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Showing papers on "Thermal mass flow meter published in 1990"


Journal ArticleDOI
TL;DR: In this paper, an integrated mass flow controller consisting of a small thermal mass flow sensor and a normally closed microvalve was fabricated for precise gas control, which gave rise to a precise flow control for advanced deposition processes, etc.
Abstract: The integration of fluid control systems on a silicon wafer allows the control of a small volume of fluid by virtue of a negligible dead volume. Microvalves driven by small piezoactuators have been fabricated on a silicon wafer by micromachining. Three types, i.e. normally open, normally closed and three-way, were developed. An integrated mass flow controller consisting of a small thermal mass flow sensor and a normally closed microvalve was fabricated for precise gas control. The small thermal capacity of the flow sensor gives high sensitivity and quick response. The response time of the mass flow controller is less than 2 ms, which is faster than that of previous ones by nearly a thousand times. The integrated system gives rise to a precise flow control for advanced deposition processes, etc.

82 citations


Patent
16 Nov 1990
TL;DR: In this paper, a flow restrictor is added to the first and second flow meters to enable the measurement of multi-phase flow without the need for physically separating the different fluid flows.
Abstract: A device for measuring multi-phase fluid flow includes first and second flow meters connected in series for measuring a first and second fluid flow and providing first and second signals indicative of the first and second fluid flow. The device further includes a flow restrictor located between the first and second flow meters and first and second pressure measurement means operatively connected to each of the flow meters. The device enables the measurement of multi-phase flow without the need for physically separating the different fluid flows.

56 citations


Patent
19 Jan 1990
TL;DR: A fluid flow meter of the fluidic oscillator type and suitable for electrically conducting liquids, for example for metering domestic water supplies, comprises a feed back oscillator with magnets creating a magnetic field across at least one of the flow paths and a pair of electrodes (10, 11, 14, 15, 16) detecting the resultant potential difference across the flow path as mentioned in this paper.
Abstract: A fluid flow meter of the fluidic oscillator type and suitable for electrically conducting liquids, for example for metering domestic water supplies, comprises a feed back oscillator with magnets (8, 9, 12, 13) creating a magnetic field across at least one of the flow paths and a pair of electrodes (10, 11, 14, 15, 16) detecting the resultant potential difference across the flow path. The frequency of the detected signal gives a measure of the flow rate and a counter of the cycles will give the total flow over a period.

39 citations


Journal ArticleDOI
E.M. Laws1
TL;DR: In this article, a new flow conditioner is described which represents a new concept in flow conditioning and is demonstrated as being effective in meeting the flow requirements of ISO 5167 on both swirl magnitude and flow quality within a relative short development length.

34 citations


Patent
03 Jan 1990
TL;DR: Fluidic volumetric flow meter method and apparatus wherein undesirable dynamic interaction (ringing) which could appear in an output signal is inhibited. Electrical isolation and shielding also contribute to a high quality output signal in accordance with the invention.
Abstract: Fluidic volumetric flow meter method and apparatus wherein undesirable dynamic interaction (ringing) which could appear in an output signal is inhibited. Electrical isolation and shielding also contribute to a high quality output signal in accordance with the invention. Particularly advantageous housing structures adapt the flow measurement device to a variety of applications as a complete flow meter.

32 citations


Patent
22 Feb 1990
TL;DR: In this article, a mass-flow meter with temperature sensors is designed for measuring mass flow rates of liquids or gases, containing a heat conductive tube through which the mass flow to be measured occurs and of which the beginning (3) and the end (4) are kept at the same temperature, as well as one or more means to raise the temperature in the tube and means to measure the temperature of the mass in different places.
Abstract: Mass-flow meter with temperature sensors, designed for measuring mass flow rates of liquids or gases, containing a heat conductive tube (1), through which the mass flow to be measured occurs and of which the beginning (3) and the end (4) are kept at the same temperature, as well as one or more means (56) to raise the temperature in the tube and means to measure the temperature of the mass in the tube in different places. In or on the tube one or more facilities are applied with which the zero-offset of the means to measure the temperature can be eliminated in a physical instead of an electronic way.

31 citations


Patent
17 May 1990
TL;DR: In this paper, a pneumatic equivalent of a low pass R C filter is used to decouple the high turbulence in the main flow through the venturi, averaging same and providing a scaled down profiled flow through sample tube for measurement by a transducer in the sample tube, the measurements having an accuracy of ±2% of reading.
Abstract: Improvements in a mass air flow meter for internal combustion engines are disclosed which comprise structure for improving the flow dynamics of the air flow through the sampling path including expansion of the dynamic range and increase of the signal to noise ratio resulting in improved engine performance, fuel efficiency, and emission control. Such structure includes a sample tube being tapered in decreasing area in the direction of air flow therethrough and a pneumatic equivalent of a low pass R C filter which decouples the high turbulence in the main flow through the venturi, averages same and provides a scaled down profiled flow through the sample tube for measurement by a transducer in the sample tube, the measurements having an accuracy of ±2% of reading.

31 citations


Patent
14 May 1990
TL;DR: In this paper, a non-obstructive method of homogenizing the flow of a multiphase mixture of fluids in a bore hole comprises providing in the bore hole a pipe section which has an internal surface with a step discontinuity, whereby when fluid flows through the pipe section, turbulent stresses are caused by the discontinuity.
Abstract: It is often desirable to meter multiphase fluid flow in pipes (e.g. bore holes). In order to obtain reliable/accurate flow rate measurements it is known to incorporate obstructions in the flow path to cause homogenization. A non-obstructive method of homogenizing the flow of a multiphase mixture of fluids in a bore hole comprises providing in the bore hole a pipe section which has an internal surface with a step discontinuity, whereby when fluid flows through the pipe section, turbulent stresses are caused by the discontinuity, leading to homogenization by turbulent mixing. There is disclosed a flow meter which comprises a pipe length with a first section having a step change in cross-section for homogenizing fluid flow therethrough, in series with a venturi flow meter in which a differential pressure can be measured in a second pipe section having a smooth change in cross-section. Non-obstructive homogenizers and flow meters do not block the passage of objects such as tools, logging devices, etc along a pipe.

24 citations


Patent
03 Jul 1990
TL;DR: In this article, the Coriolis principle is applied to a flow meter with two energy converters and an oscillation exciter for oscillating the tube to generate a wave traveling along the tube.
Abstract: The flow meter works on the Coriolis principle and has a measuring tube and at least two energy converters. At least one of the energy converters is an oscillation exciter for oscillating the tube to generate a wave traveling along the tube and an oscillation detector. An evaluating circuit uses the speed of travel of waves in the direction of flow of fluid through the tube and in the direction opposite the direction of flow to determine the mass flow of fluid through the tube.

19 citations


Patent
Josef Kleinhans1
26 Oct 1990
TL;DR: In this article, a method and apparatus controlled the temperature of a precision resistor and, in turn, measured the flow rate of a flowing fluid mass is presented. But the precision resistor is a hot wire or hot film of an air mass meter of an internal combustion engine of a motor vehicle.
Abstract: A method and apparatus controls the temperature of a precision resistor and, in turn, measures the flow rate of a flowing fluid mass. The precision resistor is a hot wire or hot film of an air mass meter of an internal combustion engine of a motor vehicle. Through timed current flow, the operating temperature of the precision resistor is maintained at a higher temperature than the temperature of the flowing fluid mass. The timing of the electric current for maintaining the operating temperature of the precision resistor is controlled based on the magnitude of the gating voltage supplied to heat the precision resistor.

18 citations


Patent
29 May 1990
TL;DR: In this paper, an extended range flow meter and method of providing continuous metering of fluid flow utilizing of two or more flow meters by the more accurate flow meter or combination of flow meters at a given flow volume is presented.
Abstract: This invention concerns an extended range flow meter and method of providing continuous metering of fluid flow utilizing of two or more flow meters by the more accurate flow meter or combination of flow meters at a given flow volume.

Patent
05 Jan 1990
TL;DR: In this paper, a part of a tube, through which a fluid passes, is cooled by means of an electronic cooling element and a flow rate of the fluid is measured on the basis of a temperature of a surface of the tube cooled.
Abstract: A part of a tube, through which a fluid passes, is cooled by means of an electronic cooling element and a flow rate of the fluid is measured on the basis of a temperature of a surface of the tube cooled. Not only can the flow rate of the liquid flowing through the tube be determined in a noncontacting manner and a very small flow rate of the liquid be determined, but also the tube is cooled so that no bubbles are generated, and thus the measurement of the liquid, which is apt to generate gases, such as low boiling point liquid, is possible. In addition, the measurement is not influenced by the gases dissolved in the liquid and merely the temperature difference resulting from the flow of the fluid, that is, the rise of the temperature of the fluid, is detected to prevent the measurement from being influenced by the installing posture of the flow meter, so that a highly accurate measurement is possible. Consequently, stable and sure controlling flow rate of liquid is possible.

Patent
11 Dec 1990
TL;DR: In this article, two ultrasonic transducers are arranged such that signals are transmitted from one to the other through the gas stream at an angle Υ, usually about 45°.
Abstract: Methods and apparatus (1) for measuring the mass flow rate of solids suspended in a gas stream (2) flowing along a pipe (3). Two ultrasonic transducers (4, 5) are mounted in short side arms (6, 7) extending from the pipe. The transducers are arranged such that signals are transmitted from one to the other through the gas stream at an angle Υ, usually about 45°. The received signals in both transducers are received by apparatus (8) and amplified. The invention allows determination of: the mean times for the ultrasonic pulses to travel from one transducer (4) to another (5) and vice-versa; the mean peak amplitude of received pulses; and, the standard deviation or spread of these parameters. The mean times taken for the ultrasonic signals to travel between the transducers are used to determine the gas flow velocity, and the mean peak amplitudes for calculating the solids loading. From these the mass flow rate is derived. The invention is applicable to determining mass flow rates of pulverised coal contained in an air flow in a large power station.

Book ChapterDOI
01 Jan 1990
TL;DR: In this paper, the authors present the methods of optimizing the transducers designed for measurements of the void fraction of two-phase flows in the channels of round and annular cross section.
Abstract: The paper presents the methods of optimizing the transducers designed for measurements of the void fraction of two-phase flows in the channels of round and annular cross section. On the basis of the analysis performed concrete solution of relatively high technical characteristics is proposed. Rated and actual characteristics of signal ranges and measurement errors are given for both sensors. Influence of the mass velocity on the void fraction of adiabatic two-phase flows is theoretically analysed. Effects of friction and of liquid-into-vapour entrainment are shown. Calculation results are compared with the obtained experimental data for helium. Special attention is given to the specific features of the processes in channels with different cross section.

Patent
13 Nov 1990
TL;DR: An ion drag air flow meter (10) including a gas ionizer (16), an ion collector (14) and apparatus for converting the collected ions into a signal providing an indication of the flow of a gas (40) is described in this paper.
Abstract: An ion drag air flow meter (10) including a gas ionizer (16), an ion collector (14) and apparatus (30) for converting the collected ions into a signal providing an indication of the flow of a gas (40).

01 Nov 1990
TL;DR: In this article, a mathematical model for predicting two-phase flow regime and a procedure for calculating pressure drop in process pipelines are presented, where the authors show that the two phases tend to separate and lag behind.
Abstract: Two-phase flow often presents design and operational problems not associated with liquid or gas flow. For example, several different flow patterns may exist along the pipeline. Frictional pressure losses are more difficult to estimate, and, in the case of a cross-country pipeline, a terrain profile is necessary to predict pressure drops due to elevation changes. The downstream end of the pipeline often requires a separator to separate the liquid and vapor phases, and a slug catcher may be required to remove liquid slugs. Static pressure losses in gas-liquid flow differ from those in single-phase flow because an interface can be either smooth or rough, depending on the flow pattern. Two-phase pressure losses may be up to a factor of 10 higher than those in single-phases flow; in the former, the two phases tend to separate and the liquid lags behind. Most correlations for two-phase pressure drop are empirical and, thus, limited by the range of data for which they were derived. Mathematical models for predicting the flow regime and a procedure for calculating pressure drop in process pipelines are presented.

Patent
30 Nov 1990
TL;DR: In this paper, a mass flowmeter is used to measure a measured mass flow rate signal with a setting signal corresponding to a specific mass-flow rate which is set previously, and controlling a control valve and spraying paint at a specified mass-level flow rate.
Abstract: PURPOSE: To perform coating of high quality to constant film thickness without considering temperature variation by comparing a measured mass flow rate signal with a setting signal corresponding to a specific mass flow rate which is set previously, and controlling a control valve and spraying paint at a specific mass flow rate. CONSTITUTION: A mass flowmeter 3 responds extremely quickly because its excitation frequency is high and outputs a mass flow rate as a mass flow rate as an analog signal. A flow rate control part 12 sets a reference signal corresponding to the mass flow rate by a flow rate setting part 11 and compares said analog mass flow rate with the reference signal. An A/D converter 13 performs digital conversion so that the mass flow rate reaches the set value and the opening and closing of the control valve 4 is controlled with the digital signal to open and close the flow rate according to a coating program. Namely, the paint 2 in a tank 1 is transported by a pump 6 under fixed pressure to fill piping 9 to the constant pressure through the pressure control valve. Solenoid valves 7 and 8 are opened and closed under the command of the control part 12 and the paint is sprayed from a nozzle 5 at the set mass flow rate. COPYRIGHT: (C)1992,JPO&Japio

Journal ArticleDOI
TL;DR: In this article, a camera simultaneously operated with a stroboscope was used to investigate the flow characteristics of steady state pneumatic transportation of solids in horizontal pipes at low fluid velocities.



Patent
22 Nov 1990
TL;DR: In this article, the mass flow is determined from the press difference between the forward and reverse sides of the heat exchanger, and the relationship between press difference and mass flow are represented on a graph enabling the determination of the gas flow from several measured press.
Abstract: The static press. of the gaseous medium is directly measured by cylindrical probes closed at one end arranged at the forward and reverse sides of the heat exchanger. The mass flow is determined from the press difference between the forward and reverse sides. The relationship between press. difference and mass flow is represented on a graph enabling )determination of the mass flow from several measured press. differences and the derived total press. loss. USE/ADVANTAGE - For economical measurement of gas flow through heat exchanger used as liquid cooling device in motor vehicle.

Journal ArticleDOI
TL;DR: In this paper, the Hagen-Poiseuille flow through a straight pipe, which rotates about an axis perpendicular to its own, is considered and its perturbation is computed to second order and its features are described.
Abstract: The fully developed flow through a straight pipe, which rotates about an axis perpendicular to its own, is considered. The perturbation of the Hagen-Poiseuille flow, produced by the pipe rotation, is computed to second order and its features are described. The force of the fluid on the rotating pipe is correlated with other parameters of the flow, among them the mass flow rate Q. Possible relevance of the flow field and of the fluid forces in the rotating pipe for Coriolis flow meters are discussed

Patent
31 Jul 1990
TL;DR: In this paper, the air flow rate meter is used in the intake tube of internal combustion engines, such a meter typically having a flat substrate with at least one resistor film disposed on it, which causes undesirable changes in the characteristic curve compared with the calibrated new state of the meter.
Abstract: When an air flow rate meter is used in the intake tube of internal combustion engines, such a meter typically having a flat substrate with at least one resistor film disposed on it, the problem arises of dirt deposits on the substrate end face facing into the flow, which cause undesirable changes in the characteristic curve compared with the calibrated new state of the air flow rate meter. The novel embodiment of the air flow rate member is intended to enable calibration based on conditions expected in practice. To produce the effect, while the air flow rate meter is new, of long-term soiling of an air flow rate meter substrate over a period of operation, a leading body, for instance shaped as a U, is disposed on the end face of the substrate facing into the flow. The leading body simulates a soiled effect while the air flow rate meter is still new, and this effect is taken into account in the calibration. The leading body may be of electrically conductive plastic or lacquer and may be connected to a ground line (15). The air flow rate meter is quite generally suitable for measuring flowing media.

Journal ArticleDOI
TL;DR: The Coriolis technique is now being used effectively in a variety of mass flow measurement applications as mentioned in this paper, and it has been used in a wide range of applications. But it is not suitable for the measurement of large-scale data.
Abstract: The Coriolis technique is now being used effectively in a variety of mass flow measurement applications.

Patent
27 Jun 1990
TL;DR: In this paper, a method of generating an actual flow value for controlling the flow of a gas involves extracting a parallel flow (3) of the gas from the flow channel (1) and feeding it back into the channel downstream.
Abstract: A method of generating an actual flow value for controlling the flow of a gas involves extracting a parallel flow (3) of the gas from the flow channel (1) and feeding it back into the channel downstream. A calibrated (6) flow (8) of atmospheric air is drawn into the parallel flow (3) and this flow is detected (9) to produce the actual value for controlling the flow of gas in the flow channel. USE/ADVANTAGE - Controlling vol. flow in air conditioning systems. Prevents degradation of, or damage to, sensor by contaminants or corrosive substances in controlled flow whilst maintaining accurate control of esp. value in laboratory.

Patent
13 Dec 1990
TL;DR: In this article, two transducers are offset axially from the execution of known geometry with a W-shaped measurement section and/or are set at an angle such that the transducers and the Wshaped path are not situated orthogonally in relation to each other.
Abstract: Ultrasonic gas/liquid flow meter with a W-shaped path inside the tube. The two transducers (101, 102; 201, 202) are offset axially from the execution of known geometry with a W-shaped measurement section and/or are set at an angle such that the transducers and the W-shaped path are not situated orthogonally in relation to each other.

28 Feb 1990
TL;DR: In this article, a gamma-ray absorptiometric sensors are used to derive cross-correlation velocity data from a single non-intrusive sensing head, and the authors outline aspects of the design and evaluation of one such system.
Abstract: The most common purpose of industrial flow metering is to determine the mass flow rate of a product. Ultrasonic cross-correlation flowmeters give velocity data, and so (at best) the volumetric flow rate for the multiphase mixture is determined. Mass flow depends also on the fluid mean density which in turn depends on the void/solids fraction in the liquid. Gamma-ray attenuation is a traditional methodology for measuring density or void fraction, whereas acoustic attenuation is difficult to interpret in these terms. If gamma-ray absorptiometric sensors can also be used to derive cross-correlation velocity data, then the possibility arises of inferring mass flow rates from a single non-intrusive sensing head. The authors outline aspects of the design and evaluation of one such system.


Journal ArticleDOI
TL;DR: In this article, a simplified and inexpensive solution to the on-line monitoring of low fluid flow is reported, which can utilise a variety of common liquid flow sampling devices (i.e. fraction collector volumeters) as a front-end, constant-volume dispenser coupled to a described sample-and-hold circuit.
Abstract: A novel, simplified and inexpensive solution to the on-line monitoring of low fluid flow is reported. The method can utilise a variety of common liquid flow sampling devices (i.e. fraction collector volumeters) as a front-end, constant-volume dispenser coupled to a described sample-and-hold circuit. The latter, on triggering, samples a variably set ramp voltage which is directly proportional to liquid volume flow rate. The system is easily calibrated, has a wide dynamic range of volume flow rates, and can be configured accurately for high signal resolution of very low flow phenomena. An application to coronary flow measurement is provided as well as circuit descriptions and typical performance parameters which can be measured and adjusted for optimisation.

Patent
09 Nov 1990
TL;DR: In this article, the authors proposed a sensor for determining the temperature averaged on the basis of the mass flow density of a medium flowing through a tube, this medium having a mass-flow density gradient and a temperature gradient in the tube transverse to the direction of flow.
Abstract: In order to create a sensor for determining the temperature averaged on the basis of the mass flow density of a medium flowing through a tube, this medium having a mass flow density gradient and a temperature gradient in the tube transverse to the direction of flow, which allows the temperature averaged on the basis of the mass flow density to be ascertained more reliably and even more exactly, it is suggested that the sensor comprise a carrier body and a resistor body held thereby, the resistor body having a measuring current flowing therethrough and a temperature-responsive variable electrical resistance which leads for its part to a correspondingly variable voltage drop, and that the resistor body be designed such that the temperature-responsive variable electrical resistance of the resistor body varies with extension of the resistor body in a transverse direction in accordance with the mass flow density.