Thermal mass flow meter

About: Thermal mass flow meter is a research topic. Over the lifetime, 1759 publications have been published within this topic receiving 21878 citations.

Mass flow controller device and its calibrating method

Abstract: PURPOSE: To more accurately calibrate a mass flow controller which is used when a process gas is introduced to a vacuum processing chamber while the flow rate of the gas is controlled by using the process gas. CONSTITUTION: Since and actual flow rate operating section 10 which the actual flow rate controlled by a mass flow controller 4 from the pressure increase, etc., in a vacuum processing chamber 7 while a process gas is made to flow to the chamber 7 from the controller 4 for a fixed period of time, comparator circuit 12 which operates the difference between a flow rate set by a gas flow rate setting and inputting section 1 and the actual flow rate, correcting value operating section 13, and correction circuit 2 which makes the actual flow rate coincident with the set flow rate are provided, the deviation between the set flow rate and actual flow rate can be calibrated. COPYRIGHT: (C)1995,JPO

Method for measuring the temperature, the flow rate and the pressure of a fluid and device suitable for carrying out this method

Abstract: For the combined temperature, flow and density measurement, use is made of a turbulent flow meter having a sensor, preferably a strip-type thermometer resembling a strip-type strain gauge, which is mounted on a tongue which is arranged in a defined position behind the perturbing body in the flow and by means of which a measurement signal is produced or determined, which measurement signal can be evaluated with regard to offset, frequency and amplitude so that, in turn, the temperature, flow rate and density can be determined therefrom.

Fluid Mechanics and Heat Transfer of Two-Phase Annular-Dispersed Flow

Abstract: Publisher Summary This chapter discusses the flow patterns of two-phase flow, annular-dispersed flow pattern boundaries, and physical quantities of interest in annular dispersed flow. Heat transfer with two-phase, two-component mixtures is also discussed. Several physical quantities of interest in annular dispersed flow are—void fraction and slip ratio, void fraction and slip ratio in annular-dispersed flow, and energy and momentum balance in two-phase flow. Several practical applications of annular-dispersed flow are also presented. The simultaneous flow of a gas and a liquid in a single duct, with and without heat transfer, is of a common occurrence in many industrial processes. The petroleum industry, for instance, is particularly concerned with the flow of two-phase mixtures in the reservoir, well bore, gathering lines, transmission lines, and processing plant equipment. Steam generators are another very important example of industrial plants operating with a two-phase flow. The interest in this field has considerably increased in recent years in connection with the construction of steam generating nuclear reactors. One of the characteristics of the in-reactor steam generation is that, below the critical pressure of water, two-phase flow exists at least in a portion of the reactor core.