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Surface micromachining

About: Surface micromachining is a research topic. Over the lifetime, 11465 publications have been published within this topic receiving 241467 citations.


Papers
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Journal ArticleDOI
TL;DR: In this article, a complex manifold of capillary channels has been fabricated in a planar glass substrate and the separation of a mixture of fluorescein and calcein within the channels was achieved using electrophoresis.
Abstract: The feasibillity of miniaturizing a chemical analysis system on a planar substrate has been demonstrated for a system utilizing electrokinetic phenomena for sample separation and solvent pumping. Using micromachining techniques, a complex manifold of capillary channels has been fabricated in a planar glass substrate and the separation of a mixture of fluorescein and calcein within the channels was achieved using electrophoresis. The maximum number of theoretical piates abtained was about 35 000 for calcein, with 5000 V applied, corresponding to 2100 V between the injection and fluorescence detection points in the channels

1,300 citations

Journal ArticleDOI
TL;DR: The micromachining technology that emerged in the late 1980s can provide micron-sized sensors and actuators that can be integrated with signal conditioning and processing circuitry to form micro-electromechanical-systems (MEMS) that can perform real-time distributed control.
Abstract: The micromachining technology that emerged in the late 1980s can provide micron-sized sensors and actuators. These micro transducers are able to be integrated with signal conditioning and processing circuitry to form micro-electromechanical-systems (MEMS) that can perform real-time distributed control. This capability opens up a new territory for flow control research. On the other hand, surface effects dominate the fluid flowing through these miniature mechanical devices because of the large surface-to-volume ratio in micron-scale configurations. We need to reexamine the surface forces in the momentum equation. Owing to their smallness, gas flows experience large Knudsen numbers, and therefore boundary conditions need to be modified. Besides being an enabling technology, MEMS also provide many challenges for fundamental flow-science research.

1,287 citations

Book
01 Feb 1998
TL;DR: In this paper, the authors present an overview of Micromachining Techniques, Mechanical Transducers, Optical Transducers and Ionizing Radiation Transducers for Microfluidic Devices.
Abstract: 1 Introduction and Overview2 Micromachining Techniques3 Mechanical Transducers4 Optical Transducers5 Ionizing Radiation Transducers6 Thermal Transducers7 Magnetic & Electromagnetic Transducers8 Chemical & Biological Transducers9 Microfluidic Devices

1,212 citations

Journal ArticleDOI
TL;DR: In this article, a fabrication technique for building 3D micro-channels in polydimethylsiloxane (PDMS) elastomer is described, which allows for the stacking of many thin (less than 100-/spl mu/m) patterned PDMS layers to realize complex 3D channel paths.
Abstract: This paper describes a fabrication technique for building three-dimensional (3-D) micro-channels in polydimethylsiloxane (PDMS) elastomer. The process allows for the stacking of many thin (less than 100-/spl mu/m thick) patterned PDMS layers to realize complex 3-D channel paths. The master for each layer is formed on a silicon wafer using an epoxy-based photoresist (SU 8). PDMS is cast against the master producing molded layers containing channels and openings. To realize thin layers with openings, a sandwich molding configuration was developed that allows precise control of the PDMS thickness. The master wafer is clamped within a sandwich that includes flat aluminum plates, a flexible polyester film layer, a rigid Pyrex wafer, and a rubber sheet. A parametric study is performed on PDMS surface activation in a reactive-ion-etching system and the subsequent methanol treatment for bonding and aligning very thin individual components to a substrate. Low RF power and short treatment times are better than high RF power and long treatment times, respectively, for instant bonding. Layer-to-layer alignment of less then 15 /spl mu/m is achieved with manual alignment techniques that utilize surface tension driven self-alignment methods. A coring procedure is used to realize off-chip fluidic connections via the bottom PDMS layer, allowing the top layer to remain smooth and flat for complete optical access.

1,200 citations

Journal ArticleDOI
TL;DR: In this paper, a chip-like structure for capillary electrophoresis is presented, which is based on the photolithographic technique for structures in the micrometer range.

1,106 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
20241
2023135
2022260
2021177
2020183
2019208