Topic
Thermal mass flow meter
About: Thermal mass flow meter is a research topic. Over the lifetime, 1759 publications have been published within this topic receiving 21878 citations.
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Patent•
26 Oct 1983
TL;DR: In this article, a flow meter for measuring the mass flow rates of fluids passed through two essentially parallel, cantilever mounted U-shaped flow tubes where, instead of the fluid serially passing through one of the U-shape flow tubes and then through the second U shape flow tube, the fluid is essentially evenly divided and half of the fluids is passed through one U shape and the other half of them are passed through the other shape.
Abstract: A flow meter apparatus for measuring the mass flow rates of fluids passed through two essentially parallel, cantilever mounted U-shaped flow tubes where, instead of the fluid serially passing through one of the U-shaped flow tubes and then through the second U-shaped flow tube, the fluid is essentially evenly divided and half of the fluid is passed through one U-shaped flow tube and the other half of the fluid is passed through the other U-shaped flow tube. The two U-shaped flow tubes are sinusoidally driven as the tines of a tuning fork, and when a fluid is passed through the oscillating U-shaped flow tubes Coriolis forces are generated which torsionally deflect the U-shaped flow tubes. Such torsional deflections are a function of the mass flow rate of the fluid passing through the two U-shaped flow tubes.
203 citations
Patent•
01 Mar 1994
TL;DR: In this paper, an apparatus for accurately and reliably measuring fluid flow under turbulent or pulsating conditions with high signal to noise ratio and using a symmetrical design which works with flow in either direction is presented.
Abstract: This is an apparatus for accurately and reliably measuring fluid flow under turbulent or pulsating conditions with high signal to noise ratio and using a symmetrical design which works with flow in either direction. The apparatus is particularly well suited for measuring airflow in a bi-level respiratory system. The apparatus includes a flow conduit (34), an upstream sense tube (36) protruding into the flow conduit (34) with a notch opening (38) facing into the flow stream, a downstream sense tube (40) protruding into the flow conduit (34) with a notch opening (42) facing away from the flow stream, and a flow or pressure sensor/transducer (44) disposed in connecting lines (46, 48) between the upstream and downstream sense tubes (36, 40). The notched opening (38, 42) has a square, semi-cylindrical shape. The flow conduit (34) is either straight or angled.
176 citations
Patent•
09 Nov 2005
TL;DR: In this article, a thermal anemometer or mass flow meter having temperature and flow velocity sensor elements is provided in which a thin-film temperature sensor is captured at least partially within a spacer or interface member, the spacer being received within a housing.
Abstract: A thermal anemometer or mass flow meter having temperature and flow velocity sensor elements is provided in which a thin film temperature sensor is provided in the heated sensor of the fluid velocity sensor element of the system. The thin-film sensor is captured at least partially within a spacer or interface member, the spacer being received within a housing. The thermal anemometer is constructed to offer sufficient precision and accuracy in its design to be suitable for sensitive scientific and industrial applications. This goal is achieved while using cost effective parts—as in the thin film temperature sensor(s)—in connection with a construction approach minimizing or eliminating gaps or other system configuration variability.
172 citations
Patent•
04 Jan 2002
TL;DR: In this article, the authors present a system for dividing a single mass flow, including an inlet adapted to receive the one mass flow and at least two flow lines connected to the inlet.
Abstract: A system for dividing a single mass flow, including an inlet adapted to receive the single mass flow and at least two flow lines connected to the inlet. Each flow line includes a flow meter and a valve. The system also includes a controller programmed to receive a desired ratio of flow through a user interface, receive signals indicative of measured flow from the flow meters, calculate an actual ratio of flow through the flow lines based upon the measured flows, and compare the actual ratio to the desired ratio. The controller is also programmed to calculate the desired flow through at least one of the flow lines if the actual ratio is unequal to the desired ratio, and provide a signal indicative of the desired flow to at least one of the valves.
165 citations
Patent•
28 Aug 2012TL;DR: In this article, a method and system are disclosed for verifying the flow rate of gas through a mass flow controller, such as a Mass Flow Controller used with a tool for semiconductor or solar cell fabrication.
Abstract: A method and system are disclosed for verifying the flow rate of gas through a mass flow controller, such as a mass flow controller used with a tool for semiconductor or solar cell fabrication. To verify the mass flow rate measured by the mass flow controller, gas passing through the mass flow controller is also passed through a mass flow meter. The measured flow rate through the mass flow controller is compared to the measured flow rate through the mass flow meter and any difference between the two measured flow rates is determined. Depending upon the magnitude of any difference, the flow of gas to the mass flow controller may be altered.
162 citations