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Thermal mass flow meter

About: Thermal mass flow meter is a research topic. Over the lifetime, 1759 publications have been published within this topic receiving 21878 citations.


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Patent
13 Mar 2012
TL;DR: In this article, a mass flow rate sensor system (200) is described, which includes a density meter (202) including a sensor assembly (204a) and a density meters electronics (204b) configured to generate a density measurement of a process fluid.
Abstract: A mass flow rate sensor system (200) is provided. The mass flow rate sensor system (200) includes a density meter (202) including a sensor assembly (204a) and a density meter electronics (204b) configured to generate a density measurement of a process fluid. The mass flow rate sensor system (200) further includes a volumetric flow meter (203) including a sensor assembly (205a) and a volumetric meter electronics (205b) configured to generate a volumetric flow rate of the process fluid and in electrical communication with the density meter electronics (204b). A remote processing system (207) is provided that is in electrical communication with only one of the density meter electronics (204b) or the volumetric meter electronics (205b). The remote processing system (207) is configured to receive a mass flow rate measurement of the process fluid generated by the density meter electronics (204b) or the volumetric meter electronics (205b) based on the generated density measurement and the generated volumetric flow rate.

4 citations

Journal ArticleDOI
TL;DR: In this paper, an integrated characteristics evaluation system for dry vacuum pumps has been established in KRISS in collaboration with several branch dry pump suppliers in Korea, which exploits a constant volume flow meter to measure mass flow rates real-timely in standard level, and facilitates the evaluation of spatially averaged sound power levels using a semi-anechoic chamber.
Abstract: Since a clean environment and finite mass flow control on the molecular level are continuously required in current R&D fields and actual process lines, technologies on vacuum generation and control have been playing a significant role in merging a variety of technologies like Bio, Information, Environment, Energy, Space and Nano. Currently, the drive towards dry vacuum pumping has broadly occurred across a spectrum of vacuum applications, from semiconductor manufacture to industrial processing, due to its most visible advantages: it is contamination free. The integrated characteristics evaluation system for dry vacuum pumps has been established in KRISS in collaboration with several branch dry pump suppliers in Korea. The evaluation system exploits a constant volume flow meter to measure mass flow rates real-timely in standard level, and facilitates the evaluation of spatially averaged sound power levels using a semi-anechoic chamber. New and overhauled roots, claw, classical screw, and scroll type pumps supplied from the manufacturers have been evaluated using the evaluation system in terms of ultimate pressure, pumping speed, vibration, and sound power. We selected the mass flow measuring method with a constant chamber volume of 875 L because of its direct monitoring capability which does not allow blind mass flow rate measurements, and proved that the method allows us to measure five decades of mass flow rates from 1×10-2 to 1×103 mbar-l/s with a measurement uncertainty of ±3%, which is within the internationally accepted standards limit. In this work, we demonstrate how the integrated pump characteristics evaluation and mass flow control method have been significant in the low vacuum range of 10-4 to 103 mbar.

4 citations

Patent
26 Feb 1999
TL;DR: In this article, a fluid mass flow rate controller consisting of an ultrasonic flowmeter, a flow rate control valve and a valve drive control circuit is proposed to achieve high accuracy and high heat resistance.
Abstract: PROBLEM TO BE SOLVED: To provide a fluid mass flow rate controller which never causes the clogging at a flow rate detection part, has high heat resistance and can control even a large flow rate with high accuracy. SOLUTION: A fluid mass flow rate controller 1 consists of an ultrasonic flowmeter 3 which measures the flow rate of gas flowing in a gas pipe 2, a flow rate control valve 4 which controls the flow rate of gas flowing in the pipe 2 and a valve drive control circuit 5 which compares the mass flow rate measured by the flowmeter 3 with the mass flow rate of the target gas and controls the opening degree of the valve 4 to secure the coincidence between both mass flow rates. In such a constitution, the clogging is never caused at a flow rate detection part with high heat resistance, being different from the case where a thermal flow rate sensor is used. In addition, even a large flow rate can be controlled with high accuracy and the pressure loss of a gas flow is never caused at the flow rate detection part.

4 citations

Journal ArticleDOI
TL;DR: A compressible Computational Fluid Dynamic solver is used to understand the behavior of the Thermal Mass Flow Meter with different process gases to establish cross compatibility relationship of the TMFM with differentprocess gases.
Abstract: A majority of vacuum processes use the Thermal Mass Flow Meter (TMFM) as metering device for process gas. The purpose of this paper is to establish cross compatibility relationship of the TMFM with different process gases. This paper uses a compressible Computational Fluid Dynamic (CFD) solver to understand the behavior of TMFM with different process gases. The change in the characteristic curve at lower pressures has also been studied. Empirical correlations have been developed so that the change in characteristic curve of TMFM can be predicted accurately for different gases based on their physical properties.

4 citations


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Performance
Metrics
No. of papers in the topic in previous years
YearPapers
202312
202226
20212
20208
20194
201811