scispace - formally typeset
Search or ask a question
Topic

Spectrum analyzer

About: Spectrum analyzer is a research topic. Over the lifetime, 12217 publications have been published within this topic receiving 101851 citations.


Papers
More filters
PatentDOI
Chris C Yu1
TL;DR: In this paper, a method and system for controlling the depth of removal by polishing of a selected material on a supporting underlayer where it is desired to terminate removal of the selected material such as tungsten, at the material-underlayer interface is presented.
Abstract: A method and system for controlling the depth of removal by polishing of a selected material on a supporting underlayer where it is desired to terminate removal of the selected material, such as tungsten, at the material-underlayer interface. In accordance with this novel method and system, the selected material such as a surface metallization layer is polished to initiate removal thereof in the direction of the material-underlayer interface. A microphone is positioned at a predetermined distance from the wafer to sense acoustical waves generated when the depth of material removal reaches a certain determinable distance from the interface to thereby generate output detection signals. These output detection signals are amplified and then applied to a spectrum analyzer which operates to analyze the sound intensity-versus-frequency characteristic of the acoustical waves received by the microphone. The spectrum analyzer operates to drive a CMP computer which in turn controls the operation of a CMP polishing machine. The CMP polishing motor terminates polishing of the selected material a predetermined time after a desired output signals are received from the spectrum analyzer. The present invention is also directed to a method and system or measuring the thickness of certain materials by comparing acoustical signals in a spectrum analyzer with frequency characteristics of known materials of certain layer thicknesses.

137 citations

Patent
23 Mar 2000
TL;DR: In this paper, an acoustic source/detector unit was used to excite a diagnostic implant device from outside the body of a patient. And the response of the device to such excitation with an acoustic analyzer was analyzed by analyzing the response with an ultrasonic signal.
Abstract: A system (30) for remotely interrogating a diagnostic implant device (32) utilizes acoustic energy to power, and interrogate the device (32). Acoustic energy is utilized by an acoustic source/detector unit (38) to excite the device (32) from outside the body of a patient. By analyzing the response of the device (32) to such excitation with an acoustic analyzer (36), it is possible to ascertain the condition of the device (32). Additionally, acoustic energy may be used to provide operating power to the device (32).

136 citations

Journal ArticleDOI
01 Jan 1981
TL;DR: This process also illustrates the parallel nature of optical operations, and introduces a fundamental concept, the use of one-dimensional optical components configured for performing two-dimensional operations.
Abstract: Spectrum analysis is one of the most fundamental tools in science today. Its use in one form or another spans virtually every discipline. It was one of the first recognized applications of optical processing, and the usefulness of optical spectrum analysis has grown remarkably in the past decade. This is due to the fundamental simplicity, parallelism and intrinsic speed of optical spectrum analyzers, the maturity of the components now available, and the remarkable variety and versatility of the processing architectures that have been developed. This paper presents six selected topics on spectrum analysis using optics. The topics were selected because they represent practical techniques with broad applicability and illustrate different aspects of the technology. The topics are grouped by architecture as space integrating and time integrating. The space integrating sections cover radiometry for detecting low-level signals in wide-band noise, programmable filtering of electrical signals for interference rejection applications, and an optical technique that is equivalent to 105-106parallel filters for application where fast response, high resolution, and wide bandwidth of coverage are simultaneously required. The time integrating sections cover the versatile time integrating spectrum analyzer, and its extension to the calculation of ambiguity surfaces which have important application to radar processing problems requiring simultaneous measurement of a radar return's time of arrival and possible Doppler frequency shift. This process also illustrates the parallel nature of optical operations, and introduces a fundamental concept, the use of one-dimensional optical components configured for performing two-dimensional operations. The discussion of this concept continues into two-dimensional time integrating spectrum analyzers that use two time integrating spectrum analyzers, each capable of resolving N elements, and combines them to produce N2resolvable elements in real time.

136 citations

Patent
17 Apr 2012
TL;DR: In this paper, a blood analysis system functions as a non-invasive blood parameter analyzer when a monitor is coupled with an optical sensor and as an invasive blood sample analyzer if the monitor was coupled with a blood analyzer adapter.
Abstract: A blood analysis system functions as a non-invasive blood parameter analyzer when a monitor is coupled with an optical sensor and as an invasive blood sample analyzer when the monitor is coupled with a blood analysis adapter. The blood analysis adapter has a transmitting assembly and a receiving assembly in electrical communications with the adapter connector so as to receive emitter signals for driving emitters within the transmitting assembly and so as to transmit a detector signal for responding to at least one detector in the receiving assembly. A cuvette containing a blood sample is irradiated with multiple wavelength light from the emitters, the detector responds to the multiple wavelength light after attenuation by the blood sample, and the monitor analyzes the blood sample according to the detector signal.

135 citations

Book ChapterDOI
01 Jan 1974
TL;DR: Light beating spectroscopy has developed into a major new technique for analyzing optical fields with an effective resolution orders of magnitude greater than was available with traditional spectroscopic techniques as mentioned in this paper, and has been used extensively in photodetector applications.
Abstract: During the past decade, light beating spectroscopy has developed into a major new technique for analyzing optical fields with an effective resolution orders of magnitude greater than was available with traditional spectroscopic techniques. In all the early light beating experiments, the optical field under study illuminated a photodetector whose output current was then analyzed with an audio or r.f. spectrum analyzer in order to determine the photocurrent power spectrum.

135 citations


Network Information
Related Topics (5)
Mass spectrometry
72.2K papers, 2M citations
74% related
Software
130.5K papers, 2M citations
73% related
Laser
353.1K papers, 4.3M citations
73% related
Amplifier
163.9K papers, 1.3M citations
73% related
Copper
122.3K papers, 1.8M citations
71% related
Performance
Metrics
No. of papers in the topic in previous years
YearPapers
20241
2023256
2022568
2021155
2020287
2019361