Spatial light modulator

About: Spatial light modulator is a research topic. Over the lifetime, 9043 publications have been published within this topic receiving 130143 citations.

Confocal spectroscopy system and method

Abstract: A confocal spectral imaging system comprises a light source, a light modulator forming an illumination aperture and directing an illumination pattern to conjugate object locations, and analyzing means with a detection aperture, dispersive elements and a detector, wherein the illumination and detection apertures are in conjugate optical planes, and the light modulator consist of an array of light modulator elements, a group of which being arranged according to the illumination pattern and forming the illumination aperture, and are controlled such that the illumination pattern is directed to time-dependent changing conjugate locations of the object A programmable light source comprises a white light source, dispersion means and a spatial light modulator with an array of individually time-dependent controllable modulator elements being illuminated with the dispersed light and providing a position selective transmittivity or reflectivity, so that a light with a predetermined wavelength distribution passes the light modulator

Spatial Light Modulator Technology: Materials, Devices and Applications

Abstract: Nematic liquid crystals physical properties of smectic liquid crystals and novel electro-optic effects nonlinear optical properties of organic structures - fundamentals and applications photorefractive materials multiple quantum well spatial light modulators FLC spatial light modulators the magneto-optic spatial light modulator (MOSLM) charge-transfer-plate membrane-mirror light modulators acousto-optic Bragg cell devices smart pixels - technology and applications to parallel computing SLMs in optical computing display applications of SLMs SLMs for optical switching real-time holoography, innovative adaptive optics and compensated optical processors using spatial light modulators.

Acousto-optic signal processing: Convolution and correlation

Abstract: The use of acousto-optic devices in real-time signal convolution and correlation has increased dramatically during the past decade because of improvements in device characteristics and implementation techniques. Depending on the application, processing can be implemented via spatial or temporal integration. Two-dimensional signal processing (including image processing) is possile, in spite of the inherent one-dimensional nature of the acousto-optic device as a spatial light modulator.

Encoding complex fields by using a phase-only optical element

Abstract: We show that the amplitude and phase information from a two-dimensional complex field can be synthesized from a phase-only optical element with micrometric resolution. The principle of the method is based on the combination of two spatially sampled phase elements by using a low-pass filter at the Fourier plane of a 4-f optical system. The proposed encoding technique was theoretically demonstrated, as well as experimentally validated with the help of a phase-only spatial light modulator for phase encoding, a conventional CMOS camera to measure the amplitude of the complex field, and a Shack-Hartmann wavefront sensor to determine its phase.

Metrology Method and Inspection Apparatus, Lithographic System and Device Manufacturing Method

Abstract: Methods are disclosed for measuring target structures formed by a lithographic process on a substrate. A grating structure within the target is smaller than an illumination spot and field of view of a measurement optical system. The optical system has a first branch leading to a pupil plane imaging sensor and a second branch leading to a substrate plane imaging sensor. A spatial light modulator is arranged in an intermediate pupil plane of the second branch of the optical system. The SLM imparts a programmable pattern of attenuation that may be used to correct for asymmetries between the first and second modes of illumination or imaging. By use of specific target designs and machine-learning processes, the attenuation patterns may also be programmed to act as filter functions, enhancing sensitivity to specific parameters of interest, such as focus.