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Thermal mass flow meter

About: Thermal mass flow meter is a research topic. Over the lifetime, 1759 publications have been published within this topic receiving 21878 citations.


Papers
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Patent
23 May 2007
TL;DR: In this paper, the authors present a thermal type mass flow meter and a thermal flow control device which can lower a measurement error caused by an influence of a thermal siphon phenomenon so as to improve a flow rate measurement precision.
Abstract: The present invention provides a thermal type mass flow meter and a thermal type mass flow control device which can lower a measurement error caused by an influence of a thermal siphon phenomenon so as to intend to improve a flow rate measurement precision while it is possible to construct a whole compactly and inexpensively with a simple structure, without using any flow path converting block. The present invention has a CPU for correction computing process which works to cancel a measurement error caused by an influence of a thermal siphon phenomenon by calculating a correction value based on a measurement value at a time of depressurizing a fluid flow path in a block and a flow rate measuring conduit to an atmospheric pressure or less, a difference between the measurement value and a measurement value at a time of charging an actual fluid into the flow rate measuring conduit, a kind of the actual fluid, a pressure at a time of charging the actual fluid, and a flow ratio of the fluid flowing in the fluid flow path and the flow rate measuring conduit, storing the correction value, and correcting an actual measured output value by the correction value.

7 citations

Patent
Hiroshi Nakano1, Masamichi Yamada1, Masahiro Matsumoto1, Izumi Watanabe1, Keiji Hanzawa1 
05 Mar 2004
TL;DR: In this article, a thermal air meter with excellent flow rate measuring accuracy is presented, where a measuring element is formed by placing a heating resistor and a temperature compensated resistor on a first substrate, a second substrate having a drive circuit and a signal treating device for the air flow meter is stored in a casing supporting the flow measuring element, the flow measurement element is disposed in an air passage, and a first temperature sensor among those sensors measuring the temperatures of two points in the air Flow meter is installed on the first substrate of the flow meter and a second temperature sensor is installed inside the casing
Abstract: A thermal air meter having excellent flow rate measuring accuracy, wherein a measuring element is formed by placing a heating resistor and a temperature compensated resistor on a first substrate, a second substrate having a drive circuit and a signal treating device for the air flow meter is stored in a casing supporting the flow measuring element, the flow measuring element is disposed in an air passage, and a first temperature sensor among those sensors measuring the temperatures of two points in the air flow meter is installed on the first substrate of the flow measuring element and a second temperature sensor is installed on the second substrate inside the casing. The signal treatment device calculates air flow rate, air temperature, and air wall surface temperature based on output signals from the flow measuring element and output signals from the first and second temperature sensors.

7 citations

Journal ArticleDOI
TL;DR: In this article, the effects of pulsating flow on a single-rotor turbine meter with a rotor response parameter greater than unity were investigated experimentally, and it was shown that the velocity amplitude at the rotor results from the system response, which is determined by the system geometry, pulsation frequency, flow velocity and sound speed.
Abstract: The effects of pulsating flow on a single-rotor turbine meter with a rotor response parameter greater than unity were investigated experimentally. Oscillating velocities and pressures at various pipe cross-sections were measured which enabled characterization of flow properties at the turbine meter and their effect on meter error. Measurements confirmed that meter error depends primarily on the velocity amplitude of the flow pulsation at the rotor. Moreover, it was shown that the velocity amplitude at the rotor results from the system response, which is determined by the system geometry, pulsation frequency, flow velocity, and sound speed. Lastly, a technique was developed to determine the meter error from measurements of dynamic pressure in the pipe upstream or downstream of the turbine meter.

7 citations

Journal ArticleDOI
TL;DR: In this article, a thermal mass flow meter has been fabricated in the operating range of 0-500 sccm and the main affecting parameters on its performance have been investigated and a computer simulation is performed to obtain the proper operation conditions and to compare the experimental data with simulation results.

7 citations

Journal ArticleDOI
TL;DR: In this article, the suitability and performance of one of the most advanced averaging pitot tubes for the flow measurement of wet CO2 gas was investigated and experimentally assessed in earlier work.

7 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
202312
202226
20212
20208
20194
201811