiving 260986 citations.
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TL;DR: Based on a systematic study of gas phase silicon oxide clusters and the subsequent interesting findings such as the gas phase favorable composition and distinctive features in reactivity of the different silicon oxide cluster, this paper elucidated the mechanism of oxide-assisted nucleation of silicon nanostructures.
52 citations
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TL;DR: In this paper, the boron diffusion in thin silicon oxides including pure SiO 2 and oxynitride that are used for metal-oxide-semiconductor transistors was studied.
Abstract: We studied boron diffusion in thin silicon oxides including pure SiO 2 and oxynitride that are used for metal-oxide-semiconductor transistors. We measured the boron penetration using secondary ion mass spectrometry. By comparing simulated and experimental results, we found that the boron diffusivity in pure SiO 2 , D PO , is 3.96 × 10 -2 exp (-3.65eVLkT) cm 2 /s, and that in oxynitride containing 4% nitrogen, D NO , is 3.42 × 10 -2 exp (-3.75 eV.kT) cm 2 /s
52 citations
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TL;DR: The interaction of human osteoblast cells with diamond-like carbon films incorporating silicon and silicon oxide and synthesized using the direct-current plasma-activated chemical vapour deposition method was investigated, finding that the incorporation of both Si and SiO(x) leads to a beneficial reduction in the residual stress of the films.
52 citations
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TL;DR: In this article, the C 1s XPS spectrum has been used to infer the relative abundance of methoxy groups in a 3-mercaptopropyltrimethoxysilane (MPS) monolayer.
Abstract: Adsorption of 3-mercaptopropyltrimethoxysilane (MPS) on hydroxylated silicon oxide substrates by immersion in MPS solution or exposure to MPS vapor has been compared using X-ray photoelectron spectroscopy (XPS). To aid the interpretation, MPS has also been cryogenically condensed in ultrahigh vacuum (UHV) onto gold surfaces. Condensation of MPS vapor on gold in the absence of water does not result in MPS polymerization, as evidenced by multilayer desorption upon warming to room temperature. The C 1s XPS spectrum has been used to infer the relative abundance of methoxy groups. Vapor-deposition on hydroxylated silicon oxide leads to an unpolymerized MPS monolayer consisting of molecules with two methoxy groups. Solution deposition yields a 2−3 layer thick film. The layer in contact with the surface is cross-linked and methoxy-depleted, but the layers on top of it contain some methoxy groups. Step-wise thermal deposition of gold in UHV onto solution-deposited MPS has also been investigated. Gold-thiolate bon...
52 citations
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TL;DR: In this article, the authors compare the efficacies of three preparation methods intended to create in an easy and inexpensive way a nonpreferential surface for a two-component homopolymer blend of polystyrene and poly(methyl methacrylate).
Abstract: We compare the efficacies of three preparation methods intended to create in an easy and inexpensive way a nonpreferential surface for a two-component homopolymer blend of polystyrene and poly(methyl methacrylate). The first method is to physically absorb two different high molecular weight copolymers of styrene and methyl methacrylate onto hydroxylated silicon oxide. The second method consists of covalently bonding octyltrichlorosilane onto hydroxylated silicon oxide with gradient coverage to create a region with a neutral surface. The third method utilizes hydroxyl terminated, miscible, low molecular weight homopolymers of polystyrene and poly(methyl methacrylate) covalently attached to the substrate. We characterize the relative effectiveness of all three methods and their temporal stability using optical microscopy, atomic force microscopy, contact angle measurements, as well as near edge X-ray absorption fine structure (NEXAFS) microscopy and spectroscopy. The preparation methods explored should be extendable to a number of polymer systems.
52 citations